9/30/2011	12:00:15 AM	Helium valve closed
9/30/2011	12:00:15 AM	H2 valve closed
9/30/2011	12:00:15 AM	BCl3 valve closed
9/30/2011	12:00:15 AM	PH3 valve closed
9/30/2011	12:00:15 AM	SiCl4 pre valve closed
9/30/2011	12:00:15 AM	SiCl4 post valve closed
9/30/2011	12:00:15 AM	Bypass valve closed
9/30/2011	12:00:15 AM	Bubbler valve closed
9/30/2011	12:00:15 AM	Main Vac valve opened
9/30/2011	12:00:15 AM	Helium MFC set to  0.000000
9/30/2011	12:00:15 AM	H2 MFC set to  0.000000
9/30/2011	12:00:15 AM	BCl3 MFC set to  0.000000
9/30/2011	12:00:15 AM	PHl3 MFC set to  0.000000
9/30/2011	12:00:15 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:00:15 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:00:15 AM	Tube furnace set to 300
9/30/2011	12:00:45 AM	H2 valve closed
9/30/2011	12:00:45 AM	BCl3 valve closed
9/30/2011	12:00:45 AM	PH3 valve closed
9/30/2011	12:00:45 AM	SiCl4 pre valve closed
9/30/2011	12:00:45 AM	SiCl4 post valve closed
9/30/2011	12:00:45 AM	Bypass valve closed
9/30/2011	12:00:45 AM	Bubbler valve closed
9/30/2011	12:00:45 AM	Helium valve opened
9/30/2011	12:00:45 AM	Main Vac valve opened
9/30/2011	12:00:45 AM	Helium MFC set to  20.000000
9/30/2011	12:00:45 AM	H2 MFC set to  0.000000
9/30/2011	12:00:45 AM	BCl3 MFC set to  0.000000
9/30/2011	12:00:45 AM	PHl3 MFC set to  0.000000
9/30/2011	12:00:45 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:00:45 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:00:45 AM	Tube furnace set to 300
9/30/2011	12:01:16 AM	Helium valve closed
9/30/2011	12:01:16 AM	H2 valve closed
9/30/2011	12:01:16 AM	BCl3 valve closed
9/30/2011	12:01:16 AM	PH3 valve closed
9/30/2011	12:01:16 AM	SiCl4 pre valve closed
9/30/2011	12:01:16 AM	SiCl4 post valve closed
9/30/2011	12:01:16 AM	Bypass valve closed
9/30/2011	12:01:16 AM	Bubbler valve closed
9/30/2011	12:01:16 AM	Main Vac valve opened
9/30/2011	12:01:16 AM	Helium MFC set to  0.000000
9/30/2011	12:01:16 AM	H2 MFC set to  0.000000
9/30/2011	12:01:16 AM	BCl3 MFC set to  0.000000
9/30/2011	12:01:16 AM	PHl3 MFC set to  0.000000
9/30/2011	12:01:16 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:01:16 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:01:16 AM	Tube furnace set to 300
9/30/2011	12:01:46 AM	H2 valve closed
9/30/2011	12:01:46 AM	BCl3 valve closed
9/30/2011	12:01:46 AM	PH3 valve closed
9/30/2011	12:01:46 AM	SiCl4 pre valve closed
9/30/2011	12:01:46 AM	SiCl4 post valve closed
9/30/2011	12:01:46 AM	Bypass valve closed
9/30/2011	12:01:46 AM	Bubbler valve closed
9/30/2011	12:01:46 AM	Helium valve opened
9/30/2011	12:01:46 AM	Main Vac valve opened
9/30/2011	12:01:46 AM	Helium MFC set to  20.000000
9/30/2011	12:01:46 AM	H2 MFC set to  0.000000
9/30/2011	12:01:46 AM	BCl3 MFC set to  0.000000
9/30/2011	12:01:46 AM	PHl3 MFC set to  0.000000
9/30/2011	12:01:46 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:01:46 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:01:46 AM	Tube furnace set to 300
9/30/2011	12:02:16 AM	Helium valve closed
9/30/2011	12:02:16 AM	H2 valve closed
9/30/2011	12:02:16 AM	BCl3 valve closed
9/30/2011	12:02:16 AM	PH3 valve closed
9/30/2011	12:02:16 AM	SiCl4 pre valve closed
9/30/2011	12:02:16 AM	SiCl4 post valve closed
9/30/2011	12:02:16 AM	Bypass valve closed
9/30/2011	12:02:16 AM	Bubbler valve closed
9/30/2011	12:02:16 AM	Main Vac valve opened
9/30/2011	12:02:16 AM	Helium MFC set to  0.000000
9/30/2011	12:02:16 AM	H2 MFC set to  0.000000
9/30/2011	12:02:16 AM	BCl3 MFC set to  0.000000
9/30/2011	12:02:16 AM	PHl3 MFC set to  0.000000
9/30/2011	12:02:16 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:02:16 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:02:16 AM	Tube furnace set to 300
9/30/2011	12:02:46 AM	H2 valve closed
9/30/2011	12:02:46 AM	BCl3 valve closed
9/30/2011	12:02:46 AM	PH3 valve closed
9/30/2011	12:02:46 AM	SiCl4 pre valve closed
9/30/2011	12:02:46 AM	SiCl4 post valve closed
9/30/2011	12:02:46 AM	Bypass valve closed
9/30/2011	12:02:46 AM	Bubbler valve closed
9/30/2011	12:02:46 AM	Helium valve opened
9/30/2011	12:02:46 AM	Main Vac valve opened
9/30/2011	12:02:46 AM	Helium MFC set to  20.000000
9/30/2011	12:02:46 AM	H2 MFC set to  0.000000
9/30/2011	12:02:46 AM	BCl3 MFC set to  0.000000
9/30/2011	12:02:46 AM	PHl3 MFC set to  0.000000
9/30/2011	12:02:46 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:02:46 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:02:46 AM	Tube furnace set to 300
9/30/2011	12:03:16 AM	Helium valve closed
9/30/2011	12:03:16 AM	H2 valve closed
9/30/2011	12:03:16 AM	BCl3 valve closed
9/30/2011	12:03:16 AM	PH3 valve closed
9/30/2011	12:03:16 AM	SiCl4 pre valve closed
9/30/2011	12:03:16 AM	SiCl4 post valve closed
9/30/2011	12:03:16 AM	Bypass valve closed
9/30/2011	12:03:16 AM	Bubbler valve closed
9/30/2011	12:03:16 AM	Main Vac valve opened
9/30/2011	12:03:16 AM	Helium MFC set to  0.000000
9/30/2011	12:03:16 AM	H2 MFC set to  0.000000
9/30/2011	12:03:16 AM	BCl3 MFC set to  0.000000
9/30/2011	12:03:16 AM	PHl3 MFC set to  0.000000
9/30/2011	12:03:16 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:03:16 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:03:17 AM	Tube furnace set to 300
9/30/2011	12:03:47 AM	H2 valve closed
9/30/2011	12:03:47 AM	BCl3 valve closed
9/30/2011	12:03:47 AM	PH3 valve closed
9/30/2011	12:03:47 AM	SiCl4 pre valve closed
9/30/2011	12:03:47 AM	SiCl4 post valve closed
9/30/2011	12:03:47 AM	Bypass valve closed
9/30/2011	12:03:47 AM	Bubbler valve closed
9/30/2011	12:03:47 AM	Helium valve opened
9/30/2011	12:03:47 AM	Main Vac valve opened
9/30/2011	12:03:47 AM	Helium MFC set to  20.000000
9/30/2011	12:03:47 AM	H2 MFC set to  0.000000
9/30/2011	12:03:47 AM	BCl3 MFC set to  0.000000
9/30/2011	12:03:47 AM	PHl3 MFC set to  0.000000
9/30/2011	12:03:47 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:03:47 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:03:47 AM	Tube furnace set to 300
9/30/2011	12:04:17 AM	Helium valve closed
9/30/2011	12:04:17 AM	H2 valve closed
9/30/2011	12:04:17 AM	BCl3 valve closed
9/30/2011	12:04:17 AM	PH3 valve closed
9/30/2011	12:04:17 AM	SiCl4 pre valve closed
9/30/2011	12:04:17 AM	SiCl4 post valve closed
9/30/2011	12:04:17 AM	Bypass valve closed
9/30/2011	12:04:17 AM	Bubbler valve closed
9/30/2011	12:04:17 AM	Main Vac valve opened
9/30/2011	12:04:17 AM	Helium MFC set to  0.000000
9/30/2011	12:04:17 AM	H2 MFC set to  0.000000
9/30/2011	12:04:17 AM	BCl3 MFC set to  0.000000
9/30/2011	12:04:17 AM	PHl3 MFC set to  0.000000
9/30/2011	12:04:17 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:04:17 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:04:17 AM	Tube furnace set to 300
9/30/2011	12:04:47 AM	H2 valve closed
9/30/2011	12:04:47 AM	BCl3 valve closed
9/30/2011	12:04:47 AM	PH3 valve closed
9/30/2011	12:04:47 AM	SiCl4 pre valve closed
9/30/2011	12:04:47 AM	SiCl4 post valve closed
9/30/2011	12:04:47 AM	Bypass valve closed
9/30/2011	12:04:47 AM	Bubbler valve closed
9/30/2011	12:04:47 AM	Helium valve opened
9/30/2011	12:04:47 AM	Main Vac valve opened
9/30/2011	12:04:47 AM	Helium MFC set to  20.000000
9/30/2011	12:04:47 AM	H2 MFC set to  0.000000
9/30/2011	12:04:47 AM	BCl3 MFC set to  0.000000
9/30/2011	12:04:47 AM	PHl3 MFC set to  0.000000
9/30/2011	12:04:47 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:04:47 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:04:47 AM	Tube furnace set to 300
9/30/2011	12:05:17 AM	Helium valve closed
9/30/2011	12:05:17 AM	H2 valve closed
9/30/2011	12:05:17 AM	BCl3 valve closed
9/30/2011	12:05:17 AM	PH3 valve closed
9/30/2011	12:05:17 AM	SiCl4 pre valve closed
9/30/2011	12:05:17 AM	SiCl4 post valve closed
9/30/2011	12:05:17 AM	Bypass valve closed
9/30/2011	12:05:17 AM	Bubbler valve closed
9/30/2011	12:05:17 AM	Main Vac valve opened
9/30/2011	12:05:17 AM	Helium MFC set to  0.000000
9/30/2011	12:05:17 AM	H2 MFC set to  0.000000
9/30/2011	12:05:17 AM	BCl3 MFC set to  0.000000
9/30/2011	12:05:17 AM	PHl3 MFC set to  0.000000
9/30/2011	12:05:17 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:05:17 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:05:17 AM	Tube furnace set to 300
9/30/2011	12:05:47 AM	H2 valve closed
9/30/2011	12:05:47 AM	BCl3 valve closed
9/30/2011	12:05:47 AM	PH3 valve closed
9/30/2011	12:05:47 AM	SiCl4 pre valve closed
9/30/2011	12:05:47 AM	SiCl4 post valve closed
9/30/2011	12:05:47 AM	Bypass valve closed
9/30/2011	12:05:47 AM	Bubbler valve closed
9/30/2011	12:05:47 AM	Helium valve opened
9/30/2011	12:05:47 AM	Main Vac valve opened
9/30/2011	12:05:47 AM	Helium MFC set to  20.000000
9/30/2011	12:05:47 AM	H2 MFC set to  0.000000
9/30/2011	12:05:47 AM	BCl3 MFC set to  0.000000
9/30/2011	12:05:47 AM	PHl3 MFC set to  0.000000
9/30/2011	12:05:47 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:05:48 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:05:48 AM	Tube furnace set to 300
9/30/2011	12:06:18 AM	Helium valve closed
9/30/2011	12:06:18 AM	H2 valve closed
9/30/2011	12:06:18 AM	BCl3 valve closed
9/30/2011	12:06:18 AM	PH3 valve closed
9/30/2011	12:06:18 AM	SiCl4 pre valve closed
9/30/2011	12:06:18 AM	SiCl4 post valve closed
9/30/2011	12:06:18 AM	Bypass valve closed
9/30/2011	12:06:18 AM	Bubbler valve closed
9/30/2011	12:06:18 AM	Main Vac valve opened
9/30/2011	12:06:18 AM	Helium MFC set to  0.000000
9/30/2011	12:06:18 AM	H2 MFC set to  0.000000
9/30/2011	12:06:18 AM	BCl3 MFC set to  0.000000
9/30/2011	12:06:18 AM	PHl3 MFC set to  0.000000
9/30/2011	12:06:18 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:06:18 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:06:18 AM	Tube furnace set to 300
9/30/2011	12:06:48 AM	H2 valve closed
9/30/2011	12:06:48 AM	BCl3 valve closed
9/30/2011	12:06:48 AM	PH3 valve closed
9/30/2011	12:06:48 AM	SiCl4 pre valve closed
9/30/2011	12:06:48 AM	SiCl4 post valve closed
9/30/2011	12:06:48 AM	Bypass valve closed
9/30/2011	12:06:48 AM	Bubbler valve closed
9/30/2011	12:06:48 AM	Helium valve opened
9/30/2011	12:06:48 AM	Main Vac valve opened
9/30/2011	12:06:48 AM	Helium MFC set to  20.000000
9/30/2011	12:06:48 AM	H2 MFC set to  0.000000
9/30/2011	12:06:48 AM	BCl3 MFC set to  0.000000
9/30/2011	12:06:48 AM	PHl3 MFC set to  0.000000
9/30/2011	12:06:48 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:06:48 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:06:48 AM	Tube furnace set to 300
9/30/2011	12:07:18 AM	Helium valve closed
9/30/2011	12:07:18 AM	H2 valve closed
9/30/2011	12:07:18 AM	BCl3 valve closed
9/30/2011	12:07:18 AM	PH3 valve closed
9/30/2011	12:07:18 AM	SiCl4 pre valve closed
9/30/2011	12:07:18 AM	SiCl4 post valve closed
9/30/2011	12:07:18 AM	Bypass valve closed
9/30/2011	12:07:18 AM	Bubbler valve closed
9/30/2011	12:07:18 AM	Main Vac valve opened
9/30/2011	12:07:18 AM	Helium MFC set to  0.000000
9/30/2011	12:07:18 AM	H2 MFC set to  0.000000
9/30/2011	12:07:18 AM	BCl3 MFC set to  0.000000
9/30/2011	12:07:18 AM	PHl3 MFC set to  0.000000
9/30/2011	12:07:18 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:07:18 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:07:18 AM	Tube furnace set to 300
9/30/2011	12:07:19 AM	Run finished at 12:07 AM
9/30/2011	12:10:01 AM	Recipe started at 12:09 AM
9/30/2011	12:10:01 AM	Helium valve closed
9/30/2011	12:10:01 AM	H2 valve closed
9/30/2011	12:10:01 AM	BCl3 valve closed
9/30/2011	12:10:01 AM	PH3 valve closed
9/30/2011	12:10:01 AM	SiCl4 pre valve closed
9/30/2011	12:10:01 AM	SiCl4 post valve closed
9/30/2011	12:10:01 AM	Main Vac valve closed
9/30/2011	12:10:01 AM	Bypass valve closed
9/30/2011	12:10:01 AM	Bubbler valve closed
9/30/2011	12:10:01 AM	Helium MFC set to  0.000000
9/30/2011	12:10:01 AM	H2 MFC set to  0.000000
9/30/2011	12:10:01 AM	BCl3 MFC set to  0.000000
9/30/2011	12:10:01 AM	PHl3 MFC set to  0.000000
9/30/2011	12:10:01 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:10:01 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:10:01 AM	Tube furnace set to 0
9/30/2011	12:10:04 AM	Helium valve closed
9/30/2011	12:10:04 AM	BCl3 valve closed
9/30/2011	12:10:04 AM	PH3 valve closed
9/30/2011	12:10:04 AM	SiCl4 pre valve closed
9/30/2011	12:10:04 AM	SiCl4 post valve closed
9/30/2011	12:10:04 AM	Main Vac valve closed
9/30/2011	12:10:04 AM	Bypass valve closed
9/30/2011	12:10:04 AM	Bubbler valve closed
9/30/2011	12:10:04 AM	H2 valve opened
9/30/2011	12:10:04 AM	Helium MFC set to  0.000000
9/30/2011	12:10:04 AM	H2 MFC set to  500.000000
9/30/2011	12:10:04 AM	BCl3 MFC set to  0.000000
9/30/2011	12:10:04 AM	PHl3 MFC set to  0.000000
9/30/2011	12:10:04 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:10:04 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:10:04 AM	Tube furnace set to 0
9/30/2011	12:11:05 AM	Helium valve closed
9/30/2011	12:11:05 AM	BCl3 valve closed
9/30/2011	12:11:05 AM	PH3 valve closed
9/30/2011	12:11:05 AM	SiCl4 pre valve closed
9/30/2011	12:11:05 AM	SiCl4 post valve closed
9/30/2011	12:11:05 AM	Main Vac valve closed
9/30/2011	12:11:05 AM	Bypass valve closed
9/30/2011	12:11:05 AM	H2 valve opened
9/30/2011	12:11:05 AM	Bubbler valve opened
9/30/2011	12:11:05 AM	Helium MFC set to  0.000000
9/30/2011	12:11:05 AM	H2 MFC set to  500.000000
9/30/2011	12:11:05 AM	BCl3 MFC set to  0.000000
9/30/2011	12:11:05 AM	PHl3 MFC set to  0.000000
9/30/2011	12:11:05 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:11:05 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:11:05 AM	Tube furnace set to 0
9/30/2011	12:11:06 AM	Helium valve closed
9/30/2011	12:11:06 AM	BCl3 valve closed
9/30/2011	12:11:06 AM	PH3 valve closed
9/30/2011	12:11:06 AM	SiCl4 pre valve closed
9/30/2011	12:11:06 AM	SiCl4 post valve closed
9/30/2011	12:11:06 AM	Main Vac valve closed
9/30/2011	12:11:06 AM	Bypass valve closed
9/30/2011	12:11:06 AM	H2 valve opened
9/30/2011	12:11:06 AM	Bubbler valve opened
9/30/2011	12:11:06 AM	Helium MFC set to  0.000000
9/30/2011	12:11:06 AM	H2 MFC set to  500.000000
9/30/2011	12:11:06 AM	BCl3 MFC set to  0.000000
9/30/2011	12:11:06 AM	PHl3 MFC set to  0.000000
9/30/2011	12:11:06 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:11:06 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:11:06 AM	Tube furnace set to 1000
9/30/2011	12:31:06 AM	Helium valve closed
9/30/2011	12:31:06 AM	PH3 valve closed
9/30/2011	12:31:06 AM	Main Vac valve closed
9/30/2011	12:31:06 AM	Bypass valve closed
9/30/2011	12:31:06 AM	H2 valve opened
9/30/2011	12:31:06 AM	BCl3 valve opened
9/30/2011	12:31:06 AM	SiCl4 pre valve opened
9/30/2011	12:31:06 AM	SiCl4 post valve opened
9/30/2011	12:31:06 AM	Bubbler valve opened
9/30/2011	12:31:06 AM	Helium MFC set to  0.000000
9/30/2011	12:31:06 AM	H2 MFC set to  500.000000
9/30/2011	12:31:06 AM	BCl3 MFC set to  2.300000
9/30/2011	12:31:06 AM	PHl3 MFC set to  0.000000
9/30/2011	12:31:06 AM	SiCl4 MFC set to  80.000000
9/30/2011	12:31:06 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:31:06 AM	Tube furnace set to 1000
9/30/2011	12:41:06 AM	Helium valve closed
9/30/2011	12:41:06 AM	BCl3 valve closed
9/30/2011	12:41:06 AM	PH3 valve closed
9/30/2011	12:41:06 AM	SiCl4 pre valve closed
9/30/2011	12:41:06 AM	SiCl4 post valve closed
9/30/2011	12:41:07 AM	Main Vac valve closed
9/30/2011	12:41:07 AM	Bypass valve closed
9/30/2011	12:41:07 AM	H2 valve opened
9/30/2011	12:41:07 AM	Bubbler valve opened
9/30/2011	12:41:07 AM	Helium MFC set to  0.000000
9/30/2011	12:41:07 AM	H2 MFC set to  500.000000
9/30/2011	12:41:07 AM	BCl3 MFC set to  0.000000
9/30/2011	12:41:07 AM	PHl3 MFC set to  0.000000
9/30/2011	12:41:07 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:41:07 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:41:07 AM	Tube furnace set to 750
9/30/2011	12:46:07 AM	H2 valve closed
9/30/2011	12:46:07 AM	BCl3 valve closed
9/30/2011	12:46:07 AM	PH3 valve closed
9/30/2011	12:46:07 AM	SiCl4 pre valve closed
9/30/2011	12:46:07 AM	SiCl4 post valve closed
9/30/2011	12:46:07 AM	Main Vac valve closed
9/30/2011	12:46:07 AM	Bypass valve closed
9/30/2011	12:46:07 AM	Helium valve opened
9/30/2011	12:46:07 AM	Bubbler valve opened
9/30/2011	12:46:07 AM	Helium MFC set to  500.000000
9/30/2011	12:46:07 AM	H2 MFC set to  0.000000
9/30/2011	12:46:07 AM	BCl3 MFC set to  0.000000
9/30/2011	12:46:07 AM	PHl3 MFC set to  0.000000
9/30/2011	12:46:07 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:46:07 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:46:07 AM	Tube furnace set to 0
9/30/2011	12:51:58 AM	Helium valve closed
9/30/2011	12:51:58 AM	H2 valve closed
9/30/2011	12:51:58 AM	BCl3 valve closed
9/30/2011	12:51:58 AM	PH3 valve closed
9/30/2011	12:51:58 AM	SiCl4 pre valve closed
9/30/2011	12:51:58 AM	SiCl4 post valve closed
9/30/2011	12:51:58 AM	Main Vac valve closed
9/30/2011	12:51:58 AM	Bypass valve closed
9/30/2011	12:51:58 AM	Bubbler valve closed
9/30/2011	12:51:58 AM	Helium MFC set to  0.000000
9/30/2011	12:51:58 AM	H2 MFC set to  0.000000
9/30/2011	12:51:58 AM	BCl3 MFC set to  0.000000
9/30/2011	12:51:58 AM	PHl3 MFC set to  0.000000
9/30/2011	12:51:58 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:51:58 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:51:58 AM	Tube furnace set to 0
9/30/2011	12:51:59 AM	Run finished at 12:51 AM
9/30/2011	12:52:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	12:52:05 AM	Recipe started at 12:52 AM
9/30/2011	12:52:05 AM	Helium valve closed
9/30/2011	12:52:05 AM	H2 valve closed
9/30/2011	12:52:05 AM	BCl3 valve closed
9/30/2011	12:52:05 AM	PH3 valve closed
9/30/2011	12:52:05 AM	SiCl4 pre valve closed
9/30/2011	12:52:05 AM	SiCl4 post valve closed
9/30/2011	12:52:05 AM	Main Vac valve closed
9/30/2011	12:52:05 AM	Bypass valve closed
9/30/2011	12:52:05 AM	Bubbler valve closed
9/30/2011	12:52:05 AM	Helium MFC set to  0.000000
9/30/2011	12:52:05 AM	H2 MFC set to  0.000000
9/30/2011	12:52:05 AM	BCl3 MFC set to  0.000000
9/30/2011	12:52:05 AM	PHl3 MFC set to  0.000000
9/30/2011	12:52:05 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:52:05 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:52:06 AM	Tube furnace set to 0
9/30/2011	12:52:09 AM	H2 valve closed
9/30/2011	12:52:09 AM	BCl3 valve closed
9/30/2011	12:52:09 AM	PH3 valve closed
9/30/2011	12:52:09 AM	SiCl4 pre valve closed
9/30/2011	12:52:09 AM	SiCl4 post valve closed
9/30/2011	12:52:09 AM	Main Vac valve closed
9/30/2011	12:52:09 AM	Bypass valve closed
9/30/2011	12:52:09 AM	Bubbler valve closed
9/30/2011	12:52:09 AM	Helium valve opened
9/30/2011	12:52:09 AM	Helium MFC set to  500.000000
9/30/2011	12:52:09 AM	H2 MFC set to  0.000000
9/30/2011	12:52:09 AM	BCl3 MFC set to  0.000000
9/30/2011	12:52:09 AM	PHl3 MFC set to  0.000000
9/30/2011	12:52:09 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:52:09 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:52:09 AM	Tube furnace set to 0
9/30/2011	12:52:09 AM	Helium valve closed
9/30/2011	12:52:09 AM	H2 valve closed
9/30/2011	12:52:09 AM	BCl3 valve closed
9/30/2011	12:52:09 AM	PH3 valve closed
9/30/2011	12:52:09 AM	SiCl4 pre valve closed
9/30/2011	12:52:09 AM	SiCl4 post valve closed
9/30/2011	12:52:09 AM	Main Vac valve closed
9/30/2011	12:52:09 AM	Bypass valve closed
9/30/2011	12:52:09 AM	Bubbler valve closed
9/30/2011	12:52:09 AM	Helium MFC set to  0.000000
9/30/2011	12:52:09 AM	H2 MFC set to  0.000000
9/30/2011	12:52:09 AM	BCl3 MFC set to  0.000000
9/30/2011	12:52:09 AM	PHl3 MFC set to  0.000000
9/30/2011	12:52:09 AM	SiCl4 MFC set to  0.000000
9/30/2011	12:52:09 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:52:09 AM	Tube furnace set to 0
9/30/2011	12:52:10 AM	Run finished at 12:52 AM
9/30/2011	12:52:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	1:03:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	1:03:25 AM	Recipe started at 1:03 AM
9/30/2011	1:03:25 AM	Helium valve closed
9/30/2011	1:03:25 AM	H2 valve closed
9/30/2011	1:03:25 AM	BCl3 valve closed
9/30/2011	1:03:25 AM	PH3 valve closed
9/30/2011	1:03:25 AM	SiCl4 pre valve closed
9/30/2011	1:03:25 AM	SiCl4 post valve closed
9/30/2011	1:03:25 AM	Main Vac valve closed
9/30/2011	1:03:25 AM	Bubbler valve closed
9/30/2011	1:03:25 AM	Bypass valve opened
9/30/2011	1:03:25 AM	Helium MFC set to  0.000000
9/30/2011	1:03:25 AM	H2 MFC set to  0.000000
9/30/2011	1:03:25 AM	BCl3 MFC set to  0.000000
9/30/2011	1:03:25 AM	PHl3 MFC set to  0.000000
9/30/2011	1:03:25 AM	SiCl4 MFC set to  0.000000
9/30/2011	1:03:25 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	1:03:25 AM	Tube furnace set to 0
9/30/2011	1:04:38 AM	Helium valve closed
9/30/2011	1:04:38 AM	H2 valve closed
9/30/2011	1:04:38 AM	BCl3 valve closed
9/30/2011	1:04:38 AM	PH3 valve closed
9/30/2011	1:04:38 AM	SiCl4 pre valve closed
9/30/2011	1:04:38 AM	SiCl4 post valve closed
9/30/2011	1:04:38 AM	Main Vac valve closed
9/30/2011	1:04:38 AM	Bubbler valve closed
9/30/2011	1:04:38 AM	Bypass valve opened
9/30/2011	1:04:38 AM	Helium MFC set to  0.000000
9/30/2011	1:04:38 AM	H2 MFC set to  0.000000
9/30/2011	1:04:38 AM	BCl3 MFC set to  0.000000
9/30/2011	1:04:38 AM	PHl3 MFC set to  0.000000
9/30/2011	1:04:38 AM	SiCl4 MFC set to  0.000000
9/30/2011	1:04:38 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	1:04:39 AM	Tube furnace set to 0
9/30/2011	1:05:39 AM	Helium valve closed
9/30/2011	1:05:39 AM	H2 valve closed
9/30/2011	1:05:39 AM	BCl3 valve closed
9/30/2011	1:05:39 AM	PH3 valve closed
9/30/2011	1:05:39 AM	SiCl4 pre valve closed
9/30/2011	1:05:39 AM	SiCl4 post valve closed
9/30/2011	1:05:39 AM	Bypass valve closed
9/30/2011	1:05:39 AM	Bubbler valve closed
9/30/2011	1:05:39 AM	Main Vac valve opened
9/30/2011	1:05:39 AM	Helium MFC set to  0.000000
9/30/2011	1:05:39 AM	H2 MFC set to  0.000000
9/30/2011	1:05:39 AM	BCl3 MFC set to  0.000000
9/30/2011	1:05:39 AM	PHl3 MFC set to  0.000000
9/30/2011	1:05:39 AM	SiCl4 MFC set to  0.000000
9/30/2011	1:05:39 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	1:05:39 AM	Tube furnace set to 0
9/30/2011	1:05:40 AM	Run finished at 1:05 AM
9/30/2011	1:05:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	9:51:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	9:51:25 AM	Recipe started at 9:51 AM
9/30/2011	9:51:25 AM	Helium valve closed
9/30/2011	9:51:25 AM	H2 valve closed
9/30/2011	9:51:25 AM	BCl3 valve closed
9/30/2011	9:51:25 AM	PH3 valve closed
9/30/2011	9:51:25 AM	SiCl4 pre valve closed
9/30/2011	9:51:25 AM	SiCl4 post valve closed
9/30/2011	9:51:25 AM	Main Vac valve closed
9/30/2011	9:51:25 AM	Bypass valve closed
9/30/2011	9:51:25 AM	Bubbler valve closed
9/30/2011	9:51:25 AM	Helium MFC set to  0.000000
9/30/2011	9:51:25 AM	H2 MFC set to  0.000000
9/30/2011	9:51:25 AM	BCl3 MFC set to  0.000000
9/30/2011	9:51:25 AM	PHl3 MFC set to  0.000000
9/30/2011	9:51:25 AM	SiCl4 MFC set to  0.000000
9/30/2011	9:51:25 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	9:51:25 AM	Tube furnace set to 0
9/30/2011	9:51:28 AM	H2 valve closed
9/30/2011	9:51:28 AM	BCl3 valve closed
9/30/2011	9:51:28 AM	PH3 valve closed
9/30/2011	9:51:28 AM	SiCl4 pre valve closed
9/30/2011	9:51:28 AM	SiCl4 post valve closed
9/30/2011	9:51:28 AM	Main Vac valve closed
9/30/2011	9:51:28 AM	Bypass valve closed
9/30/2011	9:51:28 AM	Bubbler valve closed
9/30/2011	9:51:28 AM	Helium valve opened
9/30/2011	9:51:28 AM	Helium MFC set to  500.000000
9/30/2011	9:51:28 AM	H2 MFC set to  0.000000
9/30/2011	9:51:28 AM	BCl3 MFC set to  0.000000
9/30/2011	9:51:28 AM	PHl3 MFC set to  0.000000
9/30/2011	9:51:28 AM	SiCl4 MFC set to  0.000000
9/30/2011	9:51:28 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	9:51:28 AM	Tube furnace set to 0
9/30/2011	9:52:34 AM	Helium valve closed
9/30/2011	9:52:34 AM	H2 valve closed
9/30/2011	9:52:34 AM	BCl3 valve closed
9/30/2011	9:52:34 AM	PH3 valve closed
9/30/2011	9:52:34 AM	SiCl4 pre valve closed
9/30/2011	9:52:34 AM	SiCl4 post valve closed
9/30/2011	9:52:34 AM	Main Vac valve closed
9/30/2011	9:52:34 AM	Bypass valve closed
9/30/2011	9:52:34 AM	Bubbler valve closed
9/30/2011	9:52:34 AM	Helium MFC set to  0.000000
9/30/2011	9:52:34 AM	H2 MFC set to  0.000000
9/30/2011	9:52:34 AM	BCl3 MFC set to  0.000000
9/30/2011	9:52:34 AM	PHl3 MFC set to  0.000000
9/30/2011	9:52:34 AM	SiCl4 MFC set to  0.000000
9/30/2011	9:52:34 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	9:52:35 AM	Tube furnace set to 0
9/30/2011	9:52:36 AM	Run finished at 9:52 AM
9/30/2011	9:52:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	10:02:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	10:02:14 AM	Recipe started at 10:02 AM
9/30/2011	10:02:14 AM	Helium valve closed
9/30/2011	10:02:14 AM	H2 valve closed
9/30/2011	10:02:14 AM	BCl3 valve closed
9/30/2011	10:02:14 AM	PH3 valve closed
9/30/2011	10:02:14 AM	SiCl4 pre valve closed
9/30/2011	10:02:14 AM	SiCl4 post valve closed
9/30/2011	10:02:14 AM	Main Vac valve closed
9/30/2011	10:02:14 AM	Bubbler valve closed
9/30/2011	10:02:14 AM	Bypass valve opened
9/30/2011	10:02:14 AM	Helium MFC set to  0.000000
9/30/2011	10:02:14 AM	H2 MFC set to  0.000000
9/30/2011	10:02:14 AM	BCl3 MFC set to  0.000000
9/30/2011	10:02:14 AM	PHl3 MFC set to  0.000000
9/30/2011	10:02:14 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:02:14 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:02:14 AM	Tube furnace set to 0
9/30/2011	10:03:28 AM	Helium valve closed
9/30/2011	10:03:28 AM	H2 valve closed
9/30/2011	10:03:28 AM	BCl3 valve closed
9/30/2011	10:03:28 AM	PH3 valve closed
9/30/2011	10:03:28 AM	SiCl4 pre valve closed
9/30/2011	10:03:28 AM	SiCl4 post valve closed
9/30/2011	10:03:28 AM	Main Vac valve closed
9/30/2011	10:03:28 AM	Bubbler valve closed
9/30/2011	10:03:28 AM	Bypass valve opened
9/30/2011	10:03:28 AM	Helium MFC set to  0.000000
9/30/2011	10:03:29 AM	H2 MFC set to  0.000000
9/30/2011	10:03:29 AM	BCl3 MFC set to  0.000000
9/30/2011	10:03:29 AM	PHl3 MFC set to  0.000000
9/30/2011	10:03:29 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:03:29 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:03:29 AM	Tube furnace set to 0
9/30/2011	10:04:29 AM	Helium valve closed
9/30/2011	10:04:29 AM	H2 valve closed
9/30/2011	10:04:29 AM	BCl3 valve closed
9/30/2011	10:04:29 AM	PH3 valve closed
9/30/2011	10:04:29 AM	SiCl4 pre valve closed
9/30/2011	10:04:29 AM	SiCl4 post valve closed
9/30/2011	10:04:29 AM	Bypass valve closed
9/30/2011	10:04:29 AM	Bubbler valve closed
9/30/2011	10:04:29 AM	Main Vac valve opened
9/30/2011	10:04:29 AM	Helium MFC set to  0.000000
9/30/2011	10:04:29 AM	H2 MFC set to  0.000000
9/30/2011	10:04:29 AM	BCl3 MFC set to  0.000000
9/30/2011	10:04:29 AM	PHl3 MFC set to  0.000000
9/30/2011	10:04:29 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:04:29 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:04:29 AM	Tube furnace set to 0
9/30/2011	10:04:30 AM	Run finished at 10:04 AM
9/30/2011	10:04:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	10:04:37 AM	Tube furnace set to 50
9/30/2011	10:05:20 AM	Tube furnace set to 250
9/30/2011	10:07:20 AM	Recipe started at 10:07 AM
9/30/2011	10:07:20 AM	Helium valve closed
9/30/2011	10:07:20 AM	H2 valve closed
9/30/2011	10:07:20 AM	BCl3 valve closed
9/30/2011	10:07:20 AM	PH3 valve closed
9/30/2011	10:07:20 AM	SiCl4 pre valve closed
9/30/2011	10:07:20 AM	SiCl4 post valve closed
9/30/2011	10:07:20 AM	Main Vac valve closed
9/30/2011	10:07:20 AM	Bubbler valve closed
9/30/2011	10:07:20 AM	Bypass valve opened
9/30/2011	10:07:20 AM	Helium MFC set to  0.000000
9/30/2011	10:07:20 AM	H2 MFC set to  0.000000
9/30/2011	10:07:20 AM	BCl3 MFC set to  0.000000
9/30/2011	10:07:20 AM	PHl3 MFC set to  0.000000
9/30/2011	10:07:20 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:07:20 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:07:20 AM	Tube furnace set to 150
9/30/2011	10:07:20 AM	Helium valve closed
9/30/2011	10:07:20 AM	H2 valve closed
9/30/2011	10:07:20 AM	BCl3 valve closed
9/30/2011	10:07:20 AM	PH3 valve closed
9/30/2011	10:07:20 AM	SiCl4 pre valve closed
9/30/2011	10:07:20 AM	SiCl4 post valve closed
9/30/2011	10:07:20 AM	Main Vac valve closed
9/30/2011	10:07:20 AM	Bubbler valve closed
9/30/2011	10:07:20 AM	Bypass valve opened
9/30/2011	10:07:20 AM	Helium MFC set to  0.000000
9/30/2011	10:07:20 AM	H2 MFC set to  0.000000
9/30/2011	10:07:20 AM	BCl3 MFC set to  0.000000
9/30/2011	10:07:20 AM	PHl3 MFC set to  0.000000
9/30/2011	10:07:20 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:07:20 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:07:21 AM	Tube furnace set to 150
9/30/2011	10:07:51 AM	Helium valve closed
9/30/2011	10:07:51 AM	H2 valve closed
9/30/2011	10:07:51 AM	BCl3 valve closed
9/30/2011	10:07:51 AM	PH3 valve closed
9/30/2011	10:07:51 AM	SiCl4 pre valve closed
9/30/2011	10:07:51 AM	SiCl4 post valve closed
9/30/2011	10:07:51 AM	Bypass valve closed
9/30/2011	10:07:51 AM	Bubbler valve closed
9/30/2011	10:07:51 AM	Main Vac valve opened
9/30/2011	10:07:51 AM	Helium MFC set to  0.000000
9/30/2011	10:07:51 AM	H2 MFC set to  0.000000
9/30/2011	10:07:51 AM	BCl3 MFC set to  0.000000
9/30/2011	10:07:51 AM	PHl3 MFC set to  0.000000
9/30/2011	10:07:51 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:07:51 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:07:51 AM	Tube furnace set to 150
9/30/2011	10:08:21 AM	H2 valve closed
9/30/2011	10:08:21 AM	BCl3 valve closed
9/30/2011	10:08:21 AM	PH3 valve closed
9/30/2011	10:08:21 AM	SiCl4 pre valve closed
9/30/2011	10:08:21 AM	SiCl4 post valve closed
9/30/2011	10:08:21 AM	Bypass valve closed
9/30/2011	10:08:21 AM	Bubbler valve closed
9/30/2011	10:08:21 AM	Helium valve opened
9/30/2011	10:08:21 AM	Main Vac valve opened
9/30/2011	10:08:21 AM	Helium MFC set to  20.000000
9/30/2011	10:08:21 AM	H2 MFC set to  0.000000
9/30/2011	10:08:21 AM	BCl3 MFC set to  0.000000
9/30/2011	10:08:21 AM	PHl3 MFC set to  0.000000
9/30/2011	10:08:21 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:08:21 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:08:21 AM	Tube furnace set to 150
9/30/2011	10:08:51 AM	Helium valve closed
9/30/2011	10:08:51 AM	H2 valve closed
9/30/2011	10:08:51 AM	BCl3 valve closed
9/30/2011	10:08:51 AM	PH3 valve closed
9/30/2011	10:08:51 AM	SiCl4 pre valve closed
9/30/2011	10:08:51 AM	SiCl4 post valve closed
9/30/2011	10:08:51 AM	Bypass valve closed
9/30/2011	10:08:51 AM	Bubbler valve closed
9/30/2011	10:08:51 AM	Main Vac valve opened
9/30/2011	10:08:51 AM	Helium MFC set to  0.000000
9/30/2011	10:08:51 AM	H2 MFC set to  0.000000
9/30/2011	10:08:51 AM	BCl3 MFC set to  0.000000
9/30/2011	10:08:51 AM	PHl3 MFC set to  0.000000
9/30/2011	10:08:51 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:08:51 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:08:51 AM	Tube furnace set to 150
9/30/2011	10:09:21 AM	H2 valve closed
9/30/2011	10:09:21 AM	BCl3 valve closed
9/30/2011	10:09:21 AM	PH3 valve closed
9/30/2011	10:09:21 AM	SiCl4 pre valve closed
9/30/2011	10:09:21 AM	SiCl4 post valve closed
9/30/2011	10:09:21 AM	Bypass valve closed
9/30/2011	10:09:21 AM	Bubbler valve closed
9/30/2011	10:09:21 AM	Helium valve opened
9/30/2011	10:09:21 AM	Main Vac valve opened
9/30/2011	10:09:21 AM	Helium MFC set to  20.000000
9/30/2011	10:09:21 AM	H2 MFC set to  0.000000
9/30/2011	10:09:21 AM	BCl3 MFC set to  0.000000
9/30/2011	10:09:21 AM	PHl3 MFC set to  0.000000
9/30/2011	10:09:21 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:09:21 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:09:21 AM	Tube furnace set to 150
9/30/2011	10:09:51 AM	Helium valve closed
9/30/2011	10:09:51 AM	H2 valve closed
9/30/2011	10:09:51 AM	BCl3 valve closed
9/30/2011	10:09:51 AM	PH3 valve closed
9/30/2011	10:09:51 AM	SiCl4 pre valve closed
9/30/2011	10:09:51 AM	SiCl4 post valve closed
9/30/2011	10:09:51 AM	Bypass valve closed
9/30/2011	10:09:51 AM	Bubbler valve closed
9/30/2011	10:09:51 AM	Main Vac valve opened
9/30/2011	10:09:51 AM	Helium MFC set to  0.000000
9/30/2011	10:09:51 AM	H2 MFC set to  0.000000
9/30/2011	10:09:51 AM	BCl3 MFC set to  0.000000
9/30/2011	10:09:51 AM	PHl3 MFC set to  0.000000
9/30/2011	10:09:51 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:09:51 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:09:52 AM	Tube furnace set to 150
9/30/2011	10:10:22 AM	H2 valve closed
9/30/2011	10:10:22 AM	BCl3 valve closed
9/30/2011	10:10:22 AM	PH3 valve closed
9/30/2011	10:10:22 AM	SiCl4 pre valve closed
9/30/2011	10:10:22 AM	SiCl4 post valve closed
9/30/2011	10:10:22 AM	Bypass valve closed
9/30/2011	10:10:22 AM	Bubbler valve closed
9/30/2011	10:10:22 AM	Helium valve opened
9/30/2011	10:10:22 AM	Main Vac valve opened
9/30/2011	10:10:22 AM	Helium MFC set to  20.000000
9/30/2011	10:10:22 AM	H2 MFC set to  0.000000
9/30/2011	10:10:22 AM	BCl3 MFC set to  0.000000
9/30/2011	10:10:22 AM	PHl3 MFC set to  0.000000
9/30/2011	10:10:22 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:10:22 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:10:22 AM	Tube furnace set to 150
9/30/2011	10:10:52 AM	Helium valve closed
9/30/2011	10:10:52 AM	H2 valve closed
9/30/2011	10:10:52 AM	BCl3 valve closed
9/30/2011	10:10:52 AM	PH3 valve closed
9/30/2011	10:10:52 AM	SiCl4 pre valve closed
9/30/2011	10:10:52 AM	SiCl4 post valve closed
9/30/2011	10:10:52 AM	Bypass valve closed
9/30/2011	10:10:52 AM	Bubbler valve closed
9/30/2011	10:10:52 AM	Main Vac valve opened
9/30/2011	10:10:52 AM	Helium MFC set to  0.000000
9/30/2011	10:10:52 AM	H2 MFC set to  0.000000
9/30/2011	10:10:52 AM	BCl3 MFC set to  0.000000
9/30/2011	10:10:52 AM	PHl3 MFC set to  0.000000
9/30/2011	10:10:52 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:10:52 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:10:52 AM	Tube furnace set to 150
9/30/2011	10:11:22 AM	H2 valve closed
9/30/2011	10:11:22 AM	BCl3 valve closed
9/30/2011	10:11:22 AM	PH3 valve closed
9/30/2011	10:11:22 AM	SiCl4 pre valve closed
9/30/2011	10:11:22 AM	SiCl4 post valve closed
9/30/2011	10:11:22 AM	Bypass valve closed
9/30/2011	10:11:22 AM	Bubbler valve closed
9/30/2011	10:11:22 AM	Helium valve opened
9/30/2011	10:11:22 AM	Main Vac valve opened
9/30/2011	10:11:22 AM	Helium MFC set to  20.000000
9/30/2011	10:11:22 AM	H2 MFC set to  0.000000
9/30/2011	10:11:22 AM	BCl3 MFC set to  0.000000
9/30/2011	10:11:22 AM	PHl3 MFC set to  0.000000
9/30/2011	10:11:22 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:11:22 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:11:22 AM	Tube furnace set to 150
9/30/2011	10:11:52 AM	Helium valve closed
9/30/2011	10:11:52 AM	H2 valve closed
9/30/2011	10:11:52 AM	BCl3 valve closed
9/30/2011	10:11:52 AM	PH3 valve closed
9/30/2011	10:11:52 AM	SiCl4 pre valve closed
9/30/2011	10:11:52 AM	SiCl4 post valve closed
9/30/2011	10:11:52 AM	Bypass valve closed
9/30/2011	10:11:52 AM	Bubbler valve closed
9/30/2011	10:11:52 AM	Main Vac valve opened
9/30/2011	10:11:52 AM	Helium MFC set to  0.000000
9/30/2011	10:11:52 AM	H2 MFC set to  0.000000
9/30/2011	10:11:52 AM	BCl3 MFC set to  0.000000
9/30/2011	10:11:52 AM	PHl3 MFC set to  0.000000
9/30/2011	10:11:52 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:11:52 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:11:52 AM	Tube furnace set to 150
9/30/2011	10:12:22 AM	H2 valve closed
9/30/2011	10:12:22 AM	BCl3 valve closed
9/30/2011	10:12:22 AM	PH3 valve closed
9/30/2011	10:12:22 AM	SiCl4 pre valve closed
9/30/2011	10:12:22 AM	SiCl4 post valve closed
9/30/2011	10:12:22 AM	Bypass valve closed
9/30/2011	10:12:22 AM	Bubbler valve closed
9/30/2011	10:12:22 AM	Helium valve opened
9/30/2011	10:12:22 AM	Main Vac valve opened
9/30/2011	10:12:22 AM	Helium MFC set to  20.000000
9/30/2011	10:12:22 AM	H2 MFC set to  0.000000
9/30/2011	10:12:22 AM	BCl3 MFC set to  0.000000
9/30/2011	10:12:22 AM	PHl3 MFC set to  0.000000
9/30/2011	10:12:22 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:12:22 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:12:23 AM	Tube furnace set to 150
9/30/2011	10:12:53 AM	Helium valve closed
9/30/2011	10:12:53 AM	H2 valve closed
9/30/2011	10:12:53 AM	BCl3 valve closed
9/30/2011	10:12:53 AM	PH3 valve closed
9/30/2011	10:12:53 AM	SiCl4 pre valve closed
9/30/2011	10:12:53 AM	SiCl4 post valve closed
9/30/2011	10:12:53 AM	Bypass valve closed
9/30/2011	10:12:53 AM	Bubbler valve closed
9/30/2011	10:12:53 AM	Main Vac valve opened
9/30/2011	10:12:53 AM	Helium MFC set to  0.000000
9/30/2011	10:12:53 AM	H2 MFC set to  0.000000
9/30/2011	10:12:53 AM	BCl3 MFC set to  0.000000
9/30/2011	10:12:53 AM	PHl3 MFC set to  0.000000
9/30/2011	10:12:53 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:12:53 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:12:53 AM	Tube furnace set to 150
9/30/2011	10:13:23 AM	H2 valve closed
9/30/2011	10:13:23 AM	BCl3 valve closed
9/30/2011	10:13:23 AM	PH3 valve closed
9/30/2011	10:13:23 AM	SiCl4 pre valve closed
9/30/2011	10:13:23 AM	SiCl4 post valve closed
9/30/2011	10:13:23 AM	Bypass valve closed
9/30/2011	10:13:23 AM	Bubbler valve closed
9/30/2011	10:13:23 AM	Helium valve opened
9/30/2011	10:13:23 AM	Main Vac valve opened
9/30/2011	10:13:23 AM	Helium MFC set to  20.000000
9/30/2011	10:13:23 AM	H2 MFC set to  0.000000
9/30/2011	10:13:23 AM	BCl3 MFC set to  0.000000
9/30/2011	10:13:23 AM	PHl3 MFC set to  0.000000
9/30/2011	10:13:23 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:13:23 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:13:23 AM	Tube furnace set to 150
9/30/2011	10:13:53 AM	Helium valve closed
9/30/2011	10:13:53 AM	H2 valve closed
9/30/2011	10:13:53 AM	BCl3 valve closed
9/30/2011	10:13:53 AM	PH3 valve closed
9/30/2011	10:13:53 AM	SiCl4 pre valve closed
9/30/2011	10:13:53 AM	SiCl4 post valve closed
9/30/2011	10:13:53 AM	Bypass valve closed
9/30/2011	10:13:53 AM	Bubbler valve closed
9/30/2011	10:13:53 AM	Main Vac valve opened
9/30/2011	10:13:53 AM	Helium MFC set to  0.000000
9/30/2011	10:13:53 AM	H2 MFC set to  0.000000
9/30/2011	10:13:53 AM	BCl3 MFC set to  0.000000
9/30/2011	10:13:53 AM	PHl3 MFC set to  0.000000
9/30/2011	10:13:53 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:13:53 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:13:53 AM	Tube furnace set to 150
9/30/2011	10:14:23 AM	H2 valve closed
9/30/2011	10:14:23 AM	BCl3 valve closed
9/30/2011	10:14:23 AM	PH3 valve closed
9/30/2011	10:14:23 AM	SiCl4 pre valve closed
9/30/2011	10:14:23 AM	SiCl4 post valve closed
9/30/2011	10:14:23 AM	Bypass valve closed
9/30/2011	10:14:23 AM	Bubbler valve closed
9/30/2011	10:14:23 AM	Helium valve opened
9/30/2011	10:14:23 AM	Main Vac valve opened
9/30/2011	10:14:23 AM	Helium MFC set to  20.000000
9/30/2011	10:14:23 AM	H2 MFC set to  0.000000
9/30/2011	10:14:23 AM	BCl3 MFC set to  0.000000
9/30/2011	10:14:23 AM	PHl3 MFC set to  0.000000
9/30/2011	10:14:23 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:14:23 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:14:23 AM	Tube furnace set to 150
9/30/2011	10:14:53 AM	Helium valve closed
9/30/2011	10:14:53 AM	H2 valve closed
9/30/2011	10:14:53 AM	BCl3 valve closed
9/30/2011	10:14:53 AM	PH3 valve closed
9/30/2011	10:14:53 AM	SiCl4 pre valve closed
9/30/2011	10:14:53 AM	SiCl4 post valve closed
9/30/2011	10:14:53 AM	Bypass valve closed
9/30/2011	10:14:53 AM	Bubbler valve closed
9/30/2011	10:14:53 AM	Main Vac valve opened
9/30/2011	10:14:53 AM	Helium MFC set to  0.000000
9/30/2011	10:14:53 AM	H2 MFC set to  0.000000
9/30/2011	10:14:53 AM	BCl3 MFC set to  0.000000
9/30/2011	10:14:53 AM	PHl3 MFC set to  0.000000
9/30/2011	10:14:53 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:14:53 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:14:54 AM	Tube furnace set to 150
9/30/2011	10:15:24 AM	H2 valve closed
9/30/2011	10:15:24 AM	BCl3 valve closed
9/30/2011	10:15:24 AM	PH3 valve closed
9/30/2011	10:15:24 AM	SiCl4 pre valve closed
9/30/2011	10:15:24 AM	SiCl4 post valve closed
9/30/2011	10:15:24 AM	Bypass valve closed
9/30/2011	10:15:24 AM	Bubbler valve closed
9/30/2011	10:15:24 AM	Helium valve opened
9/30/2011	10:15:24 AM	Main Vac valve opened
9/30/2011	10:15:24 AM	Helium MFC set to  20.000000
9/30/2011	10:15:24 AM	H2 MFC set to  0.000000
9/30/2011	10:15:24 AM	BCl3 MFC set to  0.000000
9/30/2011	10:15:24 AM	PHl3 MFC set to  0.000000
9/30/2011	10:15:24 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:15:24 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:15:24 AM	Tube furnace set to 150
9/30/2011	10:15:54 AM	Helium valve closed
9/30/2011	10:15:54 AM	H2 valve closed
9/30/2011	10:15:54 AM	BCl3 valve closed
9/30/2011	10:15:54 AM	PH3 valve closed
9/30/2011	10:15:54 AM	SiCl4 pre valve closed
9/30/2011	10:15:54 AM	SiCl4 post valve closed
9/30/2011	10:15:54 AM	Bypass valve closed
9/30/2011	10:15:54 AM	Bubbler valve closed
9/30/2011	10:15:54 AM	Main Vac valve opened
9/30/2011	10:15:54 AM	Helium MFC set to  0.000000
9/30/2011	10:15:54 AM	H2 MFC set to  0.000000
9/30/2011	10:15:54 AM	BCl3 MFC set to  0.000000
9/30/2011	10:15:54 AM	PHl3 MFC set to  0.000000
9/30/2011	10:15:54 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:15:54 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:15:54 AM	Tube furnace set to 150
9/30/2011	10:16:24 AM	H2 valve closed
9/30/2011	10:16:24 AM	BCl3 valve closed
9/30/2011	10:16:24 AM	PH3 valve closed
9/30/2011	10:16:24 AM	SiCl4 pre valve closed
9/30/2011	10:16:24 AM	SiCl4 post valve closed
9/30/2011	10:16:24 AM	Bypass valve closed
9/30/2011	10:16:24 AM	Bubbler valve closed
9/30/2011	10:16:24 AM	Helium valve opened
9/30/2011	10:16:24 AM	Main Vac valve opened
9/30/2011	10:16:24 AM	Helium MFC set to  20.000000
9/30/2011	10:16:24 AM	H2 MFC set to  0.000000
9/30/2011	10:16:24 AM	BCl3 MFC set to  0.000000
9/30/2011	10:16:24 AM	PHl3 MFC set to  0.000000
9/30/2011	10:16:24 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:16:24 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:16:24 AM	Tube furnace set to 150
9/30/2011	10:16:54 AM	Helium valve closed
9/30/2011	10:16:54 AM	H2 valve closed
9/30/2011	10:16:54 AM	BCl3 valve closed
9/30/2011	10:16:54 AM	PH3 valve closed
9/30/2011	10:16:54 AM	SiCl4 pre valve closed
9/30/2011	10:16:54 AM	SiCl4 post valve closed
9/30/2011	10:16:54 AM	Bypass valve closed
9/30/2011	10:16:54 AM	Bubbler valve closed
9/30/2011	10:16:54 AM	Main Vac valve opened
9/30/2011	10:16:54 AM	Helium MFC set to  0.000000
9/30/2011	10:16:54 AM	H2 MFC set to  0.000000
9/30/2011	10:16:54 AM	BCl3 MFC set to  0.000000
9/30/2011	10:16:54 AM	PHl3 MFC set to  0.000000
9/30/2011	10:16:54 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:16:54 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:16:54 AM	Tube furnace set to 150
9/30/2011	10:17:24 AM	H2 valve closed
9/30/2011	10:17:24 AM	BCl3 valve closed
9/30/2011	10:17:24 AM	PH3 valve closed
9/30/2011	10:17:24 AM	SiCl4 pre valve closed
9/30/2011	10:17:24 AM	SiCl4 post valve closed
9/30/2011	10:17:24 AM	Bypass valve closed
9/30/2011	10:17:24 AM	Bubbler valve closed
9/30/2011	10:17:24 AM	Helium valve opened
9/30/2011	10:17:24 AM	Main Vac valve opened
9/30/2011	10:17:24 AM	Helium MFC set to  20.000000
9/30/2011	10:17:24 AM	H2 MFC set to  0.000000
9/30/2011	10:17:24 AM	BCl3 MFC set to  0.000000
9/30/2011	10:17:24 AM	PHl3 MFC set to  0.000000
9/30/2011	10:17:24 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:17:25 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:17:25 AM	Tube furnace set to 150
9/30/2011	10:17:55 AM	Helium valve closed
9/30/2011	10:17:55 AM	H2 valve closed
9/30/2011	10:17:55 AM	BCl3 valve closed
9/30/2011	10:17:55 AM	PH3 valve closed
9/30/2011	10:17:55 AM	SiCl4 pre valve closed
9/30/2011	10:17:55 AM	SiCl4 post valve closed
9/30/2011	10:17:55 AM	Bypass valve closed
9/30/2011	10:17:55 AM	Bubbler valve closed
9/30/2011	10:17:55 AM	Main Vac valve opened
9/30/2011	10:17:55 AM	Helium MFC set to  0.000000
9/30/2011	10:17:55 AM	H2 MFC set to  0.000000
9/30/2011	10:17:55 AM	BCl3 MFC set to  0.000000
9/30/2011	10:17:55 AM	PHl3 MFC set to  0.000000
9/30/2011	10:17:55 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:17:55 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:17:55 AM	Tube furnace set to 150
9/30/2011	10:18:25 AM	H2 valve closed
9/30/2011	10:18:25 AM	BCl3 valve closed
9/30/2011	10:18:25 AM	PH3 valve closed
9/30/2011	10:18:25 AM	SiCl4 pre valve closed
9/30/2011	10:18:25 AM	SiCl4 post valve closed
9/30/2011	10:18:25 AM	Bypass valve closed
9/30/2011	10:18:25 AM	Bubbler valve closed
9/30/2011	10:18:25 AM	Helium valve opened
9/30/2011	10:18:25 AM	Main Vac valve opened
9/30/2011	10:18:25 AM	Helium MFC set to  20.000000
9/30/2011	10:18:25 AM	H2 MFC set to  0.000000
9/30/2011	10:18:25 AM	BCl3 MFC set to  0.000000
9/30/2011	10:18:25 AM	PHl3 MFC set to  0.000000
9/30/2011	10:18:25 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:18:25 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:18:25 AM	Tube furnace set to 150
9/30/2011	10:18:55 AM	Helium valve closed
9/30/2011	10:18:55 AM	H2 valve closed
9/30/2011	10:18:55 AM	BCl3 valve closed
9/30/2011	10:18:55 AM	PH3 valve closed
9/30/2011	10:18:55 AM	SiCl4 pre valve closed
9/30/2011	10:18:55 AM	SiCl4 post valve closed
9/30/2011	10:18:55 AM	Bypass valve closed
9/30/2011	10:18:55 AM	Bubbler valve closed
9/30/2011	10:18:55 AM	Main Vac valve opened
9/30/2011	10:18:55 AM	Helium MFC set to  0.000000
9/30/2011	10:18:55 AM	H2 MFC set to  0.000000
9/30/2011	10:18:55 AM	BCl3 MFC set to  0.000000
9/30/2011	10:18:55 AM	PHl3 MFC set to  0.000000
9/30/2011	10:18:55 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:18:55 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:18:55 AM	Tube furnace set to 150
9/30/2011	10:19:25 AM	H2 valve closed
9/30/2011	10:19:25 AM	BCl3 valve closed
9/30/2011	10:19:25 AM	PH3 valve closed
9/30/2011	10:19:25 AM	SiCl4 pre valve closed
9/30/2011	10:19:25 AM	SiCl4 post valve closed
9/30/2011	10:19:25 AM	Bypass valve closed
9/30/2011	10:19:25 AM	Bubbler valve closed
9/30/2011	10:19:25 AM	Helium valve opened
9/30/2011	10:19:25 AM	Main Vac valve opened
9/30/2011	10:19:25 AM	Helium MFC set to  20.000000
9/30/2011	10:19:25 AM	H2 MFC set to  0.000000
9/30/2011	10:19:25 AM	BCl3 MFC set to  0.000000
9/30/2011	10:19:25 AM	PHl3 MFC set to  0.000000
9/30/2011	10:19:25 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:19:25 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:19:25 AM	Tube furnace set to 150
9/30/2011	10:19:55 AM	Helium valve closed
9/30/2011	10:19:56 AM	H2 valve closed
9/30/2011	10:19:56 AM	BCl3 valve closed
9/30/2011	10:19:56 AM	PH3 valve closed
9/30/2011	10:19:56 AM	SiCl4 pre valve closed
9/30/2011	10:19:56 AM	SiCl4 post valve closed
9/30/2011	10:19:56 AM	Bypass valve closed
9/30/2011	10:19:56 AM	Bubbler valve closed
9/30/2011	10:19:56 AM	Main Vac valve opened
9/30/2011	10:19:56 AM	Helium MFC set to  0.000000
9/30/2011	10:19:56 AM	H2 MFC set to  0.000000
9/30/2011	10:19:56 AM	BCl3 MFC set to  0.000000
9/30/2011	10:19:56 AM	PHl3 MFC set to  0.000000
9/30/2011	10:19:56 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:19:56 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:19:56 AM	Tube furnace set to 150
9/30/2011	10:20:26 AM	H2 valve closed
9/30/2011	10:20:26 AM	BCl3 valve closed
9/30/2011	10:20:26 AM	PH3 valve closed
9/30/2011	10:20:26 AM	SiCl4 pre valve closed
9/30/2011	10:20:26 AM	SiCl4 post valve closed
9/30/2011	10:20:26 AM	Bypass valve closed
9/30/2011	10:20:26 AM	Bubbler valve closed
9/30/2011	10:20:26 AM	Helium valve opened
9/30/2011	10:20:26 AM	Main Vac valve opened
9/30/2011	10:20:26 AM	Helium MFC set to  20.000000
9/30/2011	10:20:26 AM	H2 MFC set to  0.000000
9/30/2011	10:20:26 AM	BCl3 MFC set to  0.000000
9/30/2011	10:20:26 AM	PHl3 MFC set to  0.000000
9/30/2011	10:20:26 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:20:26 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:20:26 AM	Tube furnace set to 150
9/30/2011	10:20:56 AM	Helium valve closed
9/30/2011	10:20:56 AM	H2 valve closed
9/30/2011	10:20:56 AM	BCl3 valve closed
9/30/2011	10:20:56 AM	PH3 valve closed
9/30/2011	10:20:56 AM	SiCl4 pre valve closed
9/30/2011	10:20:56 AM	SiCl4 post valve closed
9/30/2011	10:20:56 AM	Bypass valve closed
9/30/2011	10:20:56 AM	Bubbler valve closed
9/30/2011	10:20:56 AM	Main Vac valve opened
9/30/2011	10:20:56 AM	Helium MFC set to  0.000000
9/30/2011	10:20:56 AM	H2 MFC set to  0.000000
9/30/2011	10:20:56 AM	BCl3 MFC set to  0.000000
9/30/2011	10:20:56 AM	PHl3 MFC set to  0.000000
9/30/2011	10:20:56 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:20:56 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:20:56 AM	Tube furnace set to 150
9/30/2011	10:21:26 AM	H2 valve closed
9/30/2011	10:21:26 AM	BCl3 valve closed
9/30/2011	10:21:26 AM	PH3 valve closed
9/30/2011	10:21:26 AM	SiCl4 pre valve closed
9/30/2011	10:21:26 AM	SiCl4 post valve closed
9/30/2011	10:21:26 AM	Bypass valve closed
9/30/2011	10:21:26 AM	Bubbler valve closed
9/30/2011	10:21:26 AM	Helium valve opened
9/30/2011	10:21:26 AM	Main Vac valve opened
9/30/2011	10:21:26 AM	Helium MFC set to  20.000000
9/30/2011	10:21:26 AM	H2 MFC set to  0.000000
9/30/2011	10:21:26 AM	BCl3 MFC set to  0.000000
9/30/2011	10:21:26 AM	PHl3 MFC set to  0.000000
9/30/2011	10:21:26 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:21:26 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:21:26 AM	Tube furnace set to 150
9/30/2011	10:21:56 AM	Helium valve closed
9/30/2011	10:21:56 AM	H2 valve closed
9/30/2011	10:21:56 AM	BCl3 valve closed
9/30/2011	10:21:56 AM	PH3 valve closed
9/30/2011	10:21:56 AM	SiCl4 pre valve closed
9/30/2011	10:21:56 AM	SiCl4 post valve closed
9/30/2011	10:21:56 AM	Bypass valve closed
9/30/2011	10:21:56 AM	Bubbler valve closed
9/30/2011	10:21:56 AM	Main Vac valve opened
9/30/2011	10:21:56 AM	Helium MFC set to  0.000000
9/30/2011	10:21:56 AM	H2 MFC set to  0.000000
9/30/2011	10:21:56 AM	BCl3 MFC set to  0.000000
9/30/2011	10:21:56 AM	PHl3 MFC set to  0.000000
9/30/2011	10:21:56 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:21:56 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:21:57 AM	Tube furnace set to 150
9/30/2011	10:22:27 AM	H2 valve closed
9/30/2011	10:22:27 AM	BCl3 valve closed
9/30/2011	10:22:27 AM	PH3 valve closed
9/30/2011	10:22:27 AM	SiCl4 pre valve closed
9/30/2011	10:22:27 AM	SiCl4 post valve closed
9/30/2011	10:22:27 AM	Bypass valve closed
9/30/2011	10:22:27 AM	Bubbler valve closed
9/30/2011	10:22:27 AM	Helium valve opened
9/30/2011	10:22:27 AM	Main Vac valve opened
9/30/2011	10:22:27 AM	Helium MFC set to  20.000000
9/30/2011	10:22:27 AM	H2 MFC set to  0.000000
9/30/2011	10:22:27 AM	BCl3 MFC set to  0.000000
9/30/2011	10:22:27 AM	PHl3 MFC set to  0.000000
9/30/2011	10:22:27 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:22:27 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:22:27 AM	Tube furnace set to 150
9/30/2011	10:22:57 AM	Helium valve closed
9/30/2011	10:22:57 AM	H2 valve closed
9/30/2011	10:22:57 AM	BCl3 valve closed
9/30/2011	10:22:57 AM	PH3 valve closed
9/30/2011	10:22:57 AM	SiCl4 pre valve closed
9/30/2011	10:22:57 AM	SiCl4 post valve closed
9/30/2011	10:22:57 AM	Bypass valve closed
9/30/2011	10:22:57 AM	Bubbler valve closed
9/30/2011	10:22:57 AM	Main Vac valve opened
9/30/2011	10:22:57 AM	Helium MFC set to  0.000000
9/30/2011	10:22:57 AM	H2 MFC set to  0.000000
9/30/2011	10:22:57 AM	BCl3 MFC set to  0.000000
9/30/2011	10:22:57 AM	PHl3 MFC set to  0.000000
9/30/2011	10:22:57 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:22:57 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:22:57 AM	Tube furnace set to 150
9/30/2011	10:23:27 AM	H2 valve closed
9/30/2011	10:23:27 AM	BCl3 valve closed
9/30/2011	10:23:27 AM	PH3 valve closed
9/30/2011	10:23:27 AM	SiCl4 pre valve closed
9/30/2011	10:23:27 AM	SiCl4 post valve closed
9/30/2011	10:23:27 AM	Bypass valve closed
9/30/2011	10:23:27 AM	Bubbler valve closed
9/30/2011	10:23:27 AM	Helium valve opened
9/30/2011	10:23:27 AM	Main Vac valve opened
9/30/2011	10:23:27 AM	Helium MFC set to  20.000000
9/30/2011	10:23:27 AM	H2 MFC set to  0.000000
9/30/2011	10:23:27 AM	BCl3 MFC set to  0.000000
9/30/2011	10:23:27 AM	PHl3 MFC set to  0.000000
9/30/2011	10:23:27 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:23:27 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:23:27 AM	Tube furnace set to 150
9/30/2011	10:23:57 AM	Helium valve closed
9/30/2011	10:23:57 AM	H2 valve closed
9/30/2011	10:23:57 AM	BCl3 valve closed
9/30/2011	10:23:57 AM	PH3 valve closed
9/30/2011	10:23:57 AM	SiCl4 pre valve closed
9/30/2011	10:23:57 AM	SiCl4 post valve closed
9/30/2011	10:23:57 AM	Bypass valve closed
9/30/2011	10:23:57 AM	Bubbler valve closed
9/30/2011	10:23:57 AM	Main Vac valve opened
9/30/2011	10:23:57 AM	Helium MFC set to  0.000000
9/30/2011	10:23:57 AM	H2 MFC set to  0.000000
9/30/2011	10:23:57 AM	BCl3 MFC set to  0.000000
9/30/2011	10:23:57 AM	PHl3 MFC set to  0.000000
9/30/2011	10:23:57 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:23:57 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:23:57 AM	Tube furnace set to 150
9/30/2011	10:24:27 AM	H2 valve closed
9/30/2011	10:24:27 AM	BCl3 valve closed
9/30/2011	10:24:27 AM	PH3 valve closed
9/30/2011	10:24:27 AM	SiCl4 pre valve closed
9/30/2011	10:24:27 AM	SiCl4 post valve closed
9/30/2011	10:24:27 AM	Bypass valve closed
9/30/2011	10:24:27 AM	Bubbler valve closed
9/30/2011	10:24:27 AM	Helium valve opened
9/30/2011	10:24:27 AM	Main Vac valve opened
9/30/2011	10:24:27 AM	Helium MFC set to  20.000000
9/30/2011	10:24:27 AM	H2 MFC set to  0.000000
9/30/2011	10:24:27 AM	BCl3 MFC set to  0.000000
9/30/2011	10:24:27 AM	PHl3 MFC set to  0.000000
9/30/2011	10:24:27 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:24:27 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:24:28 AM	Tube furnace set to 150
9/30/2011	10:24:58 AM	Helium valve closed
9/30/2011	10:24:58 AM	H2 valve closed
9/30/2011	10:24:58 AM	BCl3 valve closed
9/30/2011	10:24:58 AM	PH3 valve closed
9/30/2011	10:24:58 AM	SiCl4 pre valve closed
9/30/2011	10:24:58 AM	SiCl4 post valve closed
9/30/2011	10:24:58 AM	Bypass valve closed
9/30/2011	10:24:58 AM	Bubbler valve closed
9/30/2011	10:24:58 AM	Main Vac valve opened
9/30/2011	10:24:58 AM	Helium MFC set to  0.000000
9/30/2011	10:24:58 AM	H2 MFC set to  0.000000
9/30/2011	10:24:58 AM	BCl3 MFC set to  0.000000
9/30/2011	10:24:58 AM	PHl3 MFC set to  0.000000
9/30/2011	10:24:58 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:24:58 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:24:58 AM	Tube furnace set to 150
9/30/2011	10:25:28 AM	H2 valve closed
9/30/2011	10:25:28 AM	BCl3 valve closed
9/30/2011	10:25:28 AM	PH3 valve closed
9/30/2011	10:25:28 AM	SiCl4 pre valve closed
9/30/2011	10:25:28 AM	SiCl4 post valve closed
9/30/2011	10:25:28 AM	Bypass valve closed
9/30/2011	10:25:28 AM	Bubbler valve closed
9/30/2011	10:25:28 AM	Helium valve opened
9/30/2011	10:25:28 AM	Main Vac valve opened
9/30/2011	10:25:28 AM	Helium MFC set to  20.000000
9/30/2011	10:25:28 AM	H2 MFC set to  0.000000
9/30/2011	10:25:28 AM	BCl3 MFC set to  0.000000
9/30/2011	10:25:28 AM	PHl3 MFC set to  0.000000
9/30/2011	10:25:28 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:25:28 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:25:28 AM	Tube furnace set to 150
9/30/2011	10:25:58 AM	Helium valve closed
9/30/2011	10:25:58 AM	H2 valve closed
9/30/2011	10:25:58 AM	BCl3 valve closed
9/30/2011	10:25:58 AM	PH3 valve closed
9/30/2011	10:25:58 AM	SiCl4 pre valve closed
9/30/2011	10:25:58 AM	SiCl4 post valve closed
9/30/2011	10:25:58 AM	Bypass valve closed
9/30/2011	10:25:58 AM	Bubbler valve closed
9/30/2011	10:25:58 AM	Main Vac valve opened
9/30/2011	10:25:58 AM	Helium MFC set to  0.000000
9/30/2011	10:25:58 AM	H2 MFC set to  0.000000
9/30/2011	10:25:58 AM	BCl3 MFC set to  0.000000
9/30/2011	10:25:58 AM	PHl3 MFC set to  0.000000
9/30/2011	10:25:58 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:25:58 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:25:58 AM	Tube furnace set to 150
9/30/2011	10:26:28 AM	H2 valve closed
9/30/2011	10:26:28 AM	BCl3 valve closed
9/30/2011	10:26:28 AM	PH3 valve closed
9/30/2011	10:26:28 AM	SiCl4 pre valve closed
9/30/2011	10:26:28 AM	SiCl4 post valve closed
9/30/2011	10:26:28 AM	Bypass valve closed
9/30/2011	10:26:28 AM	Bubbler valve closed
9/30/2011	10:26:28 AM	Helium valve opened
9/30/2011	10:26:28 AM	Main Vac valve opened
9/30/2011	10:26:28 AM	Helium MFC set to  20.000000
9/30/2011	10:26:28 AM	H2 MFC set to  0.000000
9/30/2011	10:26:28 AM	BCl3 MFC set to  0.000000
9/30/2011	10:26:28 AM	PHl3 MFC set to  0.000000
9/30/2011	10:26:28 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:26:28 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:26:28 AM	Tube furnace set to 150
9/30/2011	10:26:58 AM	Helium valve closed
9/30/2011	10:26:58 AM	H2 valve closed
9/30/2011	10:26:58 AM	BCl3 valve closed
9/30/2011	10:26:58 AM	PH3 valve closed
9/30/2011	10:26:58 AM	SiCl4 pre valve closed
9/30/2011	10:26:58 AM	SiCl4 post valve closed
9/30/2011	10:26:58 AM	Bypass valve closed
9/30/2011	10:26:58 AM	Bubbler valve closed
9/30/2011	10:26:58 AM	Main Vac valve opened
9/30/2011	10:26:58 AM	Helium MFC set to  0.000000
9/30/2011	10:26:58 AM	H2 MFC set to  0.000000
9/30/2011	10:26:58 AM	BCl3 MFC set to  0.000000
9/30/2011	10:26:58 AM	PHl3 MFC set to  0.000000
9/30/2011	10:26:58 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:26:58 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:26:59 AM	Tube furnace set to 150
9/30/2011	10:27:29 AM	H2 valve closed
9/30/2011	10:27:29 AM	BCl3 valve closed
9/30/2011	10:27:29 AM	PH3 valve closed
9/30/2011	10:27:29 AM	SiCl4 pre valve closed
9/30/2011	10:27:29 AM	SiCl4 post valve closed
9/30/2011	10:27:29 AM	Bypass valve closed
9/30/2011	10:27:29 AM	Bubbler valve closed
9/30/2011	10:27:29 AM	Helium valve opened
9/30/2011	10:27:29 AM	Main Vac valve opened
9/30/2011	10:27:29 AM	Helium MFC set to  20.000000
9/30/2011	10:27:29 AM	H2 MFC set to  0.000000
9/30/2011	10:27:29 AM	BCl3 MFC set to  0.000000
9/30/2011	10:27:29 AM	PHl3 MFC set to  0.000000
9/30/2011	10:27:29 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:27:29 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:27:29 AM	Tube furnace set to 150
9/30/2011	10:27:59 AM	Helium valve closed
9/30/2011	10:27:59 AM	H2 valve closed
9/30/2011	10:27:59 AM	BCl3 valve closed
9/30/2011	10:27:59 AM	PH3 valve closed
9/30/2011	10:27:59 AM	SiCl4 pre valve closed
9/30/2011	10:27:59 AM	SiCl4 post valve closed
9/30/2011	10:27:59 AM	Bypass valve closed
9/30/2011	10:27:59 AM	Bubbler valve closed
9/30/2011	10:27:59 AM	Main Vac valve opened
9/30/2011	10:27:59 AM	Helium MFC set to  0.000000
9/30/2011	10:27:59 AM	H2 MFC set to  0.000000
9/30/2011	10:27:59 AM	BCl3 MFC set to  0.000000
9/30/2011	10:27:59 AM	PHl3 MFC set to  0.000000
9/30/2011	10:27:59 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:27:59 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:27:59 AM	Tube furnace set to 150
9/30/2011	10:28:04 AM	Run finished at 10:28 AM
9/30/2011	10:34:51 AM	Main Vac valve closed
9/30/2011	10:34:59 AM	Main Vac valve opened
9/30/2011	10:35:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/30/2011	10:35:24 AM	Recipe started at 10:35 AM
9/30/2011	10:35:24 AM	Helium valve closed
9/30/2011	10:35:24 AM	H2 valve closed
9/30/2011	10:35:24 AM	BCl3 valve closed
9/30/2011	10:35:24 AM	PH3 valve closed
9/30/2011	10:35:24 AM	SiCl4 pre valve closed
9/30/2011	10:35:24 AM	SiCl4 post valve closed
9/30/2011	10:35:24 AM	Main Vac valve closed
9/30/2011	10:35:24 AM	Bubbler valve closed
9/30/2011	10:35:24 AM	Bypass valve opened
9/30/2011	10:35:24 AM	Helium MFC set to  0.000000
9/30/2011	10:35:24 AM	H2 MFC set to  0.000000
9/30/2011	10:35:24 AM	BCl3 MFC set to  0.000000
9/30/2011	10:35:24 AM	PHl3 MFC set to  0.000000
9/30/2011	10:35:24 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:35:24 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:35:24 AM	Tube furnace set to 0
9/30/2011	10:35:24 AM	Helium valve closed
9/30/2011	10:35:24 AM	H2 valve closed
9/30/2011	10:35:24 AM	BCl3 valve closed
9/30/2011	10:35:24 AM	PH3 valve closed
9/30/2011	10:35:24 AM	SiCl4 pre valve closed
9/30/2011	10:35:24 AM	SiCl4 post valve closed
9/30/2011	10:35:24 AM	Main Vac valve closed
9/30/2011	10:35:24 AM	Bubbler valve closed
9/30/2011	10:35:24 AM	Bypass valve opened
9/30/2011	10:35:24 AM	Helium MFC set to  0.000000
9/30/2011	10:35:24 AM	H2 MFC set to  0.000000
9/30/2011	10:35:25 AM	BCl3 MFC set to  0.000000
9/30/2011	10:35:25 AM	PHl3 MFC set to  0.000000
9/30/2011	10:35:25 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:35:25 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:35:25 AM	Tube furnace set to 0
9/30/2011	10:35:45 AM	Helium valve closed
9/30/2011	10:35:45 AM	H2 valve closed
9/30/2011	10:35:45 AM	BCl3 valve closed
9/30/2011	10:35:45 AM	PH3 valve closed
9/30/2011	10:35:45 AM	SiCl4 pre valve closed
9/30/2011	10:35:45 AM	SiCl4 post valve closed
9/30/2011	10:35:45 AM	Bypass valve closed
9/30/2011	10:35:45 AM	Bubbler valve closed
9/30/2011	10:35:45 AM	Main Vac valve opened
9/30/2011	10:35:45 AM	Helium MFC set to  0.000000
9/30/2011	10:35:45 AM	H2 MFC set to  0.000000
9/30/2011	10:35:45 AM	BCl3 MFC set to  0.000000
9/30/2011	10:35:45 AM	PHl3 MFC set to  0.000000
9/30/2011	10:35:45 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:35:45 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:35:45 AM	Tube furnace set to 0
9/30/2011	10:36:15 AM	H2 valve closed
9/30/2011	10:36:15 AM	BCl3 valve closed
9/30/2011	10:36:15 AM	PH3 valve closed
9/30/2011	10:36:15 AM	SiCl4 pre valve closed
9/30/2011	10:36:15 AM	SiCl4 post valve closed
9/30/2011	10:36:15 AM	Bypass valve closed
9/30/2011	10:36:15 AM	Bubbler valve closed
9/30/2011	10:36:15 AM	Helium valve opened
9/30/2011	10:36:15 AM	Main Vac valve opened
9/30/2011	10:36:15 AM	Helium MFC set to  20.000000
9/30/2011	10:36:15 AM	H2 MFC set to  0.000000
9/30/2011	10:36:15 AM	BCl3 MFC set to  0.000000
9/30/2011	10:36:15 AM	PHl3 MFC set to  0.000000
9/30/2011	10:36:15 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:36:15 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:36:16 AM	Tube furnace set to 0
9/30/2011	10:36:46 AM	Helium valve closed
9/30/2011	10:36:46 AM	H2 valve closed
9/30/2011	10:36:46 AM	BCl3 valve closed
9/30/2011	10:36:46 AM	PH3 valve closed
9/30/2011	10:36:46 AM	SiCl4 pre valve closed
9/30/2011	10:36:46 AM	SiCl4 post valve closed
9/30/2011	10:36:46 AM	Bypass valve closed
9/30/2011	10:36:46 AM	Bubbler valve closed
9/30/2011	10:36:46 AM	Main Vac valve opened
9/30/2011	10:36:46 AM	Helium MFC set to  0.000000
9/30/2011	10:36:46 AM	H2 MFC set to  0.000000
9/30/2011	10:36:46 AM	BCl3 MFC set to  0.000000
9/30/2011	10:36:46 AM	PHl3 MFC set to  0.000000
9/30/2011	10:36:46 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:36:46 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:36:46 AM	Tube furnace set to 0
9/30/2011	10:37:16 AM	H2 valve closed
9/30/2011	10:37:16 AM	BCl3 valve closed
9/30/2011	10:37:16 AM	PH3 valve closed
9/30/2011	10:37:16 AM	SiCl4 pre valve closed
9/30/2011	10:37:16 AM	SiCl4 post valve closed
9/30/2011	10:37:16 AM	Bypass valve closed
9/30/2011	10:37:16 AM	Bubbler valve closed
9/30/2011	10:37:16 AM	Helium valve opened
9/30/2011	10:37:16 AM	Main Vac valve opened
9/30/2011	10:37:16 AM	Helium MFC set to  20.000000
9/30/2011	10:37:16 AM	H2 MFC set to  0.000000
9/30/2011	10:37:16 AM	BCl3 MFC set to  0.000000
9/30/2011	10:37:16 AM	PHl3 MFC set to  0.000000
9/30/2011	10:37:16 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:37:16 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:37:16 AM	Tube furnace set to 0
9/30/2011	10:37:46 AM	Helium valve closed
9/30/2011	10:37:46 AM	H2 valve closed
9/30/2011	10:37:46 AM	BCl3 valve closed
9/30/2011	10:37:46 AM	PH3 valve closed
9/30/2011	10:37:46 AM	SiCl4 pre valve closed
9/30/2011	10:37:46 AM	SiCl4 post valve closed
9/30/2011	10:37:46 AM	Bypass valve closed
9/30/2011	10:37:46 AM	Bubbler valve closed
9/30/2011	10:37:46 AM	Main Vac valve opened
9/30/2011	10:37:46 AM	Helium MFC set to  0.000000
9/30/2011	10:37:46 AM	H2 MFC set to  0.000000
9/30/2011	10:37:46 AM	BCl3 MFC set to  0.000000
9/30/2011	10:37:46 AM	PHl3 MFC set to  0.000000
9/30/2011	10:37:46 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:37:46 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:37:46 AM	Tube furnace set to 0
9/30/2011	10:38:16 AM	H2 valve closed
9/30/2011	10:38:16 AM	BCl3 valve closed
9/30/2011	10:38:16 AM	PH3 valve closed
9/30/2011	10:38:16 AM	SiCl4 pre valve closed
9/30/2011	10:38:16 AM	SiCl4 post valve closed
9/30/2011	10:38:16 AM	Bypass valve closed
9/30/2011	10:38:16 AM	Bubbler valve closed
9/30/2011	10:38:16 AM	Helium valve opened
9/30/2011	10:38:16 AM	Main Vac valve opened
9/30/2011	10:38:16 AM	Helium MFC set to  20.000000
9/30/2011	10:38:16 AM	H2 MFC set to  0.000000
9/30/2011	10:38:16 AM	BCl3 MFC set to  0.000000
9/30/2011	10:38:16 AM	PHl3 MFC set to  0.000000
9/30/2011	10:38:16 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:38:16 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:38:16 AM	Tube furnace set to 0
9/30/2011	10:38:46 AM	Helium valve closed
9/30/2011	10:38:46 AM	H2 valve closed
9/30/2011	10:38:46 AM	BCl3 valve closed
9/30/2011	10:38:46 AM	PH3 valve closed
9/30/2011	10:38:46 AM	SiCl4 pre valve closed
9/30/2011	10:38:46 AM	SiCl4 post valve closed
9/30/2011	10:38:46 AM	Bypass valve closed
9/30/2011	10:38:46 AM	Bubbler valve closed
9/30/2011	10:38:46 AM	Main Vac valve opened
9/30/2011	10:38:46 AM	Helium MFC set to  0.000000
9/30/2011	10:38:46 AM	H2 MFC set to  0.000000
9/30/2011	10:38:46 AM	BCl3 MFC set to  0.000000
9/30/2011	10:38:46 AM	PHl3 MFC set to  0.000000
9/30/2011	10:38:46 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:38:46 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:38:47 AM	Tube furnace set to 0
9/30/2011	10:39:17 AM	H2 valve closed
9/30/2011	10:39:17 AM	BCl3 valve closed
9/30/2011	10:39:17 AM	PH3 valve closed
9/30/2011	10:39:17 AM	SiCl4 pre valve closed
9/30/2011	10:39:17 AM	SiCl4 post valve closed
9/30/2011	10:39:17 AM	Bypass valve closed
9/30/2011	10:39:17 AM	Bubbler valve closed
9/30/2011	10:39:17 AM	Helium valve opened
9/30/2011	10:39:17 AM	Main Vac valve opened
9/30/2011	10:39:17 AM	Helium MFC set to  20.000000
9/30/2011	10:39:17 AM	H2 MFC set to  0.000000
9/30/2011	10:39:17 AM	BCl3 MFC set to  0.000000
9/30/2011	10:39:17 AM	PHl3 MFC set to  0.000000
9/30/2011	10:39:17 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:39:17 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:39:17 AM	Tube furnace set to 0
9/30/2011	10:39:47 AM	Helium valve closed
9/30/2011	10:39:47 AM	H2 valve closed
9/30/2011	10:39:47 AM	BCl3 valve closed
9/30/2011	10:39:47 AM	PH3 valve closed
9/30/2011	10:39:47 AM	SiCl4 pre valve closed
9/30/2011	10:39:47 AM	SiCl4 post valve closed
9/30/2011	10:39:47 AM	Bypass valve closed
9/30/2011	10:39:47 AM	Bubbler valve closed
9/30/2011	10:39:47 AM	Main Vac valve opened
9/30/2011	10:39:47 AM	Helium MFC set to  0.000000
9/30/2011	10:39:47 AM	H2 MFC set to  0.000000
9/30/2011	10:39:47 AM	BCl3 MFC set to  0.000000
9/30/2011	10:39:47 AM	PHl3 MFC set to  0.000000
9/30/2011	10:39:47 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:39:47 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:39:47 AM	Tube furnace set to 0
9/30/2011	10:40:17 AM	H2 valve closed
9/30/2011	10:40:17 AM	BCl3 valve closed
9/30/2011	10:40:17 AM	PH3 valve closed
9/30/2011	10:40:17 AM	SiCl4 pre valve closed
9/30/2011	10:40:17 AM	SiCl4 post valve closed
9/30/2011	10:40:17 AM	Bypass valve closed
9/30/2011	10:40:17 AM	Bubbler valve closed
9/30/2011	10:40:17 AM	Helium valve opened
9/30/2011	10:40:17 AM	Main Vac valve opened
9/30/2011	10:40:17 AM	Helium MFC set to  20.000000
9/30/2011	10:40:17 AM	H2 MFC set to  0.000000
9/30/2011	10:40:17 AM	BCl3 MFC set to  0.000000
9/30/2011	10:40:17 AM	PHl3 MFC set to  0.000000
9/30/2011	10:40:17 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:40:17 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:40:17 AM	Tube furnace set to 0
9/30/2011	10:40:47 AM	Helium valve closed
9/30/2011	10:40:47 AM	H2 valve closed
9/30/2011	10:40:47 AM	BCl3 valve closed
9/30/2011	10:40:47 AM	PH3 valve closed
9/30/2011	10:40:47 AM	SiCl4 pre valve closed
9/30/2011	10:40:47 AM	SiCl4 post valve closed
9/30/2011	10:40:47 AM	Bypass valve closed
9/30/2011	10:40:47 AM	Bubbler valve closed
9/30/2011	10:40:47 AM	Main Vac valve opened
9/30/2011	10:40:47 AM	Helium MFC set to  0.000000
9/30/2011	10:40:47 AM	H2 MFC set to  0.000000
9/30/2011	10:40:47 AM	BCl3 MFC set to  0.000000
9/30/2011	10:40:47 AM	PHl3 MFC set to  0.000000
9/30/2011	10:40:47 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:40:47 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:40:47 AM	Tube furnace set to 0
9/30/2011	10:41:17 AM	H2 valve closed
9/30/2011	10:41:17 AM	BCl3 valve closed
9/30/2011	10:41:17 AM	PH3 valve closed
9/30/2011	10:41:17 AM	SiCl4 pre valve closed
9/30/2011	10:41:17 AM	SiCl4 post valve closed
9/30/2011	10:41:17 AM	Bypass valve closed
9/30/2011	10:41:17 AM	Bubbler valve closed
9/30/2011	10:41:17 AM	Helium valve opened
9/30/2011	10:41:17 AM	Main Vac valve opened
9/30/2011	10:41:17 AM	Helium MFC set to  20.000000
9/30/2011	10:41:17 AM	H2 MFC set to  0.000000
9/30/2011	10:41:17 AM	BCl3 MFC set to  0.000000
9/30/2011	10:41:17 AM	PHl3 MFC set to  0.000000
9/30/2011	10:41:17 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:41:17 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:41:18 AM	Tube furnace set to 0
9/30/2011	10:41:41 AM	Helium valve closed
9/30/2011	10:41:41 AM	H2 valve closed
9/30/2011	10:41:41 AM	BCl3 valve closed
9/30/2011	10:41:41 AM	PH3 valve closed
9/30/2011	10:41:41 AM	SiCl4 pre valve closed
9/30/2011	10:41:41 AM	SiCl4 post valve closed
9/30/2011	10:41:41 AM	Bypass valve closed
9/30/2011	10:41:41 AM	Bubbler valve closed
9/30/2011	10:41:41 AM	Main Vac valve opened
9/30/2011	10:41:41 AM	Helium MFC set to  0.000000
9/30/2011	10:41:41 AM	H2 MFC set to  0.000000
9/30/2011	10:41:41 AM	BCl3 MFC set to  0.000000
9/30/2011	10:41:41 AM	PHl3 MFC set to  0.000000
9/30/2011	10:41:41 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:41:41 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:41:42 AM	Tube furnace set to 0
9/30/2011	10:42:12 AM	H2 valve closed
9/30/2011	10:42:12 AM	BCl3 valve closed
9/30/2011	10:42:12 AM	PH3 valve closed
9/30/2011	10:42:12 AM	SiCl4 pre valve closed
9/30/2011	10:42:12 AM	SiCl4 post valve closed
9/30/2011	10:42:12 AM	Bypass valve closed
9/30/2011	10:42:12 AM	Bubbler valve closed
9/30/2011	10:42:12 AM	Helium valve opened
9/30/2011	10:42:12 AM	Main Vac valve opened
9/30/2011	10:42:12 AM	Helium MFC set to  20.000000
9/30/2011	10:42:12 AM	H2 MFC set to  0.000000
9/30/2011	10:42:12 AM	BCl3 MFC set to  0.000000
9/30/2011	10:42:12 AM	PHl3 MFC set to  0.000000
9/30/2011	10:42:12 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:42:12 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:42:12 AM	Tube furnace set to 0
9/30/2011	10:42:42 AM	Helium valve closed
9/30/2011	10:42:42 AM	H2 valve closed
9/30/2011	10:42:42 AM	BCl3 valve closed
9/30/2011	10:42:42 AM	PH3 valve closed
9/30/2011	10:42:42 AM	SiCl4 pre valve closed
9/30/2011	10:42:42 AM	SiCl4 post valve closed
9/30/2011	10:42:42 AM	Bypass valve closed
9/30/2011	10:42:42 AM	Bubbler valve closed
9/30/2011	10:42:42 AM	Main Vac valve opened
9/30/2011	10:42:42 AM	Helium MFC set to  0.000000
9/30/2011	10:42:42 AM	H2 MFC set to  0.000000
9/30/2011	10:42:42 AM	BCl3 MFC set to  0.000000
9/30/2011	10:42:42 AM	PHl3 MFC set to  0.000000
9/30/2011	10:42:42 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:42:42 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:42:42 AM	Tube furnace set to 0
9/30/2011	10:43:12 AM	H2 valve closed
9/30/2011	10:43:12 AM	BCl3 valve closed
9/30/2011	10:43:12 AM	PH3 valve closed
9/30/2011	10:43:12 AM	SiCl4 pre valve closed
9/30/2011	10:43:12 AM	SiCl4 post valve closed
9/30/2011	10:43:12 AM	Bypass valve closed
9/30/2011	10:43:12 AM	Bubbler valve closed
9/30/2011	10:43:12 AM	Helium valve opened
9/30/2011	10:43:12 AM	Main Vac valve opened
9/30/2011	10:43:12 AM	Helium MFC set to  20.000000
9/30/2011	10:43:12 AM	H2 MFC set to  0.000000
9/30/2011	10:43:12 AM	BCl3 MFC set to  0.000000
9/30/2011	10:43:12 AM	PHl3 MFC set to  0.000000
9/30/2011	10:43:12 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:43:12 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:43:12 AM	Tube furnace set to 0
9/30/2011	10:43:42 AM	Helium valve closed
9/30/2011	10:43:42 AM	H2 valve closed
9/30/2011	10:43:42 AM	BCl3 valve closed
9/30/2011	10:43:42 AM	PH3 valve closed
9/30/2011	10:43:42 AM	SiCl4 pre valve closed
9/30/2011	10:43:42 AM	SiCl4 post valve closed
9/30/2011	10:43:42 AM	Bypass valve closed
9/30/2011	10:43:42 AM	Bubbler valve closed
9/30/2011	10:43:42 AM	Main Vac valve opened
9/30/2011	10:43:42 AM	Helium MFC set to  0.000000
9/30/2011	10:43:42 AM	H2 MFC set to  0.000000
9/30/2011	10:43:42 AM	BCl3 MFC set to  0.000000
9/30/2011	10:43:42 AM	PHl3 MFC set to  0.000000
9/30/2011	10:43:42 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:43:42 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:43:42 AM	Tube furnace set to 0
9/30/2011	10:44:12 AM	H2 valve closed
9/30/2011	10:44:12 AM	BCl3 valve closed
9/30/2011	10:44:12 AM	PH3 valve closed
9/30/2011	10:44:12 AM	SiCl4 pre valve closed
9/30/2011	10:44:12 AM	SiCl4 post valve closed
9/30/2011	10:44:12 AM	Bypass valve closed
9/30/2011	10:44:12 AM	Bubbler valve closed
9/30/2011	10:44:12 AM	Helium valve opened
9/30/2011	10:44:12 AM	Main Vac valve opened
9/30/2011	10:44:12 AM	Helium MFC set to  20.000000
9/30/2011	10:44:12 AM	H2 MFC set to  0.000000
9/30/2011	10:44:12 AM	BCl3 MFC set to  0.000000
9/30/2011	10:44:12 AM	PHl3 MFC set to  0.000000
9/30/2011	10:44:12 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:44:12 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:44:13 AM	Tube furnace set to 0
9/30/2011	10:44:43 AM	Helium valve closed
9/30/2011	10:44:43 AM	H2 valve closed
9/30/2011	10:44:43 AM	BCl3 valve closed
9/30/2011	10:44:43 AM	PH3 valve closed
9/30/2011	10:44:43 AM	SiCl4 pre valve closed
9/30/2011	10:44:43 AM	SiCl4 post valve closed
9/30/2011	10:44:43 AM	Bypass valve closed
9/30/2011	10:44:43 AM	Bubbler valve closed
9/30/2011	10:44:43 AM	Main Vac valve opened
9/30/2011	10:44:43 AM	Helium MFC set to  0.000000
9/30/2011	10:44:43 AM	H2 MFC set to  0.000000
9/30/2011	10:44:43 AM	BCl3 MFC set to  0.000000
9/30/2011	10:44:43 AM	PHl3 MFC set to  0.000000
9/30/2011	10:44:43 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:44:43 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:44:43 AM	Tube furnace set to 0
9/30/2011	10:45:13 AM	H2 valve closed
9/30/2011	10:45:13 AM	BCl3 valve closed
9/30/2011	10:45:13 AM	PH3 valve closed
9/30/2011	10:45:13 AM	SiCl4 pre valve closed
9/30/2011	10:45:13 AM	SiCl4 post valve closed
9/30/2011	10:45:13 AM	Bypass valve closed
9/30/2011	10:45:13 AM	Bubbler valve closed
9/30/2011	10:45:13 AM	Helium valve opened
9/30/2011	10:45:13 AM	Main Vac valve opened
9/30/2011	10:45:13 AM	Helium MFC set to  20.000000
9/30/2011	10:45:13 AM	H2 MFC set to  0.000000
9/30/2011	10:45:13 AM	BCl3 MFC set to  0.000000
9/30/2011	10:45:13 AM	PHl3 MFC set to  0.000000
9/30/2011	10:45:13 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:45:13 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:45:13 AM	Tube furnace set to 0
9/30/2011	10:45:43 AM	Helium valve closed
9/30/2011	10:45:43 AM	H2 valve closed
9/30/2011	10:45:43 AM	BCl3 valve closed
9/30/2011	10:45:43 AM	PH3 valve closed
9/30/2011	10:45:43 AM	SiCl4 pre valve closed
9/30/2011	10:45:43 AM	SiCl4 post valve closed
9/30/2011	10:45:43 AM	Bypass valve closed
9/30/2011	10:45:43 AM	Bubbler valve closed
9/30/2011	10:45:43 AM	Main Vac valve opened
9/30/2011	10:45:43 AM	Helium MFC set to  0.000000
9/30/2011	10:45:43 AM	H2 MFC set to  0.000000
9/30/2011	10:45:43 AM	BCl3 MFC set to  0.000000
9/30/2011	10:45:43 AM	PHl3 MFC set to  0.000000
9/30/2011	10:45:43 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:45:43 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:45:43 AM	Tube furnace set to 0
9/30/2011	10:45:44 AM	Run finished at 10:45 AM
9/30/2011	10:45:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/30/2011	10:50:21 AM	Main Vac valve closed
9/30/2011	10:50:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	10:50:31 AM	Recipe started at 10:50 AM
9/30/2011	10:50:31 AM	Helium valve closed
9/30/2011	10:50:31 AM	H2 valve closed
9/30/2011	10:50:31 AM	BCl3 valve closed
9/30/2011	10:50:31 AM	PH3 valve closed
9/30/2011	10:50:31 AM	SiCl4 pre valve closed
9/30/2011	10:50:31 AM	SiCl4 post valve closed
9/30/2011	10:50:31 AM	Main Vac valve closed
9/30/2011	10:50:31 AM	Bubbler valve closed
9/30/2011	10:50:31 AM	Bypass valve opened
9/30/2011	10:50:31 AM	Helium MFC set to  0.000000
9/30/2011	10:50:31 AM	H2 MFC set to  0.000000
9/30/2011	10:50:31 AM	BCl3 MFC set to  0.000000
9/30/2011	10:50:31 AM	PHl3 MFC set to  0.000000
9/30/2011	10:50:31 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:50:31 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:50:31 AM	Tube furnace set to 0
9/30/2011	10:50:31 AM	Helium valve closed
9/30/2011	10:50:31 AM	H2 valve closed
9/30/2011	10:50:31 AM	BCl3 valve closed
9/30/2011	10:50:31 AM	PH3 valve closed
9/30/2011	10:50:31 AM	SiCl4 pre valve closed
9/30/2011	10:50:31 AM	SiCl4 post valve closed
9/30/2011	10:50:31 AM	Main Vac valve closed
9/30/2011	10:50:31 AM	Bubbler valve closed
9/30/2011	10:50:31 AM	Bypass valve opened
9/30/2011	10:50:31 AM	Helium MFC set to  0.000000
9/30/2011	10:50:31 AM	H2 MFC set to  0.000000
9/30/2011	10:50:31 AM	BCl3 MFC set to  0.000000
9/30/2011	10:50:31 AM	PHl3 MFC set to  0.000000
9/30/2011	10:50:31 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:50:31 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:50:31 AM	Tube furnace set to 0
9/30/2011	10:50:37 AM	Helium valve closed
9/30/2011	10:50:37 AM	H2 valve closed
9/30/2011	10:50:37 AM	BCl3 valve closed
9/30/2011	10:50:37 AM	PH3 valve closed
9/30/2011	10:50:37 AM	SiCl4 pre valve closed
9/30/2011	10:50:37 AM	SiCl4 post valve closed
9/30/2011	10:50:37 AM	Bypass valve closed
9/30/2011	10:50:37 AM	Bubbler valve closed
9/30/2011	10:50:37 AM	Main Vac valve opened
9/30/2011	10:50:37 AM	Helium MFC set to  0.000000
9/30/2011	10:50:37 AM	H2 MFC set to  0.000000
9/30/2011	10:50:37 AM	BCl3 MFC set to  0.000000
9/30/2011	10:50:37 AM	PHl3 MFC set to  0.000000
9/30/2011	10:50:37 AM	SiCl4 MFC set to  0.000000
9/30/2011	10:50:37 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	10:50:37 AM	Tube furnace set to 0
9/30/2011	10:50:38 AM	Run finished at 10:50 AM
9/30/2011	10:50:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	11:07:38 AM	Recipe started at 11:07 AM
9/30/2011	11:07:38 AM	Helium valve closed
9/30/2011	11:07:38 AM	H2 valve closed
9/30/2011	11:07:38 AM	BCl3 valve closed
9/30/2011	11:07:38 AM	PH3 valve closed
9/30/2011	11:07:38 AM	SiCl4 pre valve closed
9/30/2011	11:07:38 AM	SiCl4 post valve closed
9/30/2011	11:07:38 AM	Main Vac valve closed
9/30/2011	11:07:38 AM	Bypass valve closed
9/30/2011	11:07:38 AM	Bubbler valve closed
9/30/2011	11:07:38 AM	Helium MFC set to  0.000000
9/30/2011	11:07:38 AM	H2 MFC set to  0.000000
9/30/2011	11:07:38 AM	BCl3 MFC set to  0.000000
9/30/2011	11:07:38 AM	PHl3 MFC set to  0.000000
9/30/2011	11:07:38 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:07:38 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:07:39 AM	Tube furnace set to 0
9/30/2011	11:07:42 AM	Helium valve closed
9/30/2011	11:07:42 AM	BCl3 valve closed
9/30/2011	11:07:42 AM	PH3 valve closed
9/30/2011	11:07:42 AM	SiCl4 pre valve closed
9/30/2011	11:07:42 AM	SiCl4 post valve closed
9/30/2011	11:07:42 AM	Main Vac valve closed
9/30/2011	11:07:42 AM	Bypass valve closed
9/30/2011	11:07:42 AM	Bubbler valve closed
9/30/2011	11:07:42 AM	H2 valve opened
9/30/2011	11:07:42 AM	Helium MFC set to  0.000000
9/30/2011	11:07:42 AM	H2 MFC set to  500.000000
9/30/2011	11:07:42 AM	BCl3 MFC set to  0.000000
9/30/2011	11:07:42 AM	PHl3 MFC set to  0.000000
9/30/2011	11:07:42 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:07:42 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:07:42 AM	Tube furnace set to 0
9/30/2011	11:08:48 AM	Helium valve closed
9/30/2011	11:08:48 AM	BCl3 valve closed
9/30/2011	11:08:48 AM	PH3 valve closed
9/30/2011	11:08:48 AM	SiCl4 pre valve closed
9/30/2011	11:08:48 AM	SiCl4 post valve closed
9/30/2011	11:08:48 AM	Main Vac valve closed
9/30/2011	11:08:48 AM	Bypass valve closed
9/30/2011	11:08:48 AM	H2 valve opened
9/30/2011	11:08:48 AM	Bubbler valve opened
9/30/2011	11:08:48 AM	Helium MFC set to  0.000000
9/30/2011	11:08:48 AM	H2 MFC set to  500.000000
9/30/2011	11:08:48 AM	BCl3 MFC set to  0.000000
9/30/2011	11:08:48 AM	PHl3 MFC set to  0.000000
9/30/2011	11:08:48 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:08:48 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:08:48 AM	Tube furnace set to 0
9/30/2011	11:08:49 AM	Helium valve closed
9/30/2011	11:08:49 AM	BCl3 valve closed
9/30/2011	11:08:49 AM	PH3 valve closed
9/30/2011	11:08:49 AM	SiCl4 pre valve closed
9/30/2011	11:08:49 AM	SiCl4 post valve closed
9/30/2011	11:08:49 AM	Main Vac valve closed
9/30/2011	11:08:49 AM	Bypass valve closed
9/30/2011	11:08:49 AM	H2 valve opened
9/30/2011	11:08:49 AM	Bubbler valve opened
9/30/2011	11:08:49 AM	Helium MFC set to  0.000000
9/30/2011	11:08:49 AM	H2 MFC set to  500.000000
9/30/2011	11:08:49 AM	BCl3 MFC set to  0.000000
9/30/2011	11:08:49 AM	PHl3 MFC set to  0.000000
9/30/2011	11:08:49 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:08:49 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:08:49 AM	Tube furnace set to 1000
9/30/2011	11:28:49 AM	Helium valve closed
9/30/2011	11:28:49 AM	BCl3 valve closed
9/30/2011	11:28:49 AM	Main Vac valve closed
9/30/2011	11:28:49 AM	Bypass valve closed
9/30/2011	11:28:49 AM	H2 valve opened
9/30/2011	11:28:49 AM	PH3 valve opened
9/30/2011	11:28:49 AM	SiCl4 pre valve opened
9/30/2011	11:28:49 AM	SiCl4 post valve opened
9/30/2011	11:28:49 AM	Bubbler valve opened
9/30/2011	11:28:49 AM	Helium MFC set to  0.000000
9/30/2011	11:28:49 AM	H2 MFC set to  500.000000
9/30/2011	11:28:49 AM	BCl3 MFC set to  0.000000
9/30/2011	11:28:49 AM	PHl3 MFC set to  1.000000
9/30/2011	11:28:49 AM	SiCl4 MFC set to  50.000000
9/30/2011	11:28:49 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:28:49 AM	Tube furnace set to 1000
9/30/2011	11:33:49 AM	Helium valve closed
9/30/2011	11:33:49 AM	BCl3 valve closed
9/30/2011	11:33:49 AM	PH3 valve closed
9/30/2011	11:33:49 AM	SiCl4 pre valve closed
9/30/2011	11:33:49 AM	SiCl4 post valve closed
9/30/2011	11:33:49 AM	Main Vac valve closed
9/30/2011	11:33:49 AM	Bypass valve closed
9/30/2011	11:33:49 AM	H2 valve opened
9/30/2011	11:33:49 AM	Bubbler valve opened
9/30/2011	11:33:49 AM	Helium MFC set to  0.000000
9/30/2011	11:33:49 AM	H2 MFC set to  500.000000
9/30/2011	11:33:49 AM	BCl3 MFC set to  0.000000
9/30/2011	11:33:49 AM	PHl3 MFC set to  0.000000
9/30/2011	11:33:49 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:33:49 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:33:50 AM	Tube furnace set to 750
9/30/2011	11:38:50 AM	H2 valve closed
9/30/2011	11:38:50 AM	BCl3 valve closed
9/30/2011	11:38:50 AM	PH3 valve closed
9/30/2011	11:38:50 AM	SiCl4 pre valve closed
9/30/2011	11:38:50 AM	SiCl4 post valve closed
9/30/2011	11:38:50 AM	Main Vac valve closed
9/30/2011	11:38:50 AM	Bypass valve closed
9/30/2011	11:38:50 AM	Helium valve opened
9/30/2011	11:38:50 AM	Bubbler valve opened
9/30/2011	11:38:50 AM	Helium MFC set to  500.000000
9/30/2011	11:38:50 AM	H2 MFC set to  0.000000
9/30/2011	11:38:50 AM	BCl3 MFC set to  0.000000
9/30/2011	11:38:50 AM	PHl3 MFC set to  0.000000
9/30/2011	11:38:50 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:38:50 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:38:50 AM	Tube furnace set to 0
9/30/2011	11:57:40 AM	Helium valve closed
9/30/2011	11:57:40 AM	H2 valve closed
9/30/2011	11:57:40 AM	BCl3 valve closed
9/30/2011	11:57:40 AM	PH3 valve closed
9/30/2011	11:57:40 AM	SiCl4 pre valve closed
9/30/2011	11:57:40 AM	SiCl4 post valve closed
9/30/2011	11:57:40 AM	Main Vac valve closed
9/30/2011	11:57:40 AM	Bypass valve closed
9/30/2011	11:57:40 AM	Bubbler valve closed
9/30/2011	11:57:40 AM	Helium MFC set to  0.000000
9/30/2011	11:57:40 AM	H2 MFC set to  0.000000
9/30/2011	11:57:40 AM	BCl3 MFC set to  0.000000
9/30/2011	11:57:40 AM	PHl3 MFC set to  0.000000
9/30/2011	11:57:40 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:57:40 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:57:40 AM	Tube furnace set to 0
9/30/2011	11:57:41 AM	Run finished at 11:57 AM
9/30/2011	11:57:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	11:57:46 AM	Recipe started at 11:57 AM
9/30/2011	11:57:46 AM	Helium valve closed
9/30/2011	11:57:46 AM	H2 valve closed
9/30/2011	11:57:46 AM	BCl3 valve closed
9/30/2011	11:57:46 AM	PH3 valve closed
9/30/2011	11:57:46 AM	SiCl4 pre valve closed
9/30/2011	11:57:46 AM	SiCl4 post valve closed
9/30/2011	11:57:46 AM	Main Vac valve closed
9/30/2011	11:57:46 AM	Bypass valve closed
9/30/2011	11:57:46 AM	Bubbler valve closed
9/30/2011	11:57:46 AM	Helium MFC set to  0.000000
9/30/2011	11:57:46 AM	H2 MFC set to  0.000000
9/30/2011	11:57:46 AM	BCl3 MFC set to  0.000000
9/30/2011	11:57:46 AM	PHl3 MFC set to  0.000000
9/30/2011	11:57:46 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:57:46 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:57:46 AM	Tube furnace set to 0
9/30/2011	11:57:49 AM	H2 valve closed
9/30/2011	11:57:49 AM	BCl3 valve closed
9/30/2011	11:57:49 AM	PH3 valve closed
9/30/2011	11:57:49 AM	SiCl4 pre valve closed
9/30/2011	11:57:49 AM	SiCl4 post valve closed
9/30/2011	11:57:49 AM	Main Vac valve closed
9/30/2011	11:57:49 AM	Bypass valve closed
9/30/2011	11:57:49 AM	Bubbler valve closed
9/30/2011	11:57:49 AM	Helium valve opened
9/30/2011	11:57:49 AM	Helium MFC set to  500.000000
9/30/2011	11:57:49 AM	H2 MFC set to  0.000000
9/30/2011	11:57:49 AM	BCl3 MFC set to  0.000000
9/30/2011	11:57:49 AM	PHl3 MFC set to  0.000000
9/30/2011	11:57:49 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:57:49 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:57:49 AM	Tube furnace set to 0
9/30/2011	11:57:49 AM	Helium valve closed
9/30/2011	11:57:49 AM	H2 valve closed
9/30/2011	11:57:49 AM	BCl3 valve closed
9/30/2011	11:57:49 AM	PH3 valve closed
9/30/2011	11:57:49 AM	SiCl4 pre valve closed
9/30/2011	11:57:49 AM	SiCl4 post valve closed
9/30/2011	11:57:49 AM	Main Vac valve closed
9/30/2011	11:57:49 AM	Bypass valve closed
9/30/2011	11:57:49 AM	Bubbler valve closed
9/30/2011	11:57:49 AM	Helium MFC set to  0.000000
9/30/2011	11:57:49 AM	H2 MFC set to  0.000000
9/30/2011	11:57:49 AM	BCl3 MFC set to  0.000000
9/30/2011	11:57:49 AM	PHl3 MFC set to  0.000000
9/30/2011	11:57:49 AM	SiCl4 MFC set to  0.000000
9/30/2011	11:57:49 AM	Bypass solenoid MFC set to  0.000000
9/30/2011	11:57:49 AM	Tube furnace set to 0
9/30/2011	11:57:50 AM	Run finished at 11:57 AM
9/30/2011	11:57:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	12:04:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	12:04:36 PM	Recipe started at 12:04 PM
9/30/2011	12:04:36 PM	Helium valve closed
9/30/2011	12:04:36 PM	H2 valve closed
9/30/2011	12:04:36 PM	BCl3 valve closed
9/30/2011	12:04:36 PM	PH3 valve closed
9/30/2011	12:04:36 PM	SiCl4 pre valve closed
9/30/2011	12:04:36 PM	SiCl4 post valve closed
9/30/2011	12:04:36 PM	Main Vac valve closed
9/30/2011	12:04:36 PM	Bubbler valve closed
9/30/2011	12:04:36 PM	Bypass valve opened
9/30/2011	12:04:36 PM	Helium MFC set to  0.000000
9/30/2011	12:04:36 PM	H2 MFC set to  0.000000
9/30/2011	12:04:36 PM	BCl3 MFC set to  0.000000
9/30/2011	12:04:36 PM	PHl3 MFC set to  0.000000
9/30/2011	12:04:36 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:04:36 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:04:37 PM	Tube furnace set to 0
9/30/2011	12:05:43 PM	Helium valve closed
9/30/2011	12:05:43 PM	H2 valve closed
9/30/2011	12:05:43 PM	BCl3 valve closed
9/30/2011	12:05:43 PM	PH3 valve closed
9/30/2011	12:05:43 PM	SiCl4 pre valve closed
9/30/2011	12:05:43 PM	SiCl4 post valve closed
9/30/2011	12:05:43 PM	Main Vac valve closed
9/30/2011	12:05:43 PM	Bubbler valve closed
9/30/2011	12:05:43 PM	Bypass valve opened
9/30/2011	12:05:43 PM	Helium MFC set to  0.000000
9/30/2011	12:05:43 PM	H2 MFC set to  0.000000
9/30/2011	12:05:43 PM	BCl3 MFC set to  0.000000
9/30/2011	12:05:43 PM	PHl3 MFC set to  0.000000
9/30/2011	12:05:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:05:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:05:43 PM	Tube furnace set to 0
9/30/2011	12:06:43 PM	Helium valve closed
9/30/2011	12:06:43 PM	H2 valve closed
9/30/2011	12:06:43 PM	BCl3 valve closed
9/30/2011	12:06:43 PM	PH3 valve closed
9/30/2011	12:06:43 PM	SiCl4 pre valve closed
9/30/2011	12:06:43 PM	SiCl4 post valve closed
9/30/2011	12:06:43 PM	Bypass valve closed
9/30/2011	12:06:43 PM	Bubbler valve closed
9/30/2011	12:06:43 PM	Main Vac valve opened
9/30/2011	12:06:43 PM	Helium MFC set to  0.000000
9/30/2011	12:06:43 PM	H2 MFC set to  0.000000
9/30/2011	12:06:43 PM	BCl3 MFC set to  0.000000
9/30/2011	12:06:43 PM	PHl3 MFC set to  0.000000
9/30/2011	12:06:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:06:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:06:43 PM	Tube furnace set to 0
9/30/2011	12:06:44 PM	Run finished at 12:06 PM
9/30/2011	12:06:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	12:08:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/30/2011	12:08:15 PM	Recipe started at 12:08 PM
9/30/2011	12:08:15 PM	Helium valve closed
9/30/2011	12:08:15 PM	H2 valve closed
9/30/2011	12:08:15 PM	BCl3 valve closed
9/30/2011	12:08:15 PM	PH3 valve closed
9/30/2011	12:08:15 PM	SiCl4 pre valve closed
9/30/2011	12:08:15 PM	SiCl4 post valve closed
9/30/2011	12:08:15 PM	Main Vac valve closed
9/30/2011	12:08:15 PM	Bubbler valve closed
9/30/2011	12:08:15 PM	Bypass valve opened
9/30/2011	12:08:15 PM	Helium MFC set to  0.000000
9/30/2011	12:08:15 PM	H2 MFC set to  0.000000
9/30/2011	12:08:15 PM	BCl3 MFC set to  0.000000
9/30/2011	12:08:15 PM	PHl3 MFC set to  0.000000
9/30/2011	12:08:15 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:08:15 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:08:15 PM	Tube furnace set to 0
9/30/2011	12:08:16 PM	Helium valve closed
9/30/2011	12:08:16 PM	H2 valve closed
9/30/2011	12:08:16 PM	BCl3 valve closed
9/30/2011	12:08:16 PM	PH3 valve closed
9/30/2011	12:08:16 PM	SiCl4 pre valve closed
9/30/2011	12:08:16 PM	SiCl4 post valve closed
9/30/2011	12:08:16 PM	Main Vac valve closed
9/30/2011	12:08:16 PM	Bubbler valve closed
9/30/2011	12:08:16 PM	Bypass valve opened
9/30/2011	12:08:16 PM	Helium MFC set to  0.000000
9/30/2011	12:08:16 PM	H2 MFC set to  0.000000
9/30/2011	12:08:16 PM	BCl3 MFC set to  0.000000
9/30/2011	12:08:16 PM	PHl3 MFC set to  0.000000
9/30/2011	12:08:16 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:08:16 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:08:16 PM	Tube furnace set to 0
9/30/2011	12:08:46 PM	Helium valve closed
9/30/2011	12:08:46 PM	H2 valve closed
9/30/2011	12:08:46 PM	BCl3 valve closed
9/30/2011	12:08:46 PM	PH3 valve closed
9/30/2011	12:08:46 PM	SiCl4 pre valve closed
9/30/2011	12:08:46 PM	SiCl4 post valve closed
9/30/2011	12:08:46 PM	Bypass valve closed
9/30/2011	12:08:46 PM	Bubbler valve closed
9/30/2011	12:08:46 PM	Main Vac valve opened
9/30/2011	12:08:46 PM	Helium MFC set to  0.000000
9/30/2011	12:08:46 PM	H2 MFC set to  0.000000
9/30/2011	12:08:46 PM	BCl3 MFC set to  0.000000
9/30/2011	12:08:46 PM	PHl3 MFC set to  0.000000
9/30/2011	12:08:46 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:08:46 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:08:46 PM	Tube furnace set to 0
9/30/2011	12:09:16 PM	H2 valve closed
9/30/2011	12:09:16 PM	BCl3 valve closed
9/30/2011	12:09:16 PM	PH3 valve closed
9/30/2011	12:09:16 PM	SiCl4 pre valve closed
9/30/2011	12:09:16 PM	SiCl4 post valve closed
9/30/2011	12:09:16 PM	Bypass valve closed
9/30/2011	12:09:16 PM	Bubbler valve closed
9/30/2011	12:09:16 PM	Helium valve opened
9/30/2011	12:09:16 PM	Main Vac valve opened
9/30/2011	12:09:16 PM	Helium MFC set to  20.000000
9/30/2011	12:09:16 PM	H2 MFC set to  0.000000
9/30/2011	12:09:16 PM	BCl3 MFC set to  0.000000
9/30/2011	12:09:16 PM	PHl3 MFC set to  0.000000
9/30/2011	12:09:16 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:09:16 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:09:16 PM	Tube furnace set to 0
9/30/2011	12:09:46 PM	Helium valve closed
9/30/2011	12:09:46 PM	H2 valve closed
9/30/2011	12:09:46 PM	BCl3 valve closed
9/30/2011	12:09:46 PM	PH3 valve closed
9/30/2011	12:09:46 PM	SiCl4 pre valve closed
9/30/2011	12:09:46 PM	SiCl4 post valve closed
9/30/2011	12:09:46 PM	Bypass valve closed
9/30/2011	12:09:46 PM	Bubbler valve closed
9/30/2011	12:09:46 PM	Main Vac valve opened
9/30/2011	12:09:46 PM	Helium MFC set to  0.000000
9/30/2011	12:09:46 PM	H2 MFC set to  0.000000
9/30/2011	12:09:46 PM	BCl3 MFC set to  0.000000
9/30/2011	12:09:46 PM	PHl3 MFC set to  0.000000
9/30/2011	12:09:46 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:09:46 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:09:46 PM	Tube furnace set to 0
9/30/2011	12:10:16 PM	H2 valve closed
9/30/2011	12:10:16 PM	BCl3 valve closed
9/30/2011	12:10:16 PM	PH3 valve closed
9/30/2011	12:10:16 PM	SiCl4 pre valve closed
9/30/2011	12:10:16 PM	SiCl4 post valve closed
9/30/2011	12:10:16 PM	Bypass valve closed
9/30/2011	12:10:16 PM	Bubbler valve closed
9/30/2011	12:10:16 PM	Helium valve opened
9/30/2011	12:10:16 PM	Main Vac valve opened
9/30/2011	12:10:16 PM	Helium MFC set to  20.000000
9/30/2011	12:10:16 PM	H2 MFC set to  0.000000
9/30/2011	12:10:16 PM	BCl3 MFC set to  0.000000
9/30/2011	12:10:16 PM	PHl3 MFC set to  0.000000
9/30/2011	12:10:16 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:10:16 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:10:17 PM	Tube furnace set to 0
9/30/2011	12:10:47 PM	Helium valve closed
9/30/2011	12:10:47 PM	H2 valve closed
9/30/2011	12:10:47 PM	BCl3 valve closed
9/30/2011	12:10:47 PM	PH3 valve closed
9/30/2011	12:10:47 PM	SiCl4 pre valve closed
9/30/2011	12:10:47 PM	SiCl4 post valve closed
9/30/2011	12:10:47 PM	Bypass valve closed
9/30/2011	12:10:47 PM	Bubbler valve closed
9/30/2011	12:10:47 PM	Main Vac valve opened
9/30/2011	12:10:47 PM	Helium MFC set to  0.000000
9/30/2011	12:10:47 PM	H2 MFC set to  0.000000
9/30/2011	12:10:47 PM	BCl3 MFC set to  0.000000
9/30/2011	12:10:47 PM	PHl3 MFC set to  0.000000
9/30/2011	12:10:47 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:10:47 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:10:47 PM	Tube furnace set to 0
9/30/2011	12:11:17 PM	H2 valve closed
9/30/2011	12:11:17 PM	BCl3 valve closed
9/30/2011	12:11:17 PM	PH3 valve closed
9/30/2011	12:11:17 PM	SiCl4 pre valve closed
9/30/2011	12:11:17 PM	SiCl4 post valve closed
9/30/2011	12:11:17 PM	Bypass valve closed
9/30/2011	12:11:17 PM	Bubbler valve closed
9/30/2011	12:11:17 PM	Helium valve opened
9/30/2011	12:11:17 PM	Main Vac valve opened
9/30/2011	12:11:17 PM	Helium MFC set to  20.000000
9/30/2011	12:11:17 PM	H2 MFC set to  0.000000
9/30/2011	12:11:17 PM	BCl3 MFC set to  0.000000
9/30/2011	12:11:17 PM	PHl3 MFC set to  0.000000
9/30/2011	12:11:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:11:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:11:17 PM	Tube furnace set to 0
9/30/2011	12:11:47 PM	Helium valve closed
9/30/2011	12:11:47 PM	H2 valve closed
9/30/2011	12:11:47 PM	BCl3 valve closed
9/30/2011	12:11:47 PM	PH3 valve closed
9/30/2011	12:11:47 PM	SiCl4 pre valve closed
9/30/2011	12:11:47 PM	SiCl4 post valve closed
9/30/2011	12:11:47 PM	Bypass valve closed
9/30/2011	12:11:47 PM	Bubbler valve closed
9/30/2011	12:11:47 PM	Main Vac valve opened
9/30/2011	12:11:47 PM	Helium MFC set to  0.000000
9/30/2011	12:11:47 PM	H2 MFC set to  0.000000
9/30/2011	12:11:47 PM	BCl3 MFC set to  0.000000
9/30/2011	12:11:47 PM	PHl3 MFC set to  0.000000
9/30/2011	12:11:47 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:11:47 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:11:47 PM	Tube furnace set to 0
9/30/2011	12:12:17 PM	H2 valve closed
9/30/2011	12:12:17 PM	BCl3 valve closed
9/30/2011	12:12:17 PM	PH3 valve closed
9/30/2011	12:12:17 PM	SiCl4 pre valve closed
9/30/2011	12:12:17 PM	SiCl4 post valve closed
9/30/2011	12:12:17 PM	Bypass valve closed
9/30/2011	12:12:17 PM	Bubbler valve closed
9/30/2011	12:12:17 PM	Helium valve opened
9/30/2011	12:12:17 PM	Main Vac valve opened
9/30/2011	12:12:17 PM	Helium MFC set to  20.000000
9/30/2011	12:12:17 PM	H2 MFC set to  0.000000
9/30/2011	12:12:17 PM	BCl3 MFC set to  0.000000
9/30/2011	12:12:17 PM	PHl3 MFC set to  0.000000
9/30/2011	12:12:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:12:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:12:17 PM	Tube furnace set to 0
9/30/2011	12:12:47 PM	Helium valve closed
9/30/2011	12:12:47 PM	H2 valve closed
9/30/2011	12:12:47 PM	BCl3 valve closed
9/30/2011	12:12:47 PM	PH3 valve closed
9/30/2011	12:12:47 PM	SiCl4 pre valve closed
9/30/2011	12:12:47 PM	SiCl4 post valve closed
9/30/2011	12:12:47 PM	Bypass valve closed
9/30/2011	12:12:47 PM	Bubbler valve closed
9/30/2011	12:12:47 PM	Main Vac valve opened
9/30/2011	12:12:47 PM	Helium MFC set to  0.000000
9/30/2011	12:12:47 PM	H2 MFC set to  0.000000
9/30/2011	12:12:47 PM	BCl3 MFC set to  0.000000
9/30/2011	12:12:47 PM	PHl3 MFC set to  0.000000
9/30/2011	12:12:47 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:12:47 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:12:48 PM	Tube furnace set to 0
9/30/2011	12:13:18 PM	H2 valve closed
9/30/2011	12:13:18 PM	BCl3 valve closed
9/30/2011	12:13:18 PM	PH3 valve closed
9/30/2011	12:13:18 PM	SiCl4 pre valve closed
9/30/2011	12:13:18 PM	SiCl4 post valve closed
9/30/2011	12:13:18 PM	Bypass valve closed
9/30/2011	12:13:18 PM	Bubbler valve closed
9/30/2011	12:13:18 PM	Helium valve opened
9/30/2011	12:13:18 PM	Main Vac valve opened
9/30/2011	12:13:18 PM	Helium MFC set to  20.000000
9/30/2011	12:13:18 PM	H2 MFC set to  0.000000
9/30/2011	12:13:18 PM	BCl3 MFC set to  0.000000
9/30/2011	12:13:18 PM	PHl3 MFC set to  0.000000
9/30/2011	12:13:18 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:13:18 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:13:18 PM	Tube furnace set to 0
9/30/2011	12:13:48 PM	Helium valve closed
9/30/2011	12:13:48 PM	H2 valve closed
9/30/2011	12:13:48 PM	BCl3 valve closed
9/30/2011	12:13:48 PM	PH3 valve closed
9/30/2011	12:13:48 PM	SiCl4 pre valve closed
9/30/2011	12:13:48 PM	SiCl4 post valve closed
9/30/2011	12:13:48 PM	Bypass valve closed
9/30/2011	12:13:48 PM	Bubbler valve closed
9/30/2011	12:13:48 PM	Main Vac valve opened
9/30/2011	12:13:48 PM	Helium MFC set to  0.000000
9/30/2011	12:13:48 PM	H2 MFC set to  0.000000
9/30/2011	12:13:48 PM	BCl3 MFC set to  0.000000
9/30/2011	12:13:48 PM	PHl3 MFC set to  0.000000
9/30/2011	12:13:48 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:13:48 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:13:48 PM	Tube furnace set to 0
9/30/2011	12:14:18 PM	H2 valve closed
9/30/2011	12:14:18 PM	BCl3 valve closed
9/30/2011	12:14:18 PM	PH3 valve closed
9/30/2011	12:14:18 PM	SiCl4 pre valve closed
9/30/2011	12:14:18 PM	SiCl4 post valve closed
9/30/2011	12:14:18 PM	Bypass valve closed
9/30/2011	12:14:18 PM	Bubbler valve closed
9/30/2011	12:14:18 PM	Helium valve opened
9/30/2011	12:14:18 PM	Main Vac valve opened
9/30/2011	12:14:18 PM	Helium MFC set to  20.000000
9/30/2011	12:14:18 PM	H2 MFC set to  0.000000
9/30/2011	12:14:18 PM	BCl3 MFC set to  0.000000
9/30/2011	12:14:18 PM	PHl3 MFC set to  0.000000
9/30/2011	12:14:18 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:14:18 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:14:18 PM	Tube furnace set to 0
9/30/2011	12:14:48 PM	Helium valve closed
9/30/2011	12:14:48 PM	H2 valve closed
9/30/2011	12:14:48 PM	BCl3 valve closed
9/30/2011	12:14:48 PM	PH3 valve closed
9/30/2011	12:14:48 PM	SiCl4 pre valve closed
9/30/2011	12:14:48 PM	SiCl4 post valve closed
9/30/2011	12:14:48 PM	Bypass valve closed
9/30/2011	12:14:48 PM	Bubbler valve closed
9/30/2011	12:14:48 PM	Main Vac valve opened
9/30/2011	12:14:48 PM	Helium MFC set to  0.000000
9/30/2011	12:14:48 PM	H2 MFC set to  0.000000
9/30/2011	12:14:48 PM	BCl3 MFC set to  0.000000
9/30/2011	12:14:48 PM	PHl3 MFC set to  0.000000
9/30/2011	12:14:48 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:14:48 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:14:48 PM	Tube furnace set to 0
9/30/2011	12:15:18 PM	H2 valve closed
9/30/2011	12:15:18 PM	BCl3 valve closed
9/30/2011	12:15:18 PM	PH3 valve closed
9/30/2011	12:15:18 PM	SiCl4 pre valve closed
9/30/2011	12:15:18 PM	SiCl4 post valve closed
9/30/2011	12:15:18 PM	Bypass valve closed
9/30/2011	12:15:18 PM	Bubbler valve closed
9/30/2011	12:15:18 PM	Helium valve opened
9/30/2011	12:15:18 PM	Main Vac valve opened
9/30/2011	12:15:18 PM	Helium MFC set to  20.000000
9/30/2011	12:15:18 PM	H2 MFC set to  0.000000
9/30/2011	12:15:18 PM	BCl3 MFC set to  0.000000
9/30/2011	12:15:18 PM	PHl3 MFC set to  0.000000
9/30/2011	12:15:18 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:15:18 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:15:19 PM	Tube furnace set to 0
9/30/2011	12:15:49 PM	Helium valve closed
9/30/2011	12:15:49 PM	H2 valve closed
9/30/2011	12:15:49 PM	BCl3 valve closed
9/30/2011	12:15:49 PM	PH3 valve closed
9/30/2011	12:15:49 PM	SiCl4 pre valve closed
9/30/2011	12:15:49 PM	SiCl4 post valve closed
9/30/2011	12:15:49 PM	Bypass valve closed
9/30/2011	12:15:49 PM	Bubbler valve closed
9/30/2011	12:15:49 PM	Main Vac valve opened
9/30/2011	12:15:49 PM	Helium MFC set to  0.000000
9/30/2011	12:15:49 PM	H2 MFC set to  0.000000
9/30/2011	12:15:49 PM	BCl3 MFC set to  0.000000
9/30/2011	12:15:49 PM	PHl3 MFC set to  0.000000
9/30/2011	12:15:49 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:15:49 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:15:49 PM	Tube furnace set to 0
9/30/2011	12:16:19 PM	H2 valve closed
9/30/2011	12:16:19 PM	BCl3 valve closed
9/30/2011	12:16:19 PM	PH3 valve closed
9/30/2011	12:16:19 PM	SiCl4 pre valve closed
9/30/2011	12:16:19 PM	SiCl4 post valve closed
9/30/2011	12:16:19 PM	Bypass valve closed
9/30/2011	12:16:19 PM	Bubbler valve closed
9/30/2011	12:16:19 PM	Helium valve opened
9/30/2011	12:16:19 PM	Main Vac valve opened
9/30/2011	12:16:19 PM	Helium MFC set to  20.000000
9/30/2011	12:16:19 PM	H2 MFC set to  0.000000
9/30/2011	12:16:19 PM	BCl3 MFC set to  0.000000
9/30/2011	12:16:19 PM	PHl3 MFC set to  0.000000
9/30/2011	12:16:19 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:16:19 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:16:19 PM	Tube furnace set to 0
9/30/2011	12:16:49 PM	Helium valve closed
9/30/2011	12:16:49 PM	H2 valve closed
9/30/2011	12:16:49 PM	BCl3 valve closed
9/30/2011	12:16:49 PM	PH3 valve closed
9/30/2011	12:16:49 PM	SiCl4 pre valve closed
9/30/2011	12:16:49 PM	SiCl4 post valve closed
9/30/2011	12:16:49 PM	Bypass valve closed
9/30/2011	12:16:49 PM	Bubbler valve closed
9/30/2011	12:16:49 PM	Main Vac valve opened
9/30/2011	12:16:49 PM	Helium MFC set to  0.000000
9/30/2011	12:16:49 PM	H2 MFC set to  0.000000
9/30/2011	12:16:49 PM	BCl3 MFC set to  0.000000
9/30/2011	12:16:49 PM	PHl3 MFC set to  0.000000
9/30/2011	12:16:49 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:16:49 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:16:49 PM	Tube furnace set to 0
9/30/2011	12:17:07 PM	H2 valve closed
9/30/2011	12:17:07 PM	BCl3 valve closed
9/30/2011	12:17:07 PM	PH3 valve closed
9/30/2011	12:17:07 PM	SiCl4 pre valve closed
9/30/2011	12:17:07 PM	SiCl4 post valve closed
9/30/2011	12:17:07 PM	Bypass valve closed
9/30/2011	12:17:07 PM	Bubbler valve closed
9/30/2011	12:17:07 PM	Helium valve opened
9/30/2011	12:17:07 PM	Main Vac valve opened
9/30/2011	12:17:07 PM	Helium MFC set to  20.000000
9/30/2011	12:17:07 PM	H2 MFC set to  0.000000
9/30/2011	12:17:07 PM	BCl3 MFC set to  0.000000
9/30/2011	12:17:07 PM	PHl3 MFC set to  0.000000
9/30/2011	12:17:07 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:17:07 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:17:07 PM	Tube furnace set to 0
9/30/2011	12:17:10 PM	Run aborted at 12:17 PM
9/30/2011	12:17:10 PM	Helium valve closed
9/30/2011	12:17:10 PM	H2 valve closed
9/30/2011	12:17:10 PM	BCl3 valve closed
9/30/2011	12:17:10 PM	PH3 valve closed
9/30/2011	12:17:10 PM	SiCl4 pre valve closed
9/30/2011	12:17:10 PM	SiCl4 post valve closed
9/30/2011	12:17:10 PM	Bypass valve closed
9/30/2011	12:17:10 PM	Main Vac valve closed
9/30/2011	12:17:10 PM	Bubbler valve closed
9/30/2011	12:17:10 PM	Helium MFC set to  0.000000
9/30/2011	12:17:10 PM	H2 MFC set to  0.000000
9/30/2011	12:17:10 PM	BCl3 MFC set to  0.000000
9/30/2011	12:17:10 PM	PHl3 MFC set to  0.000000
9/30/2011	12:17:10 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:17:11 PM	Tube furnace set to 0
9/30/2011	12:17:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/30/2011	12:19:18 PM	Recipe started at 12:19 PM
9/30/2011	12:19:18 PM	Helium valve closed
9/30/2011	12:19:18 PM	H2 valve closed
9/30/2011	12:19:18 PM	BCl3 valve closed
9/30/2011	12:19:18 PM	PH3 valve closed
9/30/2011	12:19:18 PM	SiCl4 pre valve closed
9/30/2011	12:19:18 PM	SiCl4 post valve closed
9/30/2011	12:19:18 PM	Main Vac valve closed
9/30/2011	12:19:18 PM	Bubbler valve closed
9/30/2011	12:19:18 PM	Bypass valve opened
9/30/2011	12:19:18 PM	Helium MFC set to  0.000000
9/30/2011	12:19:18 PM	H2 MFC set to  0.000000
9/30/2011	12:19:18 PM	BCl3 MFC set to  0.000000
9/30/2011	12:19:18 PM	PHl3 MFC set to  0.000000
9/30/2011	12:19:18 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:19:18 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:19:19 PM	Tube furnace set to 150
9/30/2011	12:19:19 PM	Helium valve closed
9/30/2011	12:19:19 PM	H2 valve closed
9/30/2011	12:19:19 PM	BCl3 valve closed
9/30/2011	12:19:19 PM	PH3 valve closed
9/30/2011	12:19:19 PM	SiCl4 pre valve closed
9/30/2011	12:19:19 PM	SiCl4 post valve closed
9/30/2011	12:19:19 PM	Main Vac valve closed
9/30/2011	12:19:19 PM	Bubbler valve closed
9/30/2011	12:19:19 PM	Bypass valve opened
9/30/2011	12:19:19 PM	Helium MFC set to  0.000000
9/30/2011	12:19:19 PM	H2 MFC set to  0.000000
9/30/2011	12:19:19 PM	BCl3 MFC set to  0.000000
9/30/2011	12:19:19 PM	PHl3 MFC set to  0.000000
9/30/2011	12:19:19 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:19:19 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:19:19 PM	Tube furnace set to 150
9/30/2011	12:19:49 PM	Helium valve closed
9/30/2011	12:19:49 PM	H2 valve closed
9/30/2011	12:19:49 PM	BCl3 valve closed
9/30/2011	12:19:49 PM	PH3 valve closed
9/30/2011	12:19:49 PM	SiCl4 pre valve closed
9/30/2011	12:19:49 PM	SiCl4 post valve closed
9/30/2011	12:19:49 PM	Bypass valve closed
9/30/2011	12:19:49 PM	Bubbler valve closed
9/30/2011	12:19:49 PM	Main Vac valve opened
9/30/2011	12:19:49 PM	Helium MFC set to  0.000000
9/30/2011	12:19:49 PM	H2 MFC set to  0.000000
9/30/2011	12:19:49 PM	BCl3 MFC set to  0.000000
9/30/2011	12:19:49 PM	PHl3 MFC set to  0.000000
9/30/2011	12:19:49 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:19:49 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:19:49 PM	Tube furnace set to 150
9/30/2011	12:20:19 PM	H2 valve closed
9/30/2011	12:20:19 PM	BCl3 valve closed
9/30/2011	12:20:19 PM	PH3 valve closed
9/30/2011	12:20:19 PM	SiCl4 pre valve closed
9/30/2011	12:20:19 PM	SiCl4 post valve closed
9/30/2011	12:20:19 PM	Bypass valve closed
9/30/2011	12:20:19 PM	Bubbler valve closed
9/30/2011	12:20:19 PM	Helium valve opened
9/30/2011	12:20:19 PM	Main Vac valve opened
9/30/2011	12:20:19 PM	Helium MFC set to  20.000000
9/30/2011	12:20:19 PM	H2 MFC set to  0.000000
9/30/2011	12:20:19 PM	BCl3 MFC set to  0.000000
9/30/2011	12:20:19 PM	PHl3 MFC set to  0.000000
9/30/2011	12:20:19 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:20:19 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:20:19 PM	Tube furnace set to 150
9/30/2011	12:20:49 PM	Helium valve closed
9/30/2011	12:20:49 PM	H2 valve closed
9/30/2011	12:20:49 PM	BCl3 valve closed
9/30/2011	12:20:49 PM	PH3 valve closed
9/30/2011	12:20:49 PM	SiCl4 pre valve closed
9/30/2011	12:20:49 PM	SiCl4 post valve closed
9/30/2011	12:20:49 PM	Bypass valve closed
9/30/2011	12:20:49 PM	Bubbler valve closed
9/30/2011	12:20:49 PM	Main Vac valve opened
9/30/2011	12:20:49 PM	Helium MFC set to  0.000000
9/30/2011	12:20:49 PM	H2 MFC set to  0.000000
9/30/2011	12:20:49 PM	BCl3 MFC set to  0.000000
9/30/2011	12:20:49 PM	PHl3 MFC set to  0.000000
9/30/2011	12:20:49 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:20:49 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:20:50 PM	Tube furnace set to 150
9/30/2011	12:21:20 PM	H2 valve closed
9/30/2011	12:21:20 PM	BCl3 valve closed
9/30/2011	12:21:20 PM	PH3 valve closed
9/30/2011	12:21:20 PM	SiCl4 pre valve closed
9/30/2011	12:21:20 PM	SiCl4 post valve closed
9/30/2011	12:21:20 PM	Bypass valve closed
9/30/2011	12:21:20 PM	Bubbler valve closed
9/30/2011	12:21:20 PM	Helium valve opened
9/30/2011	12:21:20 PM	Main Vac valve opened
9/30/2011	12:21:20 PM	Helium MFC set to  20.000000
9/30/2011	12:21:20 PM	H2 MFC set to  0.000000
9/30/2011	12:21:20 PM	BCl3 MFC set to  0.000000
9/30/2011	12:21:20 PM	PHl3 MFC set to  0.000000
9/30/2011	12:21:20 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:21:20 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:21:20 PM	Tube furnace set to 150
9/30/2011	12:21:50 PM	Helium valve closed
9/30/2011	12:21:50 PM	H2 valve closed
9/30/2011	12:21:50 PM	BCl3 valve closed
9/30/2011	12:21:50 PM	PH3 valve closed
9/30/2011	12:21:50 PM	SiCl4 pre valve closed
9/30/2011	12:21:50 PM	SiCl4 post valve closed
9/30/2011	12:21:50 PM	Bypass valve closed
9/30/2011	12:21:50 PM	Bubbler valve closed
9/30/2011	12:21:50 PM	Main Vac valve opened
9/30/2011	12:21:50 PM	Helium MFC set to  0.000000
9/30/2011	12:21:50 PM	H2 MFC set to  0.000000
9/30/2011	12:21:50 PM	BCl3 MFC set to  0.000000
9/30/2011	12:21:50 PM	PHl3 MFC set to  0.000000
9/30/2011	12:21:50 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:21:50 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:21:50 PM	Tube furnace set to 150
9/30/2011	12:22:20 PM	H2 valve closed
9/30/2011	12:22:20 PM	BCl3 valve closed
9/30/2011	12:22:20 PM	PH3 valve closed
9/30/2011	12:22:20 PM	SiCl4 pre valve closed
9/30/2011	12:22:20 PM	SiCl4 post valve closed
9/30/2011	12:22:20 PM	Bypass valve closed
9/30/2011	12:22:20 PM	Bubbler valve closed
9/30/2011	12:22:20 PM	Helium valve opened
9/30/2011	12:22:20 PM	Main Vac valve opened
9/30/2011	12:22:20 PM	Helium MFC set to  20.000000
9/30/2011	12:22:20 PM	H2 MFC set to  0.000000
9/30/2011	12:22:20 PM	BCl3 MFC set to  0.000000
9/30/2011	12:22:20 PM	PHl3 MFC set to  0.000000
9/30/2011	12:22:20 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:22:20 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:22:20 PM	Tube furnace set to 150
9/30/2011	12:22:50 PM	Helium valve closed
9/30/2011	12:22:50 PM	H2 valve closed
9/30/2011	12:22:50 PM	BCl3 valve closed
9/30/2011	12:22:50 PM	PH3 valve closed
9/30/2011	12:22:50 PM	SiCl4 pre valve closed
9/30/2011	12:22:50 PM	SiCl4 post valve closed
9/30/2011	12:22:50 PM	Bypass valve closed
9/30/2011	12:22:50 PM	Bubbler valve closed
9/30/2011	12:22:50 PM	Main Vac valve opened
9/30/2011	12:22:50 PM	Helium MFC set to  0.000000
9/30/2011	12:22:50 PM	H2 MFC set to  0.000000
9/30/2011	12:22:50 PM	BCl3 MFC set to  0.000000
9/30/2011	12:22:50 PM	PHl3 MFC set to  0.000000
9/30/2011	12:22:50 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:22:50 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:22:50 PM	Tube furnace set to 150
9/30/2011	12:23:20 PM	H2 valve closed
9/30/2011	12:23:20 PM	BCl3 valve closed
9/30/2011	12:23:20 PM	PH3 valve closed
9/30/2011	12:23:21 PM	SiCl4 pre valve closed
9/30/2011	12:23:21 PM	SiCl4 post valve closed
9/30/2011	12:23:21 PM	Bypass valve closed
9/30/2011	12:23:21 PM	Bubbler valve closed
9/30/2011	12:23:21 PM	Helium valve opened
9/30/2011	12:23:21 PM	Main Vac valve opened
9/30/2011	12:23:21 PM	Helium MFC set to  20.000000
9/30/2011	12:23:21 PM	H2 MFC set to  0.000000
9/30/2011	12:23:21 PM	BCl3 MFC set to  0.000000
9/30/2011	12:23:21 PM	PHl3 MFC set to  0.000000
9/30/2011	12:23:21 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:23:21 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:23:21 PM	Tube furnace set to 150
9/30/2011	12:23:51 PM	Helium valve closed
9/30/2011	12:23:51 PM	H2 valve closed
9/30/2011	12:23:51 PM	BCl3 valve closed
9/30/2011	12:23:51 PM	PH3 valve closed
9/30/2011	12:23:51 PM	SiCl4 pre valve closed
9/30/2011	12:23:51 PM	SiCl4 post valve closed
9/30/2011	12:23:51 PM	Bypass valve closed
9/30/2011	12:23:51 PM	Bubbler valve closed
9/30/2011	12:23:51 PM	Main Vac valve opened
9/30/2011	12:23:51 PM	Helium MFC set to  0.000000
9/30/2011	12:23:51 PM	H2 MFC set to  0.000000
9/30/2011	12:23:51 PM	BCl3 MFC set to  0.000000
9/30/2011	12:23:51 PM	PHl3 MFC set to  0.000000
9/30/2011	12:23:51 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:23:51 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:23:51 PM	Tube furnace set to 150
9/30/2011	12:24:21 PM	H2 valve closed
9/30/2011	12:24:21 PM	BCl3 valve closed
9/30/2011	12:24:21 PM	PH3 valve closed
9/30/2011	12:24:21 PM	SiCl4 pre valve closed
9/30/2011	12:24:21 PM	SiCl4 post valve closed
9/30/2011	12:24:21 PM	Bypass valve closed
9/30/2011	12:24:21 PM	Bubbler valve closed
9/30/2011	12:24:21 PM	Helium valve opened
9/30/2011	12:24:21 PM	Main Vac valve opened
9/30/2011	12:24:21 PM	Helium MFC set to  20.000000
9/30/2011	12:24:21 PM	H2 MFC set to  0.000000
9/30/2011	12:24:21 PM	BCl3 MFC set to  0.000000
9/30/2011	12:24:21 PM	PHl3 MFC set to  0.000000
9/30/2011	12:24:21 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:24:21 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:24:21 PM	Tube furnace set to 150
9/30/2011	12:24:51 PM	Helium valve closed
9/30/2011	12:24:51 PM	H2 valve closed
9/30/2011	12:24:51 PM	BCl3 valve closed
9/30/2011	12:24:51 PM	PH3 valve closed
9/30/2011	12:24:51 PM	SiCl4 pre valve closed
9/30/2011	12:24:51 PM	SiCl4 post valve closed
9/30/2011	12:24:51 PM	Bypass valve closed
9/30/2011	12:24:51 PM	Bubbler valve closed
9/30/2011	12:24:51 PM	Main Vac valve opened
9/30/2011	12:24:51 PM	Helium MFC set to  0.000000
9/30/2011	12:24:51 PM	H2 MFC set to  0.000000
9/30/2011	12:24:51 PM	BCl3 MFC set to  0.000000
9/30/2011	12:24:51 PM	PHl3 MFC set to  0.000000
9/30/2011	12:24:51 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:24:51 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:24:51 PM	Tube furnace set to 150
9/30/2011	12:25:21 PM	H2 valve closed
9/30/2011	12:25:21 PM	BCl3 valve closed
9/30/2011	12:25:21 PM	PH3 valve closed
9/30/2011	12:25:21 PM	SiCl4 pre valve closed
9/30/2011	12:25:21 PM	SiCl4 post valve closed
9/30/2011	12:25:21 PM	Bypass valve closed
9/30/2011	12:25:21 PM	Bubbler valve closed
9/30/2011	12:25:21 PM	Helium valve opened
9/30/2011	12:25:21 PM	Main Vac valve opened
9/30/2011	12:25:21 PM	Helium MFC set to  20.000000
9/30/2011	12:25:21 PM	H2 MFC set to  0.000000
9/30/2011	12:25:21 PM	BCl3 MFC set to  0.000000
9/30/2011	12:25:21 PM	PHl3 MFC set to  0.000000
9/30/2011	12:25:21 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:25:21 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:25:22 PM	Tube furnace set to 150
9/30/2011	12:25:52 PM	Helium valve closed
9/30/2011	12:25:52 PM	H2 valve closed
9/30/2011	12:25:52 PM	BCl3 valve closed
9/30/2011	12:25:52 PM	PH3 valve closed
9/30/2011	12:25:52 PM	SiCl4 pre valve closed
9/30/2011	12:25:52 PM	SiCl4 post valve closed
9/30/2011	12:25:52 PM	Bypass valve closed
9/30/2011	12:25:52 PM	Bubbler valve closed
9/30/2011	12:25:52 PM	Main Vac valve opened
9/30/2011	12:25:52 PM	Helium MFC set to  0.000000
9/30/2011	12:25:52 PM	H2 MFC set to  0.000000
9/30/2011	12:25:52 PM	BCl3 MFC set to  0.000000
9/30/2011	12:25:52 PM	PHl3 MFC set to  0.000000
9/30/2011	12:25:52 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:25:52 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:25:52 PM	Tube furnace set to 150
9/30/2011	12:26:22 PM	H2 valve closed
9/30/2011	12:26:22 PM	BCl3 valve closed
9/30/2011	12:26:22 PM	PH3 valve closed
9/30/2011	12:26:22 PM	SiCl4 pre valve closed
9/30/2011	12:26:22 PM	SiCl4 post valve closed
9/30/2011	12:26:22 PM	Bypass valve closed
9/30/2011	12:26:22 PM	Bubbler valve closed
9/30/2011	12:26:22 PM	Helium valve opened
9/30/2011	12:26:22 PM	Main Vac valve opened
9/30/2011	12:26:22 PM	Helium MFC set to  20.000000
9/30/2011	12:26:22 PM	H2 MFC set to  0.000000
9/30/2011	12:26:22 PM	BCl3 MFC set to  0.000000
9/30/2011	12:26:22 PM	PHl3 MFC set to  0.000000
9/30/2011	12:26:22 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:26:22 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:26:22 PM	Tube furnace set to 150
9/30/2011	12:26:52 PM	Helium valve closed
9/30/2011	12:26:52 PM	H2 valve closed
9/30/2011	12:26:52 PM	BCl3 valve closed
9/30/2011	12:26:52 PM	PH3 valve closed
9/30/2011	12:26:52 PM	SiCl4 pre valve closed
9/30/2011	12:26:52 PM	SiCl4 post valve closed
9/30/2011	12:26:52 PM	Bypass valve closed
9/30/2011	12:26:52 PM	Bubbler valve closed
9/30/2011	12:26:52 PM	Main Vac valve opened
9/30/2011	12:26:52 PM	Helium MFC set to  0.000000
9/30/2011	12:26:52 PM	H2 MFC set to  0.000000
9/30/2011	12:26:52 PM	BCl3 MFC set to  0.000000
9/30/2011	12:26:52 PM	PHl3 MFC set to  0.000000
9/30/2011	12:26:52 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:26:52 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:26:52 PM	Tube furnace set to 150
9/30/2011	12:27:22 PM	H2 valve closed
9/30/2011	12:27:22 PM	BCl3 valve closed
9/30/2011	12:27:22 PM	PH3 valve closed
9/30/2011	12:27:22 PM	SiCl4 pre valve closed
9/30/2011	12:27:22 PM	SiCl4 post valve closed
9/30/2011	12:27:22 PM	Bypass valve closed
9/30/2011	12:27:22 PM	Bubbler valve closed
9/30/2011	12:27:22 PM	Helium valve opened
9/30/2011	12:27:22 PM	Main Vac valve opened
9/30/2011	12:27:22 PM	Helium MFC set to  20.000000
9/30/2011	12:27:22 PM	H2 MFC set to  0.000000
9/30/2011	12:27:22 PM	BCl3 MFC set to  0.000000
9/30/2011	12:27:22 PM	PHl3 MFC set to  0.000000
9/30/2011	12:27:22 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:27:22 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:27:22 PM	Tube furnace set to 150
9/30/2011	12:27:52 PM	Helium valve closed
9/30/2011	12:27:52 PM	H2 valve closed
9/30/2011	12:27:52 PM	BCl3 valve closed
9/30/2011	12:27:52 PM	PH3 valve closed
9/30/2011	12:27:52 PM	SiCl4 pre valve closed
9/30/2011	12:27:52 PM	SiCl4 post valve closed
9/30/2011	12:27:52 PM	Bypass valve closed
9/30/2011	12:27:52 PM	Bubbler valve closed
9/30/2011	12:27:52 PM	Main Vac valve opened
9/30/2011	12:27:52 PM	Helium MFC set to  0.000000
9/30/2011	12:27:52 PM	H2 MFC set to  0.000000
9/30/2011	12:27:52 PM	BCl3 MFC set to  0.000000
9/30/2011	12:27:52 PM	PHl3 MFC set to  0.000000
9/30/2011	12:27:52 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:27:52 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:27:53 PM	Tube furnace set to 150
9/30/2011	12:28:23 PM	H2 valve closed
9/30/2011	12:28:23 PM	BCl3 valve closed
9/30/2011	12:28:23 PM	PH3 valve closed
9/30/2011	12:28:23 PM	SiCl4 pre valve closed
9/30/2011	12:28:23 PM	SiCl4 post valve closed
9/30/2011	12:28:23 PM	Bypass valve closed
9/30/2011	12:28:23 PM	Bubbler valve closed
9/30/2011	12:28:23 PM	Helium valve opened
9/30/2011	12:28:23 PM	Main Vac valve opened
9/30/2011	12:28:23 PM	Helium MFC set to  20.000000
9/30/2011	12:28:23 PM	H2 MFC set to  0.000000
9/30/2011	12:28:23 PM	BCl3 MFC set to  0.000000
9/30/2011	12:28:23 PM	PHl3 MFC set to  0.000000
9/30/2011	12:28:23 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:28:23 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:28:23 PM	Tube furnace set to 150
9/30/2011	12:28:53 PM	Helium valve closed
9/30/2011	12:28:53 PM	H2 valve closed
9/30/2011	12:28:53 PM	BCl3 valve closed
9/30/2011	12:28:53 PM	PH3 valve closed
9/30/2011	12:28:53 PM	SiCl4 pre valve closed
9/30/2011	12:28:53 PM	SiCl4 post valve closed
9/30/2011	12:28:53 PM	Bypass valve closed
9/30/2011	12:28:53 PM	Bubbler valve closed
9/30/2011	12:28:53 PM	Main Vac valve opened
9/30/2011	12:28:53 PM	Helium MFC set to  0.000000
9/30/2011	12:28:53 PM	H2 MFC set to  0.000000
9/30/2011	12:28:53 PM	BCl3 MFC set to  0.000000
9/30/2011	12:28:53 PM	PHl3 MFC set to  0.000000
9/30/2011	12:28:53 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:28:53 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:28:53 PM	Tube furnace set to 150
9/30/2011	12:29:23 PM	H2 valve closed
9/30/2011	12:29:23 PM	BCl3 valve closed
9/30/2011	12:29:23 PM	PH3 valve closed
9/30/2011	12:29:23 PM	SiCl4 pre valve closed
9/30/2011	12:29:23 PM	SiCl4 post valve closed
9/30/2011	12:29:23 PM	Bypass valve closed
9/30/2011	12:29:23 PM	Bubbler valve closed
9/30/2011	12:29:23 PM	Helium valve opened
9/30/2011	12:29:23 PM	Main Vac valve opened
9/30/2011	12:29:23 PM	Helium MFC set to  20.000000
9/30/2011	12:29:23 PM	H2 MFC set to  0.000000
9/30/2011	12:29:23 PM	BCl3 MFC set to  0.000000
9/30/2011	12:29:23 PM	PHl3 MFC set to  0.000000
9/30/2011	12:29:23 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:29:23 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:29:23 PM	Tube furnace set to 150
9/30/2011	12:29:53 PM	Helium valve closed
9/30/2011	12:29:53 PM	H2 valve closed
9/30/2011	12:29:53 PM	BCl3 valve closed
9/30/2011	12:29:53 PM	PH3 valve closed
9/30/2011	12:29:53 PM	SiCl4 pre valve closed
9/30/2011	12:29:53 PM	SiCl4 post valve closed
9/30/2011	12:29:53 PM	Bypass valve closed
9/30/2011	12:29:53 PM	Bubbler valve closed
9/30/2011	12:29:53 PM	Main Vac valve opened
9/30/2011	12:29:53 PM	Helium MFC set to  0.000000
9/30/2011	12:29:53 PM	H2 MFC set to  0.000000
9/30/2011	12:29:53 PM	BCl3 MFC set to  0.000000
9/30/2011	12:29:53 PM	PHl3 MFC set to  0.000000
9/30/2011	12:29:53 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:29:53 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:29:53 PM	Tube furnace set to 150
9/30/2011	12:30:23 PM	H2 valve closed
9/30/2011	12:30:23 PM	BCl3 valve closed
9/30/2011	12:30:23 PM	PH3 valve closed
9/30/2011	12:30:23 PM	SiCl4 pre valve closed
9/30/2011	12:30:23 PM	SiCl4 post valve closed
9/30/2011	12:30:23 PM	Bypass valve closed
9/30/2011	12:30:23 PM	Bubbler valve closed
9/30/2011	12:30:23 PM	Helium valve opened
9/30/2011	12:30:23 PM	Main Vac valve opened
9/30/2011	12:30:23 PM	Helium MFC set to  20.000000
9/30/2011	12:30:23 PM	H2 MFC set to  0.000000
9/30/2011	12:30:23 PM	BCl3 MFC set to  0.000000
9/30/2011	12:30:23 PM	PHl3 MFC set to  0.000000
9/30/2011	12:30:23 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:30:23 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:30:24 PM	Tube furnace set to 150
9/30/2011	12:30:54 PM	Helium valve closed
9/30/2011	12:30:54 PM	H2 valve closed
9/30/2011	12:30:54 PM	BCl3 valve closed
9/30/2011	12:30:54 PM	PH3 valve closed
9/30/2011	12:30:54 PM	SiCl4 pre valve closed
9/30/2011	12:30:54 PM	SiCl4 post valve closed
9/30/2011	12:30:54 PM	Bypass valve closed
9/30/2011	12:30:54 PM	Bubbler valve closed
9/30/2011	12:30:54 PM	Main Vac valve opened
9/30/2011	12:30:54 PM	Helium MFC set to  0.000000
9/30/2011	12:30:54 PM	H2 MFC set to  0.000000
9/30/2011	12:30:54 PM	BCl3 MFC set to  0.000000
9/30/2011	12:30:54 PM	PHl3 MFC set to  0.000000
9/30/2011	12:30:54 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:30:54 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:30:54 PM	Tube furnace set to 150
9/30/2011	12:31:24 PM	H2 valve closed
9/30/2011	12:31:24 PM	BCl3 valve closed
9/30/2011	12:31:24 PM	PH3 valve closed
9/30/2011	12:31:24 PM	SiCl4 pre valve closed
9/30/2011	12:31:24 PM	SiCl4 post valve closed
9/30/2011	12:31:24 PM	Bypass valve closed
9/30/2011	12:31:24 PM	Bubbler valve closed
9/30/2011	12:31:24 PM	Helium valve opened
9/30/2011	12:31:24 PM	Main Vac valve opened
9/30/2011	12:31:24 PM	Helium MFC set to  20.000000
9/30/2011	12:31:24 PM	H2 MFC set to  0.000000
9/30/2011	12:31:24 PM	BCl3 MFC set to  0.000000
9/30/2011	12:31:24 PM	PHl3 MFC set to  0.000000
9/30/2011	12:31:24 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:31:24 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:31:24 PM	Tube furnace set to 150
9/30/2011	12:31:54 PM	Helium valve closed
9/30/2011	12:31:54 PM	H2 valve closed
9/30/2011	12:31:54 PM	BCl3 valve closed
9/30/2011	12:31:54 PM	PH3 valve closed
9/30/2011	12:31:54 PM	SiCl4 pre valve closed
9/30/2011	12:31:54 PM	SiCl4 post valve closed
9/30/2011	12:31:54 PM	Bypass valve closed
9/30/2011	12:31:54 PM	Bubbler valve closed
9/30/2011	12:31:54 PM	Main Vac valve opened
9/30/2011	12:31:54 PM	Helium MFC set to  0.000000
9/30/2011	12:31:54 PM	H2 MFC set to  0.000000
9/30/2011	12:31:54 PM	BCl3 MFC set to  0.000000
9/30/2011	12:31:54 PM	PHl3 MFC set to  0.000000
9/30/2011	12:31:54 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:31:54 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:31:54 PM	Tube furnace set to 150
9/30/2011	12:32:24 PM	H2 valve closed
9/30/2011	12:32:24 PM	BCl3 valve closed
9/30/2011	12:32:24 PM	PH3 valve closed
9/30/2011	12:32:24 PM	SiCl4 pre valve closed
9/30/2011	12:32:24 PM	SiCl4 post valve closed
9/30/2011	12:32:24 PM	Bypass valve closed
9/30/2011	12:32:24 PM	Bubbler valve closed
9/30/2011	12:32:24 PM	Helium valve opened
9/30/2011	12:32:24 PM	Main Vac valve opened
9/30/2011	12:32:24 PM	Helium MFC set to  20.000000
9/30/2011	12:32:24 PM	H2 MFC set to  0.000000
9/30/2011	12:32:24 PM	BCl3 MFC set to  0.000000
9/30/2011	12:32:24 PM	PHl3 MFC set to  0.000000
9/30/2011	12:32:24 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:32:24 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:32:24 PM	Tube furnace set to 150
9/30/2011	12:32:54 PM	Helium valve closed
9/30/2011	12:32:54 PM	H2 valve closed
9/30/2011	12:32:54 PM	BCl3 valve closed
9/30/2011	12:32:54 PM	PH3 valve closed
9/30/2011	12:32:54 PM	SiCl4 pre valve closed
9/30/2011	12:32:54 PM	SiCl4 post valve closed
9/30/2011	12:32:54 PM	Bypass valve closed
9/30/2011	12:32:54 PM	Bubbler valve closed
9/30/2011	12:32:54 PM	Main Vac valve opened
9/30/2011	12:32:54 PM	Helium MFC set to  0.000000
9/30/2011	12:32:54 PM	H2 MFC set to  0.000000
9/30/2011	12:32:54 PM	BCl3 MFC set to  0.000000
9/30/2011	12:32:54 PM	PHl3 MFC set to  0.000000
9/30/2011	12:32:54 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:32:54 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:32:55 PM	Tube furnace set to 150
9/30/2011	12:33:25 PM	H2 valve closed
9/30/2011	12:33:25 PM	BCl3 valve closed
9/30/2011	12:33:25 PM	PH3 valve closed
9/30/2011	12:33:25 PM	SiCl4 pre valve closed
9/30/2011	12:33:25 PM	SiCl4 post valve closed
9/30/2011	12:33:25 PM	Bypass valve closed
9/30/2011	12:33:25 PM	Bubbler valve closed
9/30/2011	12:33:25 PM	Helium valve opened
9/30/2011	12:33:25 PM	Main Vac valve opened
9/30/2011	12:33:25 PM	Helium MFC set to  20.000000
9/30/2011	12:33:25 PM	H2 MFC set to  0.000000
9/30/2011	12:33:25 PM	BCl3 MFC set to  0.000000
9/30/2011	12:33:25 PM	PHl3 MFC set to  0.000000
9/30/2011	12:33:25 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:33:25 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:33:25 PM	Tube furnace set to 150
9/30/2011	12:33:55 PM	Helium valve closed
9/30/2011	12:33:55 PM	H2 valve closed
9/30/2011	12:33:55 PM	BCl3 valve closed
9/30/2011	12:33:55 PM	PH3 valve closed
9/30/2011	12:33:55 PM	SiCl4 pre valve closed
9/30/2011	12:33:55 PM	SiCl4 post valve closed
9/30/2011	12:33:55 PM	Bypass valve closed
9/30/2011	12:33:55 PM	Bubbler valve closed
9/30/2011	12:33:55 PM	Main Vac valve opened
9/30/2011	12:33:55 PM	Helium MFC set to  0.000000
9/30/2011	12:33:55 PM	H2 MFC set to  0.000000
9/30/2011	12:33:55 PM	BCl3 MFC set to  0.000000
9/30/2011	12:33:55 PM	PHl3 MFC set to  0.000000
9/30/2011	12:33:55 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:33:55 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:33:55 PM	Tube furnace set to 150
9/30/2011	12:34:25 PM	H2 valve closed
9/30/2011	12:34:25 PM	BCl3 valve closed
9/30/2011	12:34:25 PM	PH3 valve closed
9/30/2011	12:34:25 PM	SiCl4 pre valve closed
9/30/2011	12:34:25 PM	SiCl4 post valve closed
9/30/2011	12:34:25 PM	Bypass valve closed
9/30/2011	12:34:25 PM	Bubbler valve closed
9/30/2011	12:34:25 PM	Helium valve opened
9/30/2011	12:34:25 PM	Main Vac valve opened
9/30/2011	12:34:25 PM	Helium MFC set to  20.000000
9/30/2011	12:34:25 PM	H2 MFC set to  0.000000
9/30/2011	12:34:25 PM	BCl3 MFC set to  0.000000
9/30/2011	12:34:25 PM	PHl3 MFC set to  0.000000
9/30/2011	12:34:25 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:34:25 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:34:25 PM	Tube furnace set to 150
9/30/2011	12:34:55 PM	Helium valve closed
9/30/2011	12:34:55 PM	H2 valve closed
9/30/2011	12:34:55 PM	BCl3 valve closed
9/30/2011	12:34:55 PM	PH3 valve closed
9/30/2011	12:34:55 PM	SiCl4 pre valve closed
9/30/2011	12:34:55 PM	SiCl4 post valve closed
9/30/2011	12:34:55 PM	Bypass valve closed
9/30/2011	12:34:55 PM	Bubbler valve closed
9/30/2011	12:34:55 PM	Main Vac valve opened
9/30/2011	12:34:55 PM	Helium MFC set to  0.000000
9/30/2011	12:34:55 PM	H2 MFC set to  0.000000
9/30/2011	12:34:55 PM	BCl3 MFC set to  0.000000
9/30/2011	12:34:55 PM	PHl3 MFC set to  0.000000
9/30/2011	12:34:55 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:34:55 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:34:55 PM	Tube furnace set to 150
9/30/2011	12:35:26 PM	H2 valve closed
9/30/2011	12:35:26 PM	BCl3 valve closed
9/30/2011	12:35:26 PM	PH3 valve closed
9/30/2011	12:35:26 PM	SiCl4 pre valve closed
9/30/2011	12:35:26 PM	SiCl4 post valve closed
9/30/2011	12:35:26 PM	Bypass valve closed
9/30/2011	12:35:26 PM	Bubbler valve closed
9/30/2011	12:35:26 PM	Helium valve opened
9/30/2011	12:35:26 PM	Main Vac valve opened
9/30/2011	12:35:26 PM	Helium MFC set to  20.000000
9/30/2011	12:35:26 PM	H2 MFC set to  0.000000
9/30/2011	12:35:26 PM	BCl3 MFC set to  0.000000
9/30/2011	12:35:26 PM	PHl3 MFC set to  0.000000
9/30/2011	12:35:26 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:35:26 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:35:26 PM	Tube furnace set to 150
9/30/2011	12:35:56 PM	Helium valve closed
9/30/2011	12:35:56 PM	H2 valve closed
9/30/2011	12:35:56 PM	BCl3 valve closed
9/30/2011	12:35:56 PM	PH3 valve closed
9/30/2011	12:35:56 PM	SiCl4 pre valve closed
9/30/2011	12:35:56 PM	SiCl4 post valve closed
9/30/2011	12:35:56 PM	Bypass valve closed
9/30/2011	12:35:56 PM	Bubbler valve closed
9/30/2011	12:35:56 PM	Main Vac valve opened
9/30/2011	12:35:56 PM	Helium MFC set to  0.000000
9/30/2011	12:35:56 PM	H2 MFC set to  0.000000
9/30/2011	12:35:56 PM	BCl3 MFC set to  0.000000
9/30/2011	12:35:56 PM	PHl3 MFC set to  0.000000
9/30/2011	12:35:56 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:35:56 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:35:56 PM	Tube furnace set to 150
9/30/2011	12:36:26 PM	H2 valve closed
9/30/2011	12:36:26 PM	BCl3 valve closed
9/30/2011	12:36:26 PM	PH3 valve closed
9/30/2011	12:36:26 PM	SiCl4 pre valve closed
9/30/2011	12:36:26 PM	SiCl4 post valve closed
9/30/2011	12:36:26 PM	Bypass valve closed
9/30/2011	12:36:26 PM	Bubbler valve closed
9/30/2011	12:36:26 PM	Helium valve opened
9/30/2011	12:36:26 PM	Main Vac valve opened
9/30/2011	12:36:26 PM	Helium MFC set to  20.000000
9/30/2011	12:36:26 PM	H2 MFC set to  0.000000
9/30/2011	12:36:26 PM	BCl3 MFC set to  0.000000
9/30/2011	12:36:26 PM	PHl3 MFC set to  0.000000
9/30/2011	12:36:26 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:36:26 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:36:26 PM	Tube furnace set to 150
9/30/2011	12:36:56 PM	Helium valve closed
9/30/2011	12:36:56 PM	H2 valve closed
9/30/2011	12:36:56 PM	BCl3 valve closed
9/30/2011	12:36:56 PM	PH3 valve closed
9/30/2011	12:36:56 PM	SiCl4 pre valve closed
9/30/2011	12:36:56 PM	SiCl4 post valve closed
9/30/2011	12:36:56 PM	Bypass valve closed
9/30/2011	12:36:56 PM	Bubbler valve closed
9/30/2011	12:36:56 PM	Main Vac valve opened
9/30/2011	12:36:56 PM	Helium MFC set to  0.000000
9/30/2011	12:36:56 PM	H2 MFC set to  0.000000
9/30/2011	12:36:56 PM	BCl3 MFC set to  0.000000
9/30/2011	12:36:56 PM	PHl3 MFC set to  0.000000
9/30/2011	12:36:56 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:36:56 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:36:56 PM	Tube furnace set to 150
9/30/2011	12:37:26 PM	H2 valve closed
9/30/2011	12:37:26 PM	BCl3 valve closed
9/30/2011	12:37:26 PM	PH3 valve closed
9/30/2011	12:37:26 PM	SiCl4 pre valve closed
9/30/2011	12:37:26 PM	SiCl4 post valve closed
9/30/2011	12:37:26 PM	Bypass valve closed
9/30/2011	12:37:26 PM	Bubbler valve closed
9/30/2011	12:37:26 PM	Helium valve opened
9/30/2011	12:37:26 PM	Main Vac valve opened
9/30/2011	12:37:26 PM	Helium MFC set to  20.000000
9/30/2011	12:37:26 PM	H2 MFC set to  0.000000
9/30/2011	12:37:26 PM	BCl3 MFC set to  0.000000
9/30/2011	12:37:26 PM	PHl3 MFC set to  0.000000
9/30/2011	12:37:26 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:37:26 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:37:27 PM	Tube furnace set to 150
9/30/2011	12:37:57 PM	Helium valve closed
9/30/2011	12:37:57 PM	H2 valve closed
9/30/2011	12:37:57 PM	BCl3 valve closed
9/30/2011	12:37:57 PM	PH3 valve closed
9/30/2011	12:37:57 PM	SiCl4 pre valve closed
9/30/2011	12:37:57 PM	SiCl4 post valve closed
9/30/2011	12:37:57 PM	Bypass valve closed
9/30/2011	12:37:57 PM	Bubbler valve closed
9/30/2011	12:37:57 PM	Main Vac valve opened
9/30/2011	12:37:57 PM	Helium MFC set to  0.000000
9/30/2011	12:37:57 PM	H2 MFC set to  0.000000
9/30/2011	12:37:57 PM	BCl3 MFC set to  0.000000
9/30/2011	12:37:57 PM	PHl3 MFC set to  0.000000
9/30/2011	12:37:57 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:37:57 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:37:57 PM	Tube furnace set to 150
9/30/2011	12:38:27 PM	H2 valve closed
9/30/2011	12:38:27 PM	BCl3 valve closed
9/30/2011	12:38:27 PM	PH3 valve closed
9/30/2011	12:38:27 PM	SiCl4 pre valve closed
9/30/2011	12:38:27 PM	SiCl4 post valve closed
9/30/2011	12:38:27 PM	Bypass valve closed
9/30/2011	12:38:27 PM	Bubbler valve closed
9/30/2011	12:38:27 PM	Helium valve opened
9/30/2011	12:38:27 PM	Main Vac valve opened
9/30/2011	12:38:27 PM	Helium MFC set to  20.000000
9/30/2011	12:38:27 PM	H2 MFC set to  0.000000
9/30/2011	12:38:27 PM	BCl3 MFC set to  0.000000
9/30/2011	12:38:27 PM	PHl3 MFC set to  0.000000
9/30/2011	12:38:27 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:38:27 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:38:27 PM	Tube furnace set to 150
9/30/2011	12:38:57 PM	Helium valve closed
9/30/2011	12:38:57 PM	H2 valve closed
9/30/2011	12:38:57 PM	BCl3 valve closed
9/30/2011	12:38:57 PM	PH3 valve closed
9/30/2011	12:38:57 PM	SiCl4 pre valve closed
9/30/2011	12:38:57 PM	SiCl4 post valve closed
9/30/2011	12:38:57 PM	Bypass valve closed
9/30/2011	12:38:57 PM	Bubbler valve closed
9/30/2011	12:38:57 PM	Main Vac valve opened
9/30/2011	12:38:57 PM	Helium MFC set to  0.000000
9/30/2011	12:38:57 PM	H2 MFC set to  0.000000
9/30/2011	12:38:57 PM	BCl3 MFC set to  0.000000
9/30/2011	12:38:57 PM	PHl3 MFC set to  0.000000
9/30/2011	12:38:57 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:38:57 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:38:57 PM	Tube furnace set to 150
9/30/2011	12:39:27 PM	H2 valve closed
9/30/2011	12:39:27 PM	BCl3 valve closed
9/30/2011	12:39:27 PM	PH3 valve closed
9/30/2011	12:39:27 PM	SiCl4 pre valve closed
9/30/2011	12:39:27 PM	SiCl4 post valve closed
9/30/2011	12:39:27 PM	Bypass valve closed
9/30/2011	12:39:27 PM	Bubbler valve closed
9/30/2011	12:39:27 PM	Helium valve opened
9/30/2011	12:39:27 PM	Main Vac valve opened
9/30/2011	12:39:27 PM	Helium MFC set to  20.000000
9/30/2011	12:39:27 PM	H2 MFC set to  0.000000
9/30/2011	12:39:27 PM	BCl3 MFC set to  0.000000
9/30/2011	12:39:27 PM	PHl3 MFC set to  0.000000
9/30/2011	12:39:27 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:39:27 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:39:27 PM	Tube furnace set to 150
9/30/2011	12:39:57 PM	Helium valve closed
9/30/2011	12:39:57 PM	H2 valve closed
9/30/2011	12:39:57 PM	BCl3 valve closed
9/30/2011	12:39:57 PM	PH3 valve closed
9/30/2011	12:39:57 PM	SiCl4 pre valve closed
9/30/2011	12:39:57 PM	SiCl4 post valve closed
9/30/2011	12:39:57 PM	Bypass valve closed
9/30/2011	12:39:57 PM	Bubbler valve closed
9/30/2011	12:39:57 PM	Main Vac valve opened
9/30/2011	12:39:57 PM	Helium MFC set to  0.000000
9/30/2011	12:39:57 PM	H2 MFC set to  0.000000
9/30/2011	12:39:57 PM	BCl3 MFC set to  0.000000
9/30/2011	12:39:57 PM	PHl3 MFC set to  0.000000
9/30/2011	12:39:57 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:39:57 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:39:58 PM	Tube furnace set to 150
9/30/2011	12:40:03 PM	Run finished at 12:40 PM
9/30/2011	12:54:32 PM	Main Vac valve closed
9/30/2011	12:54:37 PM	Main Vac valve opened
9/30/2011	12:55:28 PM	Recipe started at 12:55 PM
9/30/2011	12:55:28 PM	Helium valve closed
9/30/2011	12:55:28 PM	H2 valve closed
9/30/2011	12:55:28 PM	BCl3 valve closed
9/30/2011	12:55:28 PM	PH3 valve closed
9/30/2011	12:55:28 PM	SiCl4 pre valve closed
9/30/2011	12:55:28 PM	SiCl4 post valve closed
9/30/2011	12:55:28 PM	Main Vac valve closed
9/30/2011	12:55:28 PM	Bypass valve closed
9/30/2011	12:55:28 PM	Bubbler valve closed
9/30/2011	12:55:28 PM	Helium MFC set to  0.000000
9/30/2011	12:55:28 PM	H2 MFC set to  0.000000
9/30/2011	12:55:28 PM	BCl3 MFC set to  0.000000
9/30/2011	12:55:28 PM	PHl3 MFC set to  0.000000
9/30/2011	12:55:28 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:55:28 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:55:28 PM	Tube furnace set to 0
9/30/2011	12:55:31 PM	Helium valve closed
9/30/2011	12:55:31 PM	BCl3 valve closed
9/30/2011	12:55:31 PM	PH3 valve closed
9/30/2011	12:55:31 PM	SiCl4 pre valve closed
9/30/2011	12:55:31 PM	SiCl4 post valve closed
9/30/2011	12:55:31 PM	Main Vac valve closed
9/30/2011	12:55:31 PM	Bypass valve closed
9/30/2011	12:55:31 PM	Bubbler valve closed
9/30/2011	12:55:31 PM	H2 valve opened
9/30/2011	12:55:31 PM	Helium MFC set to  0.000000
9/30/2011	12:55:31 PM	H2 MFC set to  500.000000
9/30/2011	12:55:31 PM	BCl3 MFC set to  0.000000
9/30/2011	12:55:31 PM	PHl3 MFC set to  0.000000
9/30/2011	12:55:31 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:55:31 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:55:31 PM	Tube furnace set to 0
9/30/2011	12:56:36 PM	Helium valve closed
9/30/2011	12:56:36 PM	BCl3 valve closed
9/30/2011	12:56:36 PM	PH3 valve closed
9/30/2011	12:56:36 PM	SiCl4 pre valve closed
9/30/2011	12:56:36 PM	SiCl4 post valve closed
9/30/2011	12:56:36 PM	Main Vac valve closed
9/30/2011	12:56:36 PM	Bypass valve closed
9/30/2011	12:56:36 PM	H2 valve opened
9/30/2011	12:56:36 PM	Bubbler valve opened
9/30/2011	12:56:36 PM	Helium MFC set to  0.000000
9/30/2011	12:56:36 PM	H2 MFC set to  500.000000
9/30/2011	12:56:36 PM	BCl3 MFC set to  0.000000
9/30/2011	12:56:36 PM	PHl3 MFC set to  0.000000
9/30/2011	12:56:36 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:56:36 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:56:36 PM	Tube furnace set to 0
9/30/2011	12:56:37 PM	Helium valve closed
9/30/2011	12:56:37 PM	BCl3 valve closed
9/30/2011	12:56:37 PM	PH3 valve closed
9/30/2011	12:56:37 PM	SiCl4 pre valve closed
9/30/2011	12:56:37 PM	SiCl4 post valve closed
9/30/2011	12:56:37 PM	Main Vac valve closed
9/30/2011	12:56:37 PM	Bypass valve closed
9/30/2011	12:56:37 PM	H2 valve opened
9/30/2011	12:56:37 PM	Bubbler valve opened
9/30/2011	12:56:37 PM	Helium MFC set to  0.000000
9/30/2011	12:56:37 PM	H2 MFC set to  500.000000
9/30/2011	12:56:37 PM	BCl3 MFC set to  0.000000
9/30/2011	12:56:37 PM	PHl3 MFC set to  0.000000
9/30/2011	12:56:37 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:56:37 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:56:38 PM	Tube furnace set to 1000
9/30/2011	12:56:53 PM	Run aborted at 12:56 PM
9/30/2011	12:56:53 PM	Helium valve closed
9/30/2011	12:56:53 PM	H2 valve closed
9/30/2011	12:56:53 PM	BCl3 valve closed
9/30/2011	12:56:53 PM	PH3 valve closed
9/30/2011	12:56:53 PM	SiCl4 pre valve closed
9/30/2011	12:56:53 PM	SiCl4 post valve closed
9/30/2011	12:56:53 PM	Bypass valve closed
9/30/2011	12:56:53 PM	Main Vac valve closed
9/30/2011	12:56:53 PM	Bubbler valve closed
9/30/2011	12:56:53 PM	Helium MFC set to  0.000000
9/30/2011	12:56:53 PM	H2 MFC set to  0.000000
9/30/2011	12:56:53 PM	BCl3 MFC set to  0.000000
9/30/2011	12:56:53 PM	PHl3 MFC set to  0.000000
9/30/2011	12:56:53 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:56:53 PM	Tube furnace set to 0
9/30/2011	12:57:37 PM	Recipe started at 12:57 PM
9/30/2011	12:57:37 PM	Helium valve closed
9/30/2011	12:57:37 PM	H2 valve closed
9/30/2011	12:57:37 PM	BCl3 valve closed
9/30/2011	12:57:37 PM	PH3 valve closed
9/30/2011	12:57:37 PM	SiCl4 pre valve closed
9/30/2011	12:57:37 PM	SiCl4 post valve closed
9/30/2011	12:57:37 PM	Main Vac valve closed
9/30/2011	12:57:37 PM	Bypass valve closed
9/30/2011	12:57:37 PM	Bubbler valve closed
9/30/2011	12:57:37 PM	Helium MFC set to  0.000000
9/30/2011	12:57:37 PM	H2 MFC set to  0.000000
9/30/2011	12:57:37 PM	BCl3 MFC set to  0.000000
9/30/2011	12:57:37 PM	PHl3 MFC set to  0.000000
9/30/2011	12:57:37 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:57:37 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:57:37 PM	Tube furnace set to 0
9/30/2011	12:57:40 PM	Helium valve closed
9/30/2011	12:57:40 PM	BCl3 valve closed
9/30/2011	12:57:40 PM	PH3 valve closed
9/30/2011	12:57:40 PM	SiCl4 pre valve closed
9/30/2011	12:57:40 PM	SiCl4 post valve closed
9/30/2011	12:57:40 PM	Main Vac valve closed
9/30/2011	12:57:40 PM	Bypass valve closed
9/30/2011	12:57:40 PM	Bubbler valve closed
9/30/2011	12:57:40 PM	H2 valve opened
9/30/2011	12:57:40 PM	Helium MFC set to  0.000000
9/30/2011	12:57:40 PM	H2 MFC set to  500.000000
9/30/2011	12:57:40 PM	BCl3 MFC set to  0.000000
9/30/2011	12:57:40 PM	PHl3 MFC set to  0.000000
9/30/2011	12:57:40 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:57:40 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:57:40 PM	Tube furnace set to 0
9/30/2011	12:57:42 PM	Helium valve closed
9/30/2011	12:57:42 PM	BCl3 valve closed
9/30/2011	12:57:42 PM	PH3 valve closed
9/30/2011	12:57:42 PM	SiCl4 pre valve closed
9/30/2011	12:57:42 PM	SiCl4 post valve closed
9/30/2011	12:57:42 PM	Main Vac valve closed
9/30/2011	12:57:42 PM	Bypass valve closed
9/30/2011	12:57:42 PM	H2 valve opened
9/30/2011	12:57:42 PM	Bubbler valve opened
9/30/2011	12:57:42 PM	Helium MFC set to  0.000000
9/30/2011	12:57:42 PM	H2 MFC set to  500.000000
9/30/2011	12:57:42 PM	BCl3 MFC set to  0.000000
9/30/2011	12:57:42 PM	PHl3 MFC set to  0.000000
9/30/2011	12:57:42 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:57:42 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:57:42 PM	Tube furnace set to 0
9/30/2011	12:57:43 PM	Helium valve closed
9/30/2011	12:57:43 PM	BCl3 valve closed
9/30/2011	12:57:43 PM	PH3 valve closed
9/30/2011	12:57:43 PM	SiCl4 pre valve closed
9/30/2011	12:57:43 PM	SiCl4 post valve closed
9/30/2011	12:57:43 PM	Main Vac valve closed
9/30/2011	12:57:43 PM	Bypass valve closed
9/30/2011	12:57:43 PM	H2 valve opened
9/30/2011	12:57:43 PM	Bubbler valve opened
9/30/2011	12:57:43 PM	Helium MFC set to  0.000000
9/30/2011	12:57:43 PM	H2 MFC set to  500.000000
9/30/2011	12:57:43 PM	BCl3 MFC set to  0.000000
9/30/2011	12:57:43 PM	PHl3 MFC set to  0.000000
9/30/2011	12:57:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	12:57:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	12:57:43 PM	Tube furnace set to 1000
9/30/2011	1:17:43 PM	Helium valve closed
9/30/2011	1:17:43 PM	BCl3 valve closed
9/30/2011	1:17:43 PM	Main Vac valve closed
9/30/2011	1:17:43 PM	Bypass valve closed
9/30/2011	1:17:43 PM	H2 valve opened
9/30/2011	1:17:43 PM	PH3 valve opened
9/30/2011	1:17:43 PM	SiCl4 pre valve opened
9/30/2011	1:17:43 PM	SiCl4 post valve opened
9/30/2011	1:17:43 PM	Bubbler valve opened
9/30/2011	1:17:43 PM	Helium MFC set to  0.000000
9/30/2011	1:17:43 PM	H2 MFC set to  500.000000
9/30/2011	1:17:43 PM	BCl3 MFC set to  0.000000
9/30/2011	1:17:43 PM	PHl3 MFC set to  1.000000
9/30/2011	1:17:43 PM	SiCl4 MFC set to  50.000000
9/30/2011	1:17:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	1:17:43 PM	Tube furnace set to 1000
9/30/2011	1:29:43 PM	Helium valve closed
9/30/2011	1:29:43 PM	BCl3 valve closed
9/30/2011	1:29:43 PM	PH3 valve closed
9/30/2011	1:29:43 PM	SiCl4 pre valve closed
9/30/2011	1:29:43 PM	SiCl4 post valve closed
9/30/2011	1:29:43 PM	Main Vac valve closed
9/30/2011	1:29:43 PM	Bypass valve closed
9/30/2011	1:29:43 PM	H2 valve opened
9/30/2011	1:29:43 PM	Bubbler valve opened
9/30/2011	1:29:43 PM	Helium MFC set to  0.000000
9/30/2011	1:29:43 PM	H2 MFC set to  500.000000
9/30/2011	1:29:43 PM	BCl3 MFC set to  0.000000
9/30/2011	1:29:43 PM	PHl3 MFC set to  0.000000
9/30/2011	1:29:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	1:29:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	1:29:43 PM	Tube furnace set to 750
9/30/2011	1:34:43 PM	H2 valve closed
9/30/2011	1:34:43 PM	BCl3 valve closed
9/30/2011	1:34:43 PM	PH3 valve closed
9/30/2011	1:34:43 PM	SiCl4 pre valve closed
9/30/2011	1:34:43 PM	SiCl4 post valve closed
9/30/2011	1:34:43 PM	Main Vac valve closed
9/30/2011	1:34:43 PM	Bypass valve closed
9/30/2011	1:34:43 PM	Helium valve opened
9/30/2011	1:34:43 PM	Bubbler valve opened
9/30/2011	1:34:43 PM	Helium MFC set to  500.000000
9/30/2011	1:34:43 PM	H2 MFC set to  0.000000
9/30/2011	1:34:43 PM	BCl3 MFC set to  0.000000
9/30/2011	1:34:43 PM	PHl3 MFC set to  0.000000
9/30/2011	1:34:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	1:34:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	1:34:44 PM	Tube furnace set to 0
9/30/2011	1:54:44 PM	Helium valve closed
9/30/2011	1:54:44 PM	H2 valve closed
9/30/2011	1:54:44 PM	BCl3 valve closed
9/30/2011	1:54:44 PM	PH3 valve closed
9/30/2011	1:54:44 PM	SiCl4 pre valve closed
9/30/2011	1:54:44 PM	SiCl4 post valve closed
9/30/2011	1:54:44 PM	Main Vac valve closed
9/30/2011	1:54:44 PM	Bypass valve closed
9/30/2011	1:54:44 PM	Bubbler valve closed
9/30/2011	1:54:44 PM	Helium MFC set to  0.000000
9/30/2011	1:54:44 PM	H2 MFC set to  0.000000
9/30/2011	1:54:44 PM	BCl3 MFC set to  0.000000
9/30/2011	1:54:44 PM	PHl3 MFC set to  0.000000
9/30/2011	1:54:44 PM	SiCl4 MFC set to  0.000000
9/30/2011	1:54:44 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	1:54:44 PM	Tube furnace set to 0
9/30/2011	1:54:45 PM	Run finished at 1:54 PM
9/30/2011	2:13:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	2:13:14 PM	Recipe started at 2:13 PM
9/30/2011	2:13:14 PM	Helium valve closed
9/30/2011	2:13:14 PM	H2 valve closed
9/30/2011	2:13:14 PM	BCl3 valve closed
9/30/2011	2:13:14 PM	PH3 valve closed
9/30/2011	2:13:14 PM	SiCl4 pre valve closed
9/30/2011	2:13:14 PM	SiCl4 post valve closed
9/30/2011	2:13:14 PM	Main Vac valve closed
9/30/2011	2:13:14 PM	Bypass valve closed
9/30/2011	2:13:14 PM	Bubbler valve closed
9/30/2011	2:13:14 PM	Helium MFC set to  0.000000
9/30/2011	2:13:14 PM	H2 MFC set to  0.000000
9/30/2011	2:13:14 PM	BCl3 MFC set to  0.000000
9/30/2011	2:13:14 PM	PHl3 MFC set to  0.000000
9/30/2011	2:13:14 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:13:14 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:13:14 PM	Tube furnace set to 0
9/30/2011	2:13:17 PM	H2 valve closed
9/30/2011	2:13:17 PM	BCl3 valve closed
9/30/2011	2:13:17 PM	PH3 valve closed
9/30/2011	2:13:17 PM	SiCl4 pre valve closed
9/30/2011	2:13:17 PM	SiCl4 post valve closed
9/30/2011	2:13:17 PM	Main Vac valve closed
9/30/2011	2:13:17 PM	Bypass valve closed
9/30/2011	2:13:17 PM	Bubbler valve closed
9/30/2011	2:13:17 PM	Helium valve opened
9/30/2011	2:13:17 PM	Helium MFC set to  500.000000
9/30/2011	2:13:17 PM	H2 MFC set to  0.000000
9/30/2011	2:13:17 PM	BCl3 MFC set to  0.000000
9/30/2011	2:13:17 PM	PHl3 MFC set to  0.000000
9/30/2011	2:13:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:13:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:13:18 PM	Tube furnace set to 0
9/30/2011	2:13:22 PM	Helium valve closed
9/30/2011	2:13:22 PM	H2 valve closed
9/30/2011	2:13:22 PM	BCl3 valve closed
9/30/2011	2:13:22 PM	PH3 valve closed
9/30/2011	2:13:22 PM	SiCl4 pre valve closed
9/30/2011	2:13:22 PM	SiCl4 post valve closed
9/30/2011	2:13:22 PM	Main Vac valve closed
9/30/2011	2:13:22 PM	Bypass valve closed
9/30/2011	2:13:22 PM	Bubbler valve closed
9/30/2011	2:13:22 PM	Helium MFC set to  0.000000
9/30/2011	2:13:22 PM	H2 MFC set to  0.000000
9/30/2011	2:13:22 PM	BCl3 MFC set to  0.000000
9/30/2011	2:13:22 PM	PHl3 MFC set to  0.000000
9/30/2011	2:13:22 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:13:22 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:13:22 PM	Tube furnace set to 0
9/30/2011	2:13:23 PM	Run finished at 2:13 PM
9/30/2011	2:13:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	2:18:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	2:18:10 PM	Recipe started at 2:18 PM
9/30/2011	2:18:10 PM	Helium valve closed
9/30/2011	2:18:10 PM	H2 valve closed
9/30/2011	2:18:10 PM	BCl3 valve closed
9/30/2011	2:18:10 PM	PH3 valve closed
9/30/2011	2:18:10 PM	SiCl4 pre valve closed
9/30/2011	2:18:10 PM	SiCl4 post valve closed
9/30/2011	2:18:10 PM	Main Vac valve closed
9/30/2011	2:18:10 PM	Bubbler valve closed
9/30/2011	2:18:10 PM	Bypass valve opened
9/30/2011	2:18:10 PM	Helium MFC set to  0.000000
9/30/2011	2:18:10 PM	H2 MFC set to  0.000000
9/30/2011	2:18:10 PM	BCl3 MFC set to  0.000000
9/30/2011	2:18:10 PM	PHl3 MFC set to  0.000000
9/30/2011	2:18:10 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:18:10 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:18:10 PM	Tube furnace set to 0
9/30/2011	2:19:17 PM	Helium valve closed
9/30/2011	2:19:17 PM	H2 valve closed
9/30/2011	2:19:17 PM	BCl3 valve closed
9/30/2011	2:19:17 PM	PH3 valve closed
9/30/2011	2:19:17 PM	SiCl4 pre valve closed
9/30/2011	2:19:17 PM	SiCl4 post valve closed
9/30/2011	2:19:17 PM	Main Vac valve closed
9/30/2011	2:19:17 PM	Bubbler valve closed
9/30/2011	2:19:17 PM	Bypass valve opened
9/30/2011	2:19:17 PM	Helium MFC set to  0.000000
9/30/2011	2:19:17 PM	H2 MFC set to  0.000000
9/30/2011	2:19:17 PM	BCl3 MFC set to  0.000000
9/30/2011	2:19:17 PM	PHl3 MFC set to  0.000000
9/30/2011	2:19:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:19:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:19:17 PM	Tube furnace set to 0
9/30/2011	2:20:17 PM	Helium valve closed
9/30/2011	2:20:17 PM	H2 valve closed
9/30/2011	2:20:17 PM	BCl3 valve closed
9/30/2011	2:20:17 PM	PH3 valve closed
9/30/2011	2:20:17 PM	SiCl4 pre valve closed
9/30/2011	2:20:17 PM	SiCl4 post valve closed
9/30/2011	2:20:17 PM	Bypass valve closed
9/30/2011	2:20:17 PM	Bubbler valve closed
9/30/2011	2:20:17 PM	Main Vac valve opened
9/30/2011	2:20:17 PM	Helium MFC set to  0.000000
9/30/2011	2:20:17 PM	H2 MFC set to  0.000000
9/30/2011	2:20:17 PM	BCl3 MFC set to  0.000000
9/30/2011	2:20:17 PM	PHl3 MFC set to  0.000000
9/30/2011	2:20:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:20:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:20:17 PM	Tube furnace set to 0
9/30/2011	2:20:18 PM	Run finished at 2:20 PM
9/30/2011	2:20:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	2:20:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/30/2011	2:20:40 PM	Recipe started at 2:20 PM
9/30/2011	2:20:40 PM	Helium valve closed
9/30/2011	2:20:40 PM	H2 valve closed
9/30/2011	2:20:40 PM	BCl3 valve closed
9/30/2011	2:20:40 PM	PH3 valve closed
9/30/2011	2:20:40 PM	SiCl4 pre valve closed
9/30/2011	2:20:40 PM	SiCl4 post valve closed
9/30/2011	2:20:40 PM	Main Vac valve closed
9/30/2011	2:20:40 PM	Bubbler valve closed
9/30/2011	2:20:40 PM	Bypass valve opened
9/30/2011	2:20:40 PM	Helium MFC set to  0.000000
9/30/2011	2:20:40 PM	H2 MFC set to  0.000000
9/30/2011	2:20:40 PM	BCl3 MFC set to  0.000000
9/30/2011	2:20:40 PM	PHl3 MFC set to  0.000000
9/30/2011	2:20:40 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:20:40 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:20:40 PM	Tube furnace set to 0
9/30/2011	2:20:40 PM	Helium valve closed
9/30/2011	2:20:40 PM	H2 valve closed
9/30/2011	2:20:40 PM	BCl3 valve closed
9/30/2011	2:20:40 PM	PH3 valve closed
9/30/2011	2:20:40 PM	SiCl4 pre valve closed
9/30/2011	2:20:40 PM	SiCl4 post valve closed
9/30/2011	2:20:40 PM	Main Vac valve closed
9/30/2011	2:20:40 PM	Bubbler valve closed
9/30/2011	2:20:40 PM	Bypass valve opened
9/30/2011	2:20:40 PM	Helium MFC set to  0.000000
9/30/2011	2:20:40 PM	H2 MFC set to  0.000000
9/30/2011	2:20:40 PM	BCl3 MFC set to  0.000000
9/30/2011	2:20:40 PM	PHl3 MFC set to  0.000000
9/30/2011	2:20:40 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:20:40 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:20:41 PM	Tube furnace set to 0
9/30/2011	2:21:11 PM	Helium valve closed
9/30/2011	2:21:11 PM	H2 valve closed
9/30/2011	2:21:11 PM	BCl3 valve closed
9/30/2011	2:21:11 PM	PH3 valve closed
9/30/2011	2:21:11 PM	SiCl4 pre valve closed
9/30/2011	2:21:11 PM	SiCl4 post valve closed
9/30/2011	2:21:11 PM	Bypass valve closed
9/30/2011	2:21:11 PM	Bubbler valve closed
9/30/2011	2:21:11 PM	Main Vac valve opened
9/30/2011	2:21:11 PM	Helium MFC set to  0.000000
9/30/2011	2:21:11 PM	H2 MFC set to  0.000000
9/30/2011	2:21:11 PM	BCl3 MFC set to  0.000000
9/30/2011	2:21:11 PM	PHl3 MFC set to  0.000000
9/30/2011	2:21:11 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:21:11 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:21:11 PM	Tube furnace set to 0
9/30/2011	2:21:41 PM	H2 valve closed
9/30/2011	2:21:41 PM	BCl3 valve closed
9/30/2011	2:21:41 PM	PH3 valve closed
9/30/2011	2:21:41 PM	SiCl4 pre valve closed
9/30/2011	2:21:41 PM	SiCl4 post valve closed
9/30/2011	2:21:41 PM	Bypass valve closed
9/30/2011	2:21:41 PM	Bubbler valve closed
9/30/2011	2:21:41 PM	Helium valve opened
9/30/2011	2:21:41 PM	Main Vac valve opened
9/30/2011	2:21:41 PM	Helium MFC set to  20.000000
9/30/2011	2:21:41 PM	H2 MFC set to  0.000000
9/30/2011	2:21:41 PM	BCl3 MFC set to  0.000000
9/30/2011	2:21:41 PM	PHl3 MFC set to  0.000000
9/30/2011	2:21:41 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:21:41 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:21:41 PM	Tube furnace set to 0
9/30/2011	2:22:11 PM	Helium valve closed
9/30/2011	2:22:11 PM	H2 valve closed
9/30/2011	2:22:11 PM	BCl3 valve closed
9/30/2011	2:22:11 PM	PH3 valve closed
9/30/2011	2:22:11 PM	SiCl4 pre valve closed
9/30/2011	2:22:11 PM	SiCl4 post valve closed
9/30/2011	2:22:11 PM	Bypass valve closed
9/30/2011	2:22:11 PM	Bubbler valve closed
9/30/2011	2:22:11 PM	Main Vac valve opened
9/30/2011	2:22:11 PM	Helium MFC set to  0.000000
9/30/2011	2:22:11 PM	H2 MFC set to  0.000000
9/30/2011	2:22:11 PM	BCl3 MFC set to  0.000000
9/30/2011	2:22:11 PM	PHl3 MFC set to  0.000000
9/30/2011	2:22:11 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:22:11 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:22:11 PM	Tube furnace set to 0
9/30/2011	2:22:41 PM	H2 valve closed
9/30/2011	2:22:41 PM	BCl3 valve closed
9/30/2011	2:22:41 PM	PH3 valve closed
9/30/2011	2:22:41 PM	SiCl4 pre valve closed
9/30/2011	2:22:41 PM	SiCl4 post valve closed
9/30/2011	2:22:41 PM	Bypass valve closed
9/30/2011	2:22:41 PM	Bubbler valve closed
9/30/2011	2:22:41 PM	Helium valve opened
9/30/2011	2:22:41 PM	Main Vac valve opened
9/30/2011	2:22:41 PM	Helium MFC set to  20.000000
9/30/2011	2:22:41 PM	H2 MFC set to  0.000000
9/30/2011	2:22:41 PM	BCl3 MFC set to  0.000000
9/30/2011	2:22:41 PM	PHl3 MFC set to  0.000000
9/30/2011	2:22:41 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:22:41 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:22:41 PM	Tube furnace set to 0
9/30/2011	2:23:11 PM	Helium valve closed
9/30/2011	2:23:11 PM	H2 valve closed
9/30/2011	2:23:11 PM	BCl3 valve closed
9/30/2011	2:23:11 PM	PH3 valve closed
9/30/2011	2:23:11 PM	SiCl4 pre valve closed
9/30/2011	2:23:11 PM	SiCl4 post valve closed
9/30/2011	2:23:11 PM	Bypass valve closed
9/30/2011	2:23:11 PM	Bubbler valve closed
9/30/2011	2:23:12 PM	Main Vac valve opened
9/30/2011	2:23:12 PM	Helium MFC set to  0.000000
9/30/2011	2:23:12 PM	H2 MFC set to  0.000000
9/30/2011	2:23:12 PM	BCl3 MFC set to  0.000000
9/30/2011	2:23:12 PM	PHl3 MFC set to  0.000000
9/30/2011	2:23:12 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:23:12 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:23:12 PM	Tube furnace set to 0
9/30/2011	2:23:42 PM	H2 valve closed
9/30/2011	2:23:42 PM	BCl3 valve closed
9/30/2011	2:23:42 PM	PH3 valve closed
9/30/2011	2:23:42 PM	SiCl4 pre valve closed
9/30/2011	2:23:42 PM	SiCl4 post valve closed
9/30/2011	2:23:42 PM	Bypass valve closed
9/30/2011	2:23:42 PM	Bubbler valve closed
9/30/2011	2:23:42 PM	Helium valve opened
9/30/2011	2:23:42 PM	Main Vac valve opened
9/30/2011	2:23:42 PM	Helium MFC set to  20.000000
9/30/2011	2:23:42 PM	H2 MFC set to  0.000000
9/30/2011	2:23:42 PM	BCl3 MFC set to  0.000000
9/30/2011	2:23:42 PM	PHl3 MFC set to  0.000000
9/30/2011	2:23:42 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:23:42 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:23:42 PM	Tube furnace set to 0
9/30/2011	2:24:12 PM	Helium valve closed
9/30/2011	2:24:12 PM	H2 valve closed
9/30/2011	2:24:12 PM	BCl3 valve closed
9/30/2011	2:24:12 PM	PH3 valve closed
9/30/2011	2:24:12 PM	SiCl4 pre valve closed
9/30/2011	2:24:12 PM	SiCl4 post valve closed
9/30/2011	2:24:12 PM	Bypass valve closed
9/30/2011	2:24:12 PM	Bubbler valve closed
9/30/2011	2:24:12 PM	Main Vac valve opened
9/30/2011	2:24:12 PM	Helium MFC set to  0.000000
9/30/2011	2:24:12 PM	H2 MFC set to  0.000000
9/30/2011	2:24:12 PM	BCl3 MFC set to  0.000000
9/30/2011	2:24:12 PM	PHl3 MFC set to  0.000000
9/30/2011	2:24:12 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:24:12 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:24:12 PM	Tube furnace set to 0
9/30/2011	2:24:42 PM	H2 valve closed
9/30/2011	2:24:42 PM	BCl3 valve closed
9/30/2011	2:24:42 PM	PH3 valve closed
9/30/2011	2:24:42 PM	SiCl4 pre valve closed
9/30/2011	2:24:42 PM	SiCl4 post valve closed
9/30/2011	2:24:42 PM	Bypass valve closed
9/30/2011	2:24:42 PM	Bubbler valve closed
9/30/2011	2:24:42 PM	Helium valve opened
9/30/2011	2:24:42 PM	Main Vac valve opened
9/30/2011	2:24:42 PM	Helium MFC set to  20.000000
9/30/2011	2:24:42 PM	H2 MFC set to  0.000000
9/30/2011	2:24:42 PM	BCl3 MFC set to  0.000000
9/30/2011	2:24:42 PM	PHl3 MFC set to  0.000000
9/30/2011	2:24:42 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:24:42 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:24:42 PM	Tube furnace set to 0
9/30/2011	2:25:12 PM	Helium valve closed
9/30/2011	2:25:12 PM	H2 valve closed
9/30/2011	2:25:12 PM	BCl3 valve closed
9/30/2011	2:25:12 PM	PH3 valve closed
9/30/2011	2:25:12 PM	SiCl4 pre valve closed
9/30/2011	2:25:12 PM	SiCl4 post valve closed
9/30/2011	2:25:12 PM	Bypass valve closed
9/30/2011	2:25:12 PM	Bubbler valve closed
9/30/2011	2:25:12 PM	Main Vac valve opened
9/30/2011	2:25:12 PM	Helium MFC set to  0.000000
9/30/2011	2:25:12 PM	H2 MFC set to  0.000000
9/30/2011	2:25:12 PM	BCl3 MFC set to  0.000000
9/30/2011	2:25:12 PM	PHl3 MFC set to  0.000000
9/30/2011	2:25:12 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:25:12 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:25:12 PM	Tube furnace set to 0
9/30/2011	2:25:43 PM	H2 valve closed
9/30/2011	2:25:43 PM	BCl3 valve closed
9/30/2011	2:25:43 PM	PH3 valve closed
9/30/2011	2:25:43 PM	SiCl4 pre valve closed
9/30/2011	2:25:43 PM	SiCl4 post valve closed
9/30/2011	2:25:43 PM	Bypass valve closed
9/30/2011	2:25:43 PM	Bubbler valve closed
9/30/2011	2:25:43 PM	Helium valve opened
9/30/2011	2:25:43 PM	Main Vac valve opened
9/30/2011	2:25:43 PM	Helium MFC set to  20.000000
9/30/2011	2:25:43 PM	H2 MFC set to  0.000000
9/30/2011	2:25:43 PM	BCl3 MFC set to  0.000000
9/30/2011	2:25:43 PM	PHl3 MFC set to  0.000000
9/30/2011	2:25:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:25:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:25:43 PM	Tube furnace set to 0
9/30/2011	2:26:13 PM	Helium valve closed
9/30/2011	2:26:13 PM	H2 valve closed
9/30/2011	2:26:13 PM	BCl3 valve closed
9/30/2011	2:26:13 PM	PH3 valve closed
9/30/2011	2:26:13 PM	SiCl4 pre valve closed
9/30/2011	2:26:13 PM	SiCl4 post valve closed
9/30/2011	2:26:13 PM	Bypass valve closed
9/30/2011	2:26:13 PM	Bubbler valve closed
9/30/2011	2:26:13 PM	Main Vac valve opened
9/30/2011	2:26:13 PM	Helium MFC set to  0.000000
9/30/2011	2:26:13 PM	H2 MFC set to  0.000000
9/30/2011	2:26:13 PM	BCl3 MFC set to  0.000000
9/30/2011	2:26:13 PM	PHl3 MFC set to  0.000000
9/30/2011	2:26:13 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:26:13 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:26:13 PM	Tube furnace set to 0
9/30/2011	2:26:43 PM	H2 valve closed
9/30/2011	2:26:43 PM	BCl3 valve closed
9/30/2011	2:26:43 PM	PH3 valve closed
9/30/2011	2:26:43 PM	SiCl4 pre valve closed
9/30/2011	2:26:43 PM	SiCl4 post valve closed
9/30/2011	2:26:43 PM	Bypass valve closed
9/30/2011	2:26:43 PM	Bubbler valve closed
9/30/2011	2:26:43 PM	Helium valve opened
9/30/2011	2:26:43 PM	Main Vac valve opened
9/30/2011	2:26:43 PM	Helium MFC set to  20.000000
9/30/2011	2:26:43 PM	H2 MFC set to  0.000000
9/30/2011	2:26:43 PM	BCl3 MFC set to  0.000000
9/30/2011	2:26:43 PM	PHl3 MFC set to  0.000000
9/30/2011	2:26:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:26:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:26:43 PM	Tube furnace set to 0
9/30/2011	2:27:13 PM	Helium valve closed
9/30/2011	2:27:13 PM	H2 valve closed
9/30/2011	2:27:13 PM	BCl3 valve closed
9/30/2011	2:27:13 PM	PH3 valve closed
9/30/2011	2:27:13 PM	SiCl4 pre valve closed
9/30/2011	2:27:13 PM	SiCl4 post valve closed
9/30/2011	2:27:13 PM	Bypass valve closed
9/30/2011	2:27:13 PM	Bubbler valve closed
9/30/2011	2:27:13 PM	Main Vac valve opened
9/30/2011	2:27:13 PM	Helium MFC set to  0.000000
9/30/2011	2:27:13 PM	H2 MFC set to  0.000000
9/30/2011	2:27:13 PM	BCl3 MFC set to  0.000000
9/30/2011	2:27:13 PM	PHl3 MFC set to  0.000000
9/30/2011	2:27:13 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:27:13 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:27:13 PM	Tube furnace set to 0
9/30/2011	2:27:43 PM	H2 valve closed
9/30/2011	2:27:43 PM	BCl3 valve closed
9/30/2011	2:27:43 PM	PH3 valve closed
9/30/2011	2:27:43 PM	SiCl4 pre valve closed
9/30/2011	2:27:43 PM	SiCl4 post valve closed
9/30/2011	2:27:43 PM	Bypass valve closed
9/30/2011	2:27:43 PM	Bubbler valve closed
9/30/2011	2:27:43 PM	Helium valve opened
9/30/2011	2:27:43 PM	Main Vac valve opened
9/30/2011	2:27:43 PM	Helium MFC set to  20.000000
9/30/2011	2:27:43 PM	H2 MFC set to  0.000000
9/30/2011	2:27:43 PM	BCl3 MFC set to  0.000000
9/30/2011	2:27:43 PM	PHl3 MFC set to  0.000000
9/30/2011	2:27:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:27:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:27:44 PM	Tube furnace set to 0
9/30/2011	2:28:14 PM	Helium valve closed
9/30/2011	2:28:14 PM	H2 valve closed
9/30/2011	2:28:14 PM	BCl3 valve closed
9/30/2011	2:28:14 PM	PH3 valve closed
9/30/2011	2:28:14 PM	SiCl4 pre valve closed
9/30/2011	2:28:14 PM	SiCl4 post valve closed
9/30/2011	2:28:14 PM	Bypass valve closed
9/30/2011	2:28:14 PM	Bubbler valve closed
9/30/2011	2:28:14 PM	Main Vac valve opened
9/30/2011	2:28:14 PM	Helium MFC set to  0.000000
9/30/2011	2:28:14 PM	H2 MFC set to  0.000000
9/30/2011	2:28:14 PM	BCl3 MFC set to  0.000000
9/30/2011	2:28:14 PM	PHl3 MFC set to  0.000000
9/30/2011	2:28:14 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:28:14 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:28:14 PM	Tube furnace set to 0
9/30/2011	2:28:44 PM	H2 valve closed
9/30/2011	2:28:44 PM	BCl3 valve closed
9/30/2011	2:28:44 PM	PH3 valve closed
9/30/2011	2:28:44 PM	SiCl4 pre valve closed
9/30/2011	2:28:44 PM	SiCl4 post valve closed
9/30/2011	2:28:44 PM	Bypass valve closed
9/30/2011	2:28:44 PM	Bubbler valve closed
9/30/2011	2:28:44 PM	Helium valve opened
9/30/2011	2:28:44 PM	Main Vac valve opened
9/30/2011	2:28:44 PM	Helium MFC set to  20.000000
9/30/2011	2:28:44 PM	H2 MFC set to  0.000000
9/30/2011	2:28:44 PM	BCl3 MFC set to  0.000000
9/30/2011	2:28:44 PM	PHl3 MFC set to  0.000000
9/30/2011	2:28:44 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:28:44 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:28:44 PM	Tube furnace set to 0
9/30/2011	2:29:14 PM	Helium valve closed
9/30/2011	2:29:14 PM	H2 valve closed
9/30/2011	2:29:14 PM	BCl3 valve closed
9/30/2011	2:29:14 PM	PH3 valve closed
9/30/2011	2:29:14 PM	SiCl4 pre valve closed
9/30/2011	2:29:14 PM	SiCl4 post valve closed
9/30/2011	2:29:14 PM	Bypass valve closed
9/30/2011	2:29:14 PM	Bubbler valve closed
9/30/2011	2:29:14 PM	Main Vac valve opened
9/30/2011	2:29:14 PM	Helium MFC set to  0.000000
9/30/2011	2:29:14 PM	H2 MFC set to  0.000000
9/30/2011	2:29:14 PM	BCl3 MFC set to  0.000000
9/30/2011	2:29:14 PM	PHl3 MFC set to  0.000000
9/30/2011	2:29:14 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:29:14 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:29:14 PM	Tube furnace set to 0
9/30/2011	2:29:44 PM	H2 valve closed
9/30/2011	2:29:44 PM	BCl3 valve closed
9/30/2011	2:29:44 PM	PH3 valve closed
9/30/2011	2:29:44 PM	SiCl4 pre valve closed
9/30/2011	2:29:44 PM	SiCl4 post valve closed
9/30/2011	2:29:44 PM	Bypass valve closed
9/30/2011	2:29:44 PM	Bubbler valve closed
9/30/2011	2:29:44 PM	Helium valve opened
9/30/2011	2:29:44 PM	Main Vac valve opened
9/30/2011	2:29:44 PM	Helium MFC set to  20.000000
9/30/2011	2:29:44 PM	H2 MFC set to  0.000000
9/30/2011	2:29:44 PM	BCl3 MFC set to  0.000000
9/30/2011	2:29:44 PM	PHl3 MFC set to  0.000000
9/30/2011	2:29:44 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:29:44 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:29:44 PM	Tube furnace set to 0
9/30/2011	2:30:14 PM	Helium valve closed
9/30/2011	2:30:14 PM	H2 valve closed
9/30/2011	2:30:14 PM	BCl3 valve closed
9/30/2011	2:30:14 PM	PH3 valve closed
9/30/2011	2:30:14 PM	SiCl4 pre valve closed
9/30/2011	2:30:14 PM	SiCl4 post valve closed
9/30/2011	2:30:14 PM	Bypass valve closed
9/30/2011	2:30:14 PM	Bubbler valve closed
9/30/2011	2:30:14 PM	Main Vac valve opened
9/30/2011	2:30:14 PM	Helium MFC set to  0.000000
9/30/2011	2:30:14 PM	H2 MFC set to  0.000000
9/30/2011	2:30:14 PM	BCl3 MFC set to  0.000000
9/30/2011	2:30:14 PM	PHl3 MFC set to  0.000000
9/30/2011	2:30:14 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:30:14 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:30:15 PM	Tube furnace set to 0
9/30/2011	2:30:45 PM	H2 valve closed
9/30/2011	2:30:45 PM	BCl3 valve closed
9/30/2011	2:30:45 PM	PH3 valve closed
9/30/2011	2:30:45 PM	SiCl4 pre valve closed
9/30/2011	2:30:45 PM	SiCl4 post valve closed
9/30/2011	2:30:45 PM	Bypass valve closed
9/30/2011	2:30:45 PM	Bubbler valve closed
9/30/2011	2:30:45 PM	Helium valve opened
9/30/2011	2:30:45 PM	Main Vac valve opened
9/30/2011	2:30:45 PM	Helium MFC set to  20.000000
9/30/2011	2:30:45 PM	H2 MFC set to  0.000000
9/30/2011	2:30:45 PM	BCl3 MFC set to  0.000000
9/30/2011	2:30:45 PM	PHl3 MFC set to  0.000000
9/30/2011	2:30:45 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:30:45 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:30:45 PM	Tube furnace set to 0
9/30/2011	2:31:15 PM	Helium valve closed
9/30/2011	2:31:15 PM	H2 valve closed
9/30/2011	2:31:15 PM	BCl3 valve closed
9/30/2011	2:31:15 PM	PH3 valve closed
9/30/2011	2:31:15 PM	SiCl4 pre valve closed
9/30/2011	2:31:15 PM	SiCl4 post valve closed
9/30/2011	2:31:15 PM	Bypass valve closed
9/30/2011	2:31:15 PM	Bubbler valve closed
9/30/2011	2:31:15 PM	Main Vac valve opened
9/30/2011	2:31:15 PM	Helium MFC set to  0.000000
9/30/2011	2:31:15 PM	H2 MFC set to  0.000000
9/30/2011	2:31:15 PM	BCl3 MFC set to  0.000000
9/30/2011	2:31:15 PM	PHl3 MFC set to  0.000000
9/30/2011	2:31:15 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:31:15 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:31:15 PM	Tube furnace set to 0
9/30/2011	2:31:16 PM	Run finished at 2:31 PM
9/30/2011	2:31:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/30/2011	2:35:30 PM	Recipe started at 2:35 PM
9/30/2011	2:35:30 PM	Helium valve closed
9/30/2011	2:35:30 PM	H2 valve closed
9/30/2011	2:35:30 PM	BCl3 valve closed
9/30/2011	2:35:30 PM	PH3 valve closed
9/30/2011	2:35:30 PM	SiCl4 pre valve closed
9/30/2011	2:35:30 PM	SiCl4 post valve closed
9/30/2011	2:35:30 PM	Main Vac valve closed
9/30/2011	2:35:30 PM	Bubbler valve closed
9/30/2011	2:35:30 PM	Bypass valve opened
9/30/2011	2:35:30 PM	Helium MFC set to  0.000000
9/30/2011	2:35:30 PM	H2 MFC set to  0.000000
9/30/2011	2:35:30 PM	BCl3 MFC set to  0.000000
9/30/2011	2:35:30 PM	PHl3 MFC set to  0.000000
9/30/2011	2:35:30 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:35:30 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:35:30 PM	Tube furnace set to 150
9/30/2011	2:35:31 PM	Helium valve closed
9/30/2011	2:35:31 PM	H2 valve closed
9/30/2011	2:35:31 PM	BCl3 valve closed
9/30/2011	2:35:31 PM	PH3 valve closed
9/30/2011	2:35:31 PM	SiCl4 pre valve closed
9/30/2011	2:35:31 PM	SiCl4 post valve closed
9/30/2011	2:35:31 PM	Main Vac valve closed
9/30/2011	2:35:31 PM	Bubbler valve closed
9/30/2011	2:35:31 PM	Bypass valve opened
9/30/2011	2:35:31 PM	Helium MFC set to  0.000000
9/30/2011	2:35:31 PM	H2 MFC set to  0.000000
9/30/2011	2:35:31 PM	BCl3 MFC set to  0.000000
9/30/2011	2:35:31 PM	PHl3 MFC set to  0.000000
9/30/2011	2:35:31 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:35:31 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:35:31 PM	Tube furnace set to 150
9/30/2011	2:36:01 PM	Helium valve closed
9/30/2011	2:36:01 PM	H2 valve closed
9/30/2011	2:36:01 PM	BCl3 valve closed
9/30/2011	2:36:01 PM	PH3 valve closed
9/30/2011	2:36:01 PM	SiCl4 pre valve closed
9/30/2011	2:36:01 PM	SiCl4 post valve closed
9/30/2011	2:36:01 PM	Bypass valve closed
9/30/2011	2:36:01 PM	Bubbler valve closed
9/30/2011	2:36:01 PM	Main Vac valve opened
9/30/2011	2:36:01 PM	Helium MFC set to  0.000000
9/30/2011	2:36:01 PM	H2 MFC set to  0.000000
9/30/2011	2:36:01 PM	BCl3 MFC set to  0.000000
9/30/2011	2:36:01 PM	PHl3 MFC set to  0.000000
9/30/2011	2:36:01 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:36:01 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:36:01 PM	Tube furnace set to 150
9/30/2011	2:36:31 PM	H2 valve closed
9/30/2011	2:36:31 PM	BCl3 valve closed
9/30/2011	2:36:31 PM	PH3 valve closed
9/30/2011	2:36:31 PM	SiCl4 pre valve closed
9/30/2011	2:36:31 PM	SiCl4 post valve closed
9/30/2011	2:36:31 PM	Bypass valve closed
9/30/2011	2:36:31 PM	Bubbler valve closed
9/30/2011	2:36:31 PM	Helium valve opened
9/30/2011	2:36:31 PM	Main Vac valve opened
9/30/2011	2:36:31 PM	Helium MFC set to  20.000000
9/30/2011	2:36:31 PM	H2 MFC set to  0.000000
9/30/2011	2:36:31 PM	BCl3 MFC set to  0.000000
9/30/2011	2:36:31 PM	PHl3 MFC set to  0.000000
9/30/2011	2:36:31 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:36:31 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:36:31 PM	Tube furnace set to 150
9/30/2011	2:37:01 PM	Helium valve closed
9/30/2011	2:37:01 PM	H2 valve closed
9/30/2011	2:37:01 PM	BCl3 valve closed
9/30/2011	2:37:01 PM	PH3 valve closed
9/30/2011	2:37:01 PM	SiCl4 pre valve closed
9/30/2011	2:37:01 PM	SiCl4 post valve closed
9/30/2011	2:37:01 PM	Bypass valve closed
9/30/2011	2:37:01 PM	Bubbler valve closed
9/30/2011	2:37:01 PM	Main Vac valve opened
9/30/2011	2:37:01 PM	Helium MFC set to  0.000000
9/30/2011	2:37:01 PM	H2 MFC set to  0.000000
9/30/2011	2:37:01 PM	BCl3 MFC set to  0.000000
9/30/2011	2:37:01 PM	PHl3 MFC set to  0.000000
9/30/2011	2:37:01 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:37:01 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:37:01 PM	Tube furnace set to 150
9/30/2011	2:37:31 PM	H2 valve closed
9/30/2011	2:37:31 PM	BCl3 valve closed
9/30/2011	2:37:31 PM	PH3 valve closed
9/30/2011	2:37:31 PM	SiCl4 pre valve closed
9/30/2011	2:37:31 PM	SiCl4 post valve closed
9/30/2011	2:37:31 PM	Bypass valve closed
9/30/2011	2:37:31 PM	Bubbler valve closed
9/30/2011	2:37:31 PM	Helium valve opened
9/30/2011	2:37:31 PM	Main Vac valve opened
9/30/2011	2:37:31 PM	Helium MFC set to  20.000000
9/30/2011	2:37:31 PM	H2 MFC set to  0.000000
9/30/2011	2:37:31 PM	BCl3 MFC set to  0.000000
9/30/2011	2:37:31 PM	PHl3 MFC set to  0.000000
9/30/2011	2:37:31 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:37:31 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:37:32 PM	Tube furnace set to 150
9/30/2011	2:38:02 PM	Helium valve closed
9/30/2011	2:38:02 PM	H2 valve closed
9/30/2011	2:38:02 PM	BCl3 valve closed
9/30/2011	2:38:02 PM	PH3 valve closed
9/30/2011	2:38:02 PM	SiCl4 pre valve closed
9/30/2011	2:38:02 PM	SiCl4 post valve closed
9/30/2011	2:38:02 PM	Bypass valve closed
9/30/2011	2:38:02 PM	Bubbler valve closed
9/30/2011	2:38:02 PM	Main Vac valve opened
9/30/2011	2:38:02 PM	Helium MFC set to  0.000000
9/30/2011	2:38:02 PM	H2 MFC set to  0.000000
9/30/2011	2:38:02 PM	BCl3 MFC set to  0.000000
9/30/2011	2:38:02 PM	PHl3 MFC set to  0.000000
9/30/2011	2:38:02 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:38:02 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:38:02 PM	Tube furnace set to 150
9/30/2011	2:38:32 PM	H2 valve closed
9/30/2011	2:38:32 PM	BCl3 valve closed
9/30/2011	2:38:32 PM	PH3 valve closed
9/30/2011	2:38:32 PM	SiCl4 pre valve closed
9/30/2011	2:38:32 PM	SiCl4 post valve closed
9/30/2011	2:38:32 PM	Bypass valve closed
9/30/2011	2:38:32 PM	Bubbler valve closed
9/30/2011	2:38:32 PM	Helium valve opened
9/30/2011	2:38:32 PM	Main Vac valve opened
9/30/2011	2:38:32 PM	Helium MFC set to  20.000000
9/30/2011	2:38:32 PM	H2 MFC set to  0.000000
9/30/2011	2:38:32 PM	BCl3 MFC set to  0.000000
9/30/2011	2:38:32 PM	PHl3 MFC set to  0.000000
9/30/2011	2:38:32 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:38:32 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:38:32 PM	Tube furnace set to 150
9/30/2011	2:39:02 PM	Helium valve closed
9/30/2011	2:39:02 PM	H2 valve closed
9/30/2011	2:39:02 PM	BCl3 valve closed
9/30/2011	2:39:02 PM	PH3 valve closed
9/30/2011	2:39:02 PM	SiCl4 pre valve closed
9/30/2011	2:39:02 PM	SiCl4 post valve closed
9/30/2011	2:39:02 PM	Bypass valve closed
9/30/2011	2:39:02 PM	Bubbler valve closed
9/30/2011	2:39:02 PM	Main Vac valve opened
9/30/2011	2:39:02 PM	Helium MFC set to  0.000000
9/30/2011	2:39:02 PM	H2 MFC set to  0.000000
9/30/2011	2:39:02 PM	BCl3 MFC set to  0.000000
9/30/2011	2:39:02 PM	PHl3 MFC set to  0.000000
9/30/2011	2:39:02 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:39:02 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:39:02 PM	Tube furnace set to 150
9/30/2011	2:39:32 PM	H2 valve closed
9/30/2011	2:39:32 PM	BCl3 valve closed
9/30/2011	2:39:32 PM	PH3 valve closed
9/30/2011	2:39:32 PM	SiCl4 pre valve closed
9/30/2011	2:39:32 PM	SiCl4 post valve closed
9/30/2011	2:39:32 PM	Bypass valve closed
9/30/2011	2:39:32 PM	Bubbler valve closed
9/30/2011	2:39:32 PM	Helium valve opened
9/30/2011	2:39:32 PM	Main Vac valve opened
9/30/2011	2:39:32 PM	Helium MFC set to  20.000000
9/30/2011	2:39:32 PM	H2 MFC set to  0.000000
9/30/2011	2:39:32 PM	BCl3 MFC set to  0.000000
9/30/2011	2:39:32 PM	PHl3 MFC set to  0.000000
9/30/2011	2:39:32 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:39:32 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:39:32 PM	Tube furnace set to 150
9/30/2011	2:40:02 PM	Helium valve closed
9/30/2011	2:40:02 PM	H2 valve closed
9/30/2011	2:40:02 PM	BCl3 valve closed
9/30/2011	2:40:02 PM	PH3 valve closed
9/30/2011	2:40:02 PM	SiCl4 pre valve closed
9/30/2011	2:40:02 PM	SiCl4 post valve closed
9/30/2011	2:40:02 PM	Bypass valve closed
9/30/2011	2:40:02 PM	Bubbler valve closed
9/30/2011	2:40:03 PM	Main Vac valve opened
9/30/2011	2:40:03 PM	Helium MFC set to  0.000000
9/30/2011	2:40:03 PM	H2 MFC set to  0.000000
9/30/2011	2:40:03 PM	BCl3 MFC set to  0.000000
9/30/2011	2:40:03 PM	PHl3 MFC set to  0.000000
9/30/2011	2:40:03 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:40:03 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:40:03 PM	Tube furnace set to 150
9/30/2011	2:40:33 PM	H2 valve closed
9/30/2011	2:40:33 PM	BCl3 valve closed
9/30/2011	2:40:33 PM	PH3 valve closed
9/30/2011	2:40:33 PM	SiCl4 pre valve closed
9/30/2011	2:40:33 PM	SiCl4 post valve closed
9/30/2011	2:40:33 PM	Bypass valve closed
9/30/2011	2:40:33 PM	Bubbler valve closed
9/30/2011	2:40:33 PM	Helium valve opened
9/30/2011	2:40:33 PM	Main Vac valve opened
9/30/2011	2:40:33 PM	Helium MFC set to  20.000000
9/30/2011	2:40:33 PM	H2 MFC set to  0.000000
9/30/2011	2:40:33 PM	BCl3 MFC set to  0.000000
9/30/2011	2:40:33 PM	PHl3 MFC set to  0.000000
9/30/2011	2:40:33 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:40:33 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:40:33 PM	Tube furnace set to 150
9/30/2011	2:41:03 PM	Helium valve closed
9/30/2011	2:41:03 PM	H2 valve closed
9/30/2011	2:41:03 PM	BCl3 valve closed
9/30/2011	2:41:03 PM	PH3 valve closed
9/30/2011	2:41:03 PM	SiCl4 pre valve closed
9/30/2011	2:41:03 PM	SiCl4 post valve closed
9/30/2011	2:41:03 PM	Bypass valve closed
9/30/2011	2:41:03 PM	Bubbler valve closed
9/30/2011	2:41:03 PM	Main Vac valve opened
9/30/2011	2:41:03 PM	Helium MFC set to  0.000000
9/30/2011	2:41:03 PM	H2 MFC set to  0.000000
9/30/2011	2:41:03 PM	BCl3 MFC set to  0.000000
9/30/2011	2:41:03 PM	PHl3 MFC set to  0.000000
9/30/2011	2:41:03 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:41:03 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:41:03 PM	Tube furnace set to 150
9/30/2011	2:41:33 PM	H2 valve closed
9/30/2011	2:41:33 PM	BCl3 valve closed
9/30/2011	2:41:33 PM	PH3 valve closed
9/30/2011	2:41:33 PM	SiCl4 pre valve closed
9/30/2011	2:41:33 PM	SiCl4 post valve closed
9/30/2011	2:41:33 PM	Bypass valve closed
9/30/2011	2:41:33 PM	Bubbler valve closed
9/30/2011	2:41:33 PM	Helium valve opened
9/30/2011	2:41:33 PM	Main Vac valve opened
9/30/2011	2:41:33 PM	Helium MFC set to  20.000000
9/30/2011	2:41:33 PM	H2 MFC set to  0.000000
9/30/2011	2:41:33 PM	BCl3 MFC set to  0.000000
9/30/2011	2:41:33 PM	PHl3 MFC set to  0.000000
9/30/2011	2:41:33 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:41:33 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:41:33 PM	Tube furnace set to 150
9/30/2011	2:42:03 PM	Helium valve closed
9/30/2011	2:42:03 PM	H2 valve closed
9/30/2011	2:42:03 PM	BCl3 valve closed
9/30/2011	2:42:03 PM	PH3 valve closed
9/30/2011	2:42:03 PM	SiCl4 pre valve closed
9/30/2011	2:42:03 PM	SiCl4 post valve closed
9/30/2011	2:42:03 PM	Bypass valve closed
9/30/2011	2:42:03 PM	Bubbler valve closed
9/30/2011	2:42:03 PM	Main Vac valve opened
9/30/2011	2:42:03 PM	Helium MFC set to  0.000000
9/30/2011	2:42:03 PM	H2 MFC set to  0.000000
9/30/2011	2:42:03 PM	BCl3 MFC set to  0.000000
9/30/2011	2:42:03 PM	PHl3 MFC set to  0.000000
9/30/2011	2:42:03 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:42:03 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:42:03 PM	Tube furnace set to 150
9/30/2011	2:42:33 PM	H2 valve closed
9/30/2011	2:42:34 PM	BCl3 valve closed
9/30/2011	2:42:34 PM	PH3 valve closed
9/30/2011	2:42:34 PM	SiCl4 pre valve closed
9/30/2011	2:42:34 PM	SiCl4 post valve closed
9/30/2011	2:42:34 PM	Bypass valve closed
9/30/2011	2:42:34 PM	Bubbler valve closed
9/30/2011	2:42:34 PM	Helium valve opened
9/30/2011	2:42:34 PM	Main Vac valve opened
9/30/2011	2:42:34 PM	Helium MFC set to  20.000000
9/30/2011	2:42:34 PM	H2 MFC set to  0.000000
9/30/2011	2:42:34 PM	BCl3 MFC set to  0.000000
9/30/2011	2:42:34 PM	PHl3 MFC set to  0.000000
9/30/2011	2:42:34 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:42:34 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:42:34 PM	Tube furnace set to 150
9/30/2011	2:43:04 PM	Helium valve closed
9/30/2011	2:43:04 PM	H2 valve closed
9/30/2011	2:43:04 PM	BCl3 valve closed
9/30/2011	2:43:04 PM	PH3 valve closed
9/30/2011	2:43:04 PM	SiCl4 pre valve closed
9/30/2011	2:43:04 PM	SiCl4 post valve closed
9/30/2011	2:43:04 PM	Bypass valve closed
9/30/2011	2:43:04 PM	Bubbler valve closed
9/30/2011	2:43:04 PM	Main Vac valve opened
9/30/2011	2:43:04 PM	Helium MFC set to  0.000000
9/30/2011	2:43:04 PM	H2 MFC set to  0.000000
9/30/2011	2:43:04 PM	BCl3 MFC set to  0.000000
9/30/2011	2:43:04 PM	PHl3 MFC set to  0.000000
9/30/2011	2:43:04 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:43:04 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:43:04 PM	Tube furnace set to 150
9/30/2011	2:43:34 PM	H2 valve closed
9/30/2011	2:43:34 PM	BCl3 valve closed
9/30/2011	2:43:34 PM	PH3 valve closed
9/30/2011	2:43:34 PM	SiCl4 pre valve closed
9/30/2011	2:43:34 PM	SiCl4 post valve closed
9/30/2011	2:43:34 PM	Bypass valve closed
9/30/2011	2:43:34 PM	Bubbler valve closed
9/30/2011	2:43:34 PM	Helium valve opened
9/30/2011	2:43:34 PM	Main Vac valve opened
9/30/2011	2:43:34 PM	Helium MFC set to  20.000000
9/30/2011	2:43:34 PM	H2 MFC set to  0.000000
9/30/2011	2:43:34 PM	BCl3 MFC set to  0.000000
9/30/2011	2:43:34 PM	PHl3 MFC set to  0.000000
9/30/2011	2:43:34 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:43:34 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:43:34 PM	Tube furnace set to 150
9/30/2011	2:44:04 PM	Helium valve closed
9/30/2011	2:44:04 PM	H2 valve closed
9/30/2011	2:44:04 PM	BCl3 valve closed
9/30/2011	2:44:04 PM	PH3 valve closed
9/30/2011	2:44:04 PM	SiCl4 pre valve closed
9/30/2011	2:44:04 PM	SiCl4 post valve closed
9/30/2011	2:44:04 PM	Bypass valve closed
9/30/2011	2:44:04 PM	Bubbler valve closed
9/30/2011	2:44:04 PM	Main Vac valve opened
9/30/2011	2:44:04 PM	Helium MFC set to  0.000000
9/30/2011	2:44:04 PM	H2 MFC set to  0.000000
9/30/2011	2:44:04 PM	BCl3 MFC set to  0.000000
9/30/2011	2:44:04 PM	PHl3 MFC set to  0.000000
9/30/2011	2:44:04 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:44:04 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:44:04 PM	Tube furnace set to 150
9/30/2011	2:44:34 PM	H2 valve closed
9/30/2011	2:44:34 PM	BCl3 valve closed
9/30/2011	2:44:34 PM	PH3 valve closed
9/30/2011	2:44:34 PM	SiCl4 pre valve closed
9/30/2011	2:44:34 PM	SiCl4 post valve closed
9/30/2011	2:44:34 PM	Bypass valve closed
9/30/2011	2:44:34 PM	Bubbler valve closed
9/30/2011	2:44:34 PM	Helium valve opened
9/30/2011	2:44:34 PM	Main Vac valve opened
9/30/2011	2:44:34 PM	Helium MFC set to  20.000000
9/30/2011	2:44:34 PM	H2 MFC set to  0.000000
9/30/2011	2:44:34 PM	BCl3 MFC set to  0.000000
9/30/2011	2:44:34 PM	PHl3 MFC set to  0.000000
9/30/2011	2:44:34 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:44:34 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:44:35 PM	Tube furnace set to 150
9/30/2011	2:45:05 PM	Helium valve closed
9/30/2011	2:45:05 PM	H2 valve closed
9/30/2011	2:45:05 PM	BCl3 valve closed
9/30/2011	2:45:05 PM	PH3 valve closed
9/30/2011	2:45:05 PM	SiCl4 pre valve closed
9/30/2011	2:45:05 PM	SiCl4 post valve closed
9/30/2011	2:45:05 PM	Bypass valve closed
9/30/2011	2:45:05 PM	Bubbler valve closed
9/30/2011	2:45:05 PM	Main Vac valve opened
9/30/2011	2:45:05 PM	Helium MFC set to  0.000000
9/30/2011	2:45:05 PM	H2 MFC set to  0.000000
9/30/2011	2:45:05 PM	BCl3 MFC set to  0.000000
9/30/2011	2:45:05 PM	PHl3 MFC set to  0.000000
9/30/2011	2:45:05 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:45:05 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:45:05 PM	Tube furnace set to 150
9/30/2011	2:45:35 PM	H2 valve closed
9/30/2011	2:45:35 PM	BCl3 valve closed
9/30/2011	2:45:35 PM	PH3 valve closed
9/30/2011	2:45:35 PM	SiCl4 pre valve closed
9/30/2011	2:45:35 PM	SiCl4 post valve closed
9/30/2011	2:45:35 PM	Bypass valve closed
9/30/2011	2:45:35 PM	Bubbler valve closed
9/30/2011	2:45:35 PM	Helium valve opened
9/30/2011	2:45:35 PM	Main Vac valve opened
9/30/2011	2:45:35 PM	Helium MFC set to  20.000000
9/30/2011	2:45:35 PM	H2 MFC set to  0.000000
9/30/2011	2:45:35 PM	BCl3 MFC set to  0.000000
9/30/2011	2:45:35 PM	PHl3 MFC set to  0.000000
9/30/2011	2:45:35 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:45:35 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:45:35 PM	Tube furnace set to 150
9/30/2011	2:46:05 PM	Helium valve closed
9/30/2011	2:46:05 PM	H2 valve closed
9/30/2011	2:46:05 PM	BCl3 valve closed
9/30/2011	2:46:05 PM	PH3 valve closed
9/30/2011	2:46:05 PM	SiCl4 pre valve closed
9/30/2011	2:46:05 PM	SiCl4 post valve closed
9/30/2011	2:46:05 PM	Bypass valve closed
9/30/2011	2:46:05 PM	Bubbler valve closed
9/30/2011	2:46:05 PM	Main Vac valve opened
9/30/2011	2:46:05 PM	Helium MFC set to  0.000000
9/30/2011	2:46:05 PM	H2 MFC set to  0.000000
9/30/2011	2:46:05 PM	BCl3 MFC set to  0.000000
9/30/2011	2:46:05 PM	PHl3 MFC set to  0.000000
9/30/2011	2:46:05 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:46:05 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:46:05 PM	Tube furnace set to 150
9/30/2011	2:46:35 PM	H2 valve closed
9/30/2011	2:46:35 PM	BCl3 valve closed
9/30/2011	2:46:35 PM	PH3 valve closed
9/30/2011	2:46:35 PM	SiCl4 pre valve closed
9/30/2011	2:46:35 PM	SiCl4 post valve closed
9/30/2011	2:46:35 PM	Bypass valve closed
9/30/2011	2:46:35 PM	Bubbler valve closed
9/30/2011	2:46:35 PM	Helium valve opened
9/30/2011	2:46:35 PM	Main Vac valve opened
9/30/2011	2:46:35 PM	Helium MFC set to  20.000000
9/30/2011	2:46:35 PM	H2 MFC set to  0.000000
9/30/2011	2:46:35 PM	BCl3 MFC set to  0.000000
9/30/2011	2:46:35 PM	PHl3 MFC set to  0.000000
9/30/2011	2:46:35 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:46:35 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:46:35 PM	Tube furnace set to 150
9/30/2011	2:47:05 PM	Helium valve closed
9/30/2011	2:47:05 PM	H2 valve closed
9/30/2011	2:47:05 PM	BCl3 valve closed
9/30/2011	2:47:05 PM	PH3 valve closed
9/30/2011	2:47:05 PM	SiCl4 pre valve closed
9/30/2011	2:47:05 PM	SiCl4 post valve closed
9/30/2011	2:47:05 PM	Bypass valve closed
9/30/2011	2:47:05 PM	Bubbler valve closed
9/30/2011	2:47:05 PM	Main Vac valve opened
9/30/2011	2:47:05 PM	Helium MFC set to  0.000000
9/30/2011	2:47:05 PM	H2 MFC set to  0.000000
9/30/2011	2:47:05 PM	BCl3 MFC set to  0.000000
9/30/2011	2:47:05 PM	PHl3 MFC set to  0.000000
9/30/2011	2:47:05 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:47:05 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:47:06 PM	Tube furnace set to 150
9/30/2011	2:47:36 PM	H2 valve closed
9/30/2011	2:47:36 PM	BCl3 valve closed
9/30/2011	2:47:36 PM	PH3 valve closed
9/30/2011	2:47:36 PM	SiCl4 pre valve closed
9/30/2011	2:47:36 PM	SiCl4 post valve closed
9/30/2011	2:47:36 PM	Bypass valve closed
9/30/2011	2:47:36 PM	Bubbler valve closed
9/30/2011	2:47:36 PM	Helium valve opened
9/30/2011	2:47:36 PM	Main Vac valve opened
9/30/2011	2:47:36 PM	Helium MFC set to  20.000000
9/30/2011	2:47:36 PM	H2 MFC set to  0.000000
9/30/2011	2:47:36 PM	BCl3 MFC set to  0.000000
9/30/2011	2:47:36 PM	PHl3 MFC set to  0.000000
9/30/2011	2:47:36 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:47:36 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:47:36 PM	Tube furnace set to 150
9/30/2011	2:48:02 PM	Run aborted at 2:48 PM
9/30/2011	2:48:02 PM	Helium valve closed
9/30/2011	2:48:02 PM	H2 valve closed
9/30/2011	2:48:02 PM	BCl3 valve closed
9/30/2011	2:48:02 PM	PH3 valve closed
9/30/2011	2:48:02 PM	SiCl4 pre valve closed
9/30/2011	2:48:02 PM	SiCl4 post valve closed
9/30/2011	2:48:02 PM	Bypass valve closed
9/30/2011	2:48:02 PM	Main Vac valve closed
9/30/2011	2:48:02 PM	Bubbler valve closed
9/30/2011	2:48:02 PM	Helium MFC set to  0.000000
9/30/2011	2:48:02 PM	H2 MFC set to  0.000000
9/30/2011	2:48:02 PM	BCl3 MFC set to  0.000000
9/30/2011	2:48:02 PM	PHl3 MFC set to  0.000000
9/30/2011	2:48:02 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:48:02 PM	Tube furnace set to 0
9/30/2011	2:48:44 PM	Recipe started at 2:48 PM
9/30/2011	2:48:44 PM	Helium valve closed
9/30/2011	2:48:44 PM	H2 valve closed
9/30/2011	2:48:44 PM	BCl3 valve closed
9/30/2011	2:48:44 PM	PH3 valve closed
9/30/2011	2:48:44 PM	SiCl4 pre valve closed
9/30/2011	2:48:44 PM	SiCl4 post valve closed
9/30/2011	2:48:44 PM	Main Vac valve closed
9/30/2011	2:48:44 PM	Bubbler valve closed
9/30/2011	2:48:44 PM	Bypass valve opened
9/30/2011	2:48:44 PM	Helium MFC set to  0.000000
9/30/2011	2:48:44 PM	H2 MFC set to  0.000000
9/30/2011	2:48:44 PM	BCl3 MFC set to  0.000000
9/30/2011	2:48:44 PM	PHl3 MFC set to  0.000000
9/30/2011	2:48:44 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:48:44 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:48:44 PM	Tube furnace set to 150
9/30/2011	2:48:44 PM	Helium valve closed
9/30/2011	2:48:44 PM	H2 valve closed
9/30/2011	2:48:44 PM	BCl3 valve closed
9/30/2011	2:48:44 PM	PH3 valve closed
9/30/2011	2:48:44 PM	SiCl4 pre valve closed
9/30/2011	2:48:44 PM	SiCl4 post valve closed
9/30/2011	2:48:44 PM	Main Vac valve closed
9/30/2011	2:48:44 PM	Bubbler valve closed
9/30/2011	2:48:44 PM	Bypass valve opened
9/30/2011	2:48:44 PM	Helium MFC set to  0.000000
9/30/2011	2:48:44 PM	H2 MFC set to  0.000000
9/30/2011	2:48:44 PM	BCl3 MFC set to  0.000000
9/30/2011	2:48:44 PM	PHl3 MFC set to  0.000000
9/30/2011	2:48:44 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:48:44 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:48:44 PM	Tube furnace set to 150
9/30/2011	2:49:15 PM	Helium valve closed
9/30/2011	2:49:15 PM	H2 valve closed
9/30/2011	2:49:15 PM	BCl3 valve closed
9/30/2011	2:49:15 PM	PH3 valve closed
9/30/2011	2:49:15 PM	SiCl4 pre valve closed
9/30/2011	2:49:15 PM	SiCl4 post valve closed
9/30/2011	2:49:15 PM	Bypass valve closed
9/30/2011	2:49:15 PM	Bubbler valve closed
9/30/2011	2:49:15 PM	Main Vac valve opened
9/30/2011	2:49:15 PM	Helium MFC set to  0.000000
9/30/2011	2:49:15 PM	H2 MFC set to  0.000000
9/30/2011	2:49:15 PM	BCl3 MFC set to  0.000000
9/30/2011	2:49:15 PM	PHl3 MFC set to  0.000000
9/30/2011	2:49:15 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:49:15 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:49:15 PM	Tube furnace set to 150
9/30/2011	2:49:45 PM	H2 valve closed
9/30/2011	2:49:45 PM	BCl3 valve closed
9/30/2011	2:49:45 PM	PH3 valve closed
9/30/2011	2:49:45 PM	SiCl4 pre valve closed
9/30/2011	2:49:45 PM	SiCl4 post valve closed
9/30/2011	2:49:45 PM	Bypass valve closed
9/30/2011	2:49:45 PM	Bubbler valve closed
9/30/2011	2:49:45 PM	Helium valve opened
9/30/2011	2:49:45 PM	Main Vac valve opened
9/30/2011	2:49:45 PM	Helium MFC set to  20.000000
9/30/2011	2:49:45 PM	H2 MFC set to  0.000000
9/30/2011	2:49:45 PM	BCl3 MFC set to  0.000000
9/30/2011	2:49:45 PM	PHl3 MFC set to  0.000000
9/30/2011	2:49:45 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:49:45 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:49:45 PM	Tube furnace set to 150
9/30/2011	2:50:15 PM	Helium valve closed
9/30/2011	2:50:15 PM	H2 valve closed
9/30/2011	2:50:15 PM	BCl3 valve closed
9/30/2011	2:50:15 PM	PH3 valve closed
9/30/2011	2:50:15 PM	SiCl4 pre valve closed
9/30/2011	2:50:15 PM	SiCl4 post valve closed
9/30/2011	2:50:15 PM	Bypass valve closed
9/30/2011	2:50:15 PM	Bubbler valve closed
9/30/2011	2:50:15 PM	Main Vac valve opened
9/30/2011	2:50:15 PM	Helium MFC set to  0.000000
9/30/2011	2:50:15 PM	H2 MFC set to  0.000000
9/30/2011	2:50:15 PM	BCl3 MFC set to  0.000000
9/30/2011	2:50:15 PM	PHl3 MFC set to  0.000000
9/30/2011	2:50:15 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:50:15 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:50:15 PM	Tube furnace set to 150
9/30/2011	2:50:45 PM	H2 valve closed
9/30/2011	2:50:45 PM	BCl3 valve closed
9/30/2011	2:50:45 PM	PH3 valve closed
9/30/2011	2:50:45 PM	SiCl4 pre valve closed
9/30/2011	2:50:45 PM	SiCl4 post valve closed
9/30/2011	2:50:45 PM	Bypass valve closed
9/30/2011	2:50:45 PM	Bubbler valve closed
9/30/2011	2:50:45 PM	Helium valve opened
9/30/2011	2:50:45 PM	Main Vac valve opened
9/30/2011	2:50:45 PM	Helium MFC set to  20.000000
9/30/2011	2:50:45 PM	H2 MFC set to  0.000000
9/30/2011	2:50:45 PM	BCl3 MFC set to  0.000000
9/30/2011	2:50:45 PM	PHl3 MFC set to  0.000000
9/30/2011	2:50:45 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:50:45 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:50:45 PM	Tube furnace set to 150
9/30/2011	2:51:15 PM	Helium valve closed
9/30/2011	2:51:15 PM	H2 valve closed
9/30/2011	2:51:15 PM	BCl3 valve closed
9/30/2011	2:51:15 PM	PH3 valve closed
9/30/2011	2:51:15 PM	SiCl4 pre valve closed
9/30/2011	2:51:15 PM	SiCl4 post valve closed
9/30/2011	2:51:15 PM	Bypass valve closed
9/30/2011	2:51:15 PM	Bubbler valve closed
9/30/2011	2:51:15 PM	Main Vac valve opened
9/30/2011	2:51:15 PM	Helium MFC set to  0.000000
9/30/2011	2:51:15 PM	H2 MFC set to  0.000000
9/30/2011	2:51:15 PM	BCl3 MFC set to  0.000000
9/30/2011	2:51:15 PM	PHl3 MFC set to  0.000000
9/30/2011	2:51:15 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:51:15 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:51:16 PM	Tube furnace set to 150
9/30/2011	2:51:46 PM	H2 valve closed
9/30/2011	2:51:46 PM	BCl3 valve closed
9/30/2011	2:51:46 PM	PH3 valve closed
9/30/2011	2:51:46 PM	SiCl4 pre valve closed
9/30/2011	2:51:46 PM	SiCl4 post valve closed
9/30/2011	2:51:46 PM	Bypass valve closed
9/30/2011	2:51:46 PM	Bubbler valve closed
9/30/2011	2:51:46 PM	Helium valve opened
9/30/2011	2:51:46 PM	Main Vac valve opened
9/30/2011	2:51:46 PM	Helium MFC set to  20.000000
9/30/2011	2:51:46 PM	H2 MFC set to  0.000000
9/30/2011	2:51:46 PM	BCl3 MFC set to  0.000000
9/30/2011	2:51:46 PM	PHl3 MFC set to  0.000000
9/30/2011	2:51:46 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:51:46 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:51:46 PM	Tube furnace set to 150
9/30/2011	2:52:16 PM	Helium valve closed
9/30/2011	2:52:16 PM	H2 valve closed
9/30/2011	2:52:16 PM	BCl3 valve closed
9/30/2011	2:52:16 PM	PH3 valve closed
9/30/2011	2:52:16 PM	SiCl4 pre valve closed
9/30/2011	2:52:16 PM	SiCl4 post valve closed
9/30/2011	2:52:16 PM	Bypass valve closed
9/30/2011	2:52:16 PM	Bubbler valve closed
9/30/2011	2:52:16 PM	Main Vac valve opened
9/30/2011	2:52:16 PM	Helium MFC set to  0.000000
9/30/2011	2:52:16 PM	H2 MFC set to  0.000000
9/30/2011	2:52:16 PM	BCl3 MFC set to  0.000000
9/30/2011	2:52:16 PM	PHl3 MFC set to  0.000000
9/30/2011	2:52:16 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:52:16 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:52:16 PM	Tube furnace set to 150
9/30/2011	2:52:46 PM	H2 valve closed
9/30/2011	2:52:46 PM	BCl3 valve closed
9/30/2011	2:52:46 PM	PH3 valve closed
9/30/2011	2:52:46 PM	SiCl4 pre valve closed
9/30/2011	2:52:46 PM	SiCl4 post valve closed
9/30/2011	2:52:46 PM	Bypass valve closed
9/30/2011	2:52:46 PM	Bubbler valve closed
9/30/2011	2:52:46 PM	Helium valve opened
9/30/2011	2:52:46 PM	Main Vac valve opened
9/30/2011	2:52:46 PM	Helium MFC set to  20.000000
9/30/2011	2:52:46 PM	H2 MFC set to  0.000000
9/30/2011	2:52:46 PM	BCl3 MFC set to  0.000000
9/30/2011	2:52:46 PM	PHl3 MFC set to  0.000000
9/30/2011	2:52:46 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:52:46 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:52:46 PM	Tube furnace set to 150
9/30/2011	2:53:16 PM	Helium valve closed
9/30/2011	2:53:16 PM	H2 valve closed
9/30/2011	2:53:16 PM	BCl3 valve closed
9/30/2011	2:53:16 PM	PH3 valve closed
9/30/2011	2:53:16 PM	SiCl4 pre valve closed
9/30/2011	2:53:16 PM	SiCl4 post valve closed
9/30/2011	2:53:16 PM	Bypass valve closed
9/30/2011	2:53:16 PM	Bubbler valve closed
9/30/2011	2:53:16 PM	Main Vac valve opened
9/30/2011	2:53:16 PM	Helium MFC set to  0.000000
9/30/2011	2:53:16 PM	H2 MFC set to  0.000000
9/30/2011	2:53:16 PM	BCl3 MFC set to  0.000000
9/30/2011	2:53:16 PM	PHl3 MFC set to  0.000000
9/30/2011	2:53:16 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:53:16 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:53:16 PM	Tube furnace set to 150
9/30/2011	2:53:46 PM	H2 valve closed
9/30/2011	2:53:46 PM	BCl3 valve closed
9/30/2011	2:53:46 PM	PH3 valve closed
9/30/2011	2:53:46 PM	SiCl4 pre valve closed
9/30/2011	2:53:46 PM	SiCl4 post valve closed
9/30/2011	2:53:46 PM	Bypass valve closed
9/30/2011	2:53:46 PM	Bubbler valve closed
9/30/2011	2:53:46 PM	Helium valve opened
9/30/2011	2:53:46 PM	Main Vac valve opened
9/30/2011	2:53:46 PM	Helium MFC set to  20.000000
9/30/2011	2:53:46 PM	H2 MFC set to  0.000000
9/30/2011	2:53:46 PM	BCl3 MFC set to  0.000000
9/30/2011	2:53:46 PM	PHl3 MFC set to  0.000000
9/30/2011	2:53:46 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:53:46 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:53:47 PM	Tube furnace set to 150
9/30/2011	2:54:17 PM	Helium valve closed
9/30/2011	2:54:17 PM	H2 valve closed
9/30/2011	2:54:17 PM	BCl3 valve closed
9/30/2011	2:54:17 PM	PH3 valve closed
9/30/2011	2:54:17 PM	SiCl4 pre valve closed
9/30/2011	2:54:17 PM	SiCl4 post valve closed
9/30/2011	2:54:17 PM	Bypass valve closed
9/30/2011	2:54:17 PM	Bubbler valve closed
9/30/2011	2:54:17 PM	Main Vac valve opened
9/30/2011	2:54:17 PM	Helium MFC set to  0.000000
9/30/2011	2:54:17 PM	H2 MFC set to  0.000000
9/30/2011	2:54:17 PM	BCl3 MFC set to  0.000000
9/30/2011	2:54:17 PM	PHl3 MFC set to  0.000000
9/30/2011	2:54:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:54:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:54:17 PM	Tube furnace set to 150
9/30/2011	2:54:47 PM	H2 valve closed
9/30/2011	2:54:47 PM	BCl3 valve closed
9/30/2011	2:54:47 PM	PH3 valve closed
9/30/2011	2:54:47 PM	SiCl4 pre valve closed
9/30/2011	2:54:47 PM	SiCl4 post valve closed
9/30/2011	2:54:47 PM	Bypass valve closed
9/30/2011	2:54:47 PM	Bubbler valve closed
9/30/2011	2:54:47 PM	Helium valve opened
9/30/2011	2:54:47 PM	Main Vac valve opened
9/30/2011	2:54:47 PM	Helium MFC set to  20.000000
9/30/2011	2:54:47 PM	H2 MFC set to  0.000000
9/30/2011	2:54:47 PM	BCl3 MFC set to  0.000000
9/30/2011	2:54:47 PM	PHl3 MFC set to  0.000000
9/30/2011	2:54:47 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:54:47 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:54:47 PM	Tube furnace set to 150
9/30/2011	2:55:17 PM	Helium valve closed
9/30/2011	2:55:17 PM	H2 valve closed
9/30/2011	2:55:17 PM	BCl3 valve closed
9/30/2011	2:55:17 PM	PH3 valve closed
9/30/2011	2:55:17 PM	SiCl4 pre valve closed
9/30/2011	2:55:17 PM	SiCl4 post valve closed
9/30/2011	2:55:17 PM	Bypass valve closed
9/30/2011	2:55:17 PM	Bubbler valve closed
9/30/2011	2:55:17 PM	Main Vac valve opened
9/30/2011	2:55:17 PM	Helium MFC set to  0.000000
9/30/2011	2:55:17 PM	H2 MFC set to  0.000000
9/30/2011	2:55:17 PM	BCl3 MFC set to  0.000000
9/30/2011	2:55:17 PM	PHl3 MFC set to  0.000000
9/30/2011	2:55:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:55:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:55:17 PM	Tube furnace set to 150
9/30/2011	2:55:47 PM	H2 valve closed
9/30/2011	2:55:47 PM	BCl3 valve closed
9/30/2011	2:55:47 PM	PH3 valve closed
9/30/2011	2:55:47 PM	SiCl4 pre valve closed
9/30/2011	2:55:47 PM	SiCl4 post valve closed
9/30/2011	2:55:47 PM	Bypass valve closed
9/30/2011	2:55:47 PM	Bubbler valve closed
9/30/2011	2:55:47 PM	Helium valve opened
9/30/2011	2:55:47 PM	Main Vac valve opened
9/30/2011	2:55:47 PM	Helium MFC set to  20.000000
9/30/2011	2:55:47 PM	H2 MFC set to  0.000000
9/30/2011	2:55:47 PM	BCl3 MFC set to  0.000000
9/30/2011	2:55:47 PM	PHl3 MFC set to  0.000000
9/30/2011	2:55:47 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:55:47 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:55:47 PM	Tube furnace set to 150
9/30/2011	2:56:17 PM	Helium valve closed
9/30/2011	2:56:17 PM	H2 valve closed
9/30/2011	2:56:17 PM	BCl3 valve closed
9/30/2011	2:56:17 PM	PH3 valve closed
9/30/2011	2:56:17 PM	SiCl4 pre valve closed
9/30/2011	2:56:17 PM	SiCl4 post valve closed
9/30/2011	2:56:17 PM	Bypass valve closed
9/30/2011	2:56:17 PM	Bubbler valve closed
9/30/2011	2:56:17 PM	Main Vac valve opened
9/30/2011	2:56:17 PM	Helium MFC set to  0.000000
9/30/2011	2:56:17 PM	H2 MFC set to  0.000000
9/30/2011	2:56:17 PM	BCl3 MFC set to  0.000000
9/30/2011	2:56:17 PM	PHl3 MFC set to  0.000000
9/30/2011	2:56:17 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:56:17 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:56:18 PM	Tube furnace set to 150
9/30/2011	2:56:48 PM	H2 valve closed
9/30/2011	2:56:48 PM	BCl3 valve closed
9/30/2011	2:56:48 PM	PH3 valve closed
9/30/2011	2:56:48 PM	SiCl4 pre valve closed
9/30/2011	2:56:48 PM	SiCl4 post valve closed
9/30/2011	2:56:48 PM	Bypass valve closed
9/30/2011	2:56:48 PM	Bubbler valve closed
9/30/2011	2:56:48 PM	Helium valve opened
9/30/2011	2:56:48 PM	Main Vac valve opened
9/30/2011	2:56:48 PM	Helium MFC set to  20.000000
9/30/2011	2:56:48 PM	H2 MFC set to  0.000000
9/30/2011	2:56:48 PM	BCl3 MFC set to  0.000000
9/30/2011	2:56:48 PM	PHl3 MFC set to  0.000000
9/30/2011	2:56:48 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:56:48 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:56:48 PM	Tube furnace set to 150
9/30/2011	2:57:18 PM	Helium valve closed
9/30/2011	2:57:18 PM	H2 valve closed
9/30/2011	2:57:18 PM	BCl3 valve closed
9/30/2011	2:57:18 PM	PH3 valve closed
9/30/2011	2:57:18 PM	SiCl4 pre valve closed
9/30/2011	2:57:18 PM	SiCl4 post valve closed
9/30/2011	2:57:18 PM	Bypass valve closed
9/30/2011	2:57:18 PM	Bubbler valve closed
9/30/2011	2:57:18 PM	Main Vac valve opened
9/30/2011	2:57:18 PM	Helium MFC set to  0.000000
9/30/2011	2:57:18 PM	H2 MFC set to  0.000000
9/30/2011	2:57:18 PM	BCl3 MFC set to  0.000000
9/30/2011	2:57:18 PM	PHl3 MFC set to  0.000000
9/30/2011	2:57:18 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:57:18 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:57:18 PM	Tube furnace set to 150
9/30/2011	2:57:48 PM	H2 valve closed
9/30/2011	2:57:48 PM	BCl3 valve closed
9/30/2011	2:57:48 PM	PH3 valve closed
9/30/2011	2:57:48 PM	SiCl4 pre valve closed
9/30/2011	2:57:48 PM	SiCl4 post valve closed
9/30/2011	2:57:48 PM	Bypass valve closed
9/30/2011	2:57:48 PM	Bubbler valve closed
9/30/2011	2:57:48 PM	Helium valve opened
9/30/2011	2:57:48 PM	Main Vac valve opened
9/30/2011	2:57:48 PM	Helium MFC set to  20.000000
9/30/2011	2:57:48 PM	H2 MFC set to  0.000000
9/30/2011	2:57:48 PM	BCl3 MFC set to  0.000000
9/30/2011	2:57:48 PM	PHl3 MFC set to  0.000000
9/30/2011	2:57:48 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:57:48 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:57:48 PM	Tube furnace set to 150
9/30/2011	2:58:18 PM	Helium valve closed
9/30/2011	2:58:18 PM	H2 valve closed
9/30/2011	2:58:18 PM	BCl3 valve closed
9/30/2011	2:58:18 PM	PH3 valve closed
9/30/2011	2:58:18 PM	SiCl4 pre valve closed
9/30/2011	2:58:18 PM	SiCl4 post valve closed
9/30/2011	2:58:18 PM	Bypass valve closed
9/30/2011	2:58:18 PM	Bubbler valve closed
9/30/2011	2:58:18 PM	Main Vac valve opened
9/30/2011	2:58:18 PM	Helium MFC set to  0.000000
9/30/2011	2:58:18 PM	H2 MFC set to  0.000000
9/30/2011	2:58:18 PM	BCl3 MFC set to  0.000000
9/30/2011	2:58:18 PM	PHl3 MFC set to  0.000000
9/30/2011	2:58:18 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:58:18 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:58:18 PM	Tube furnace set to 150
9/30/2011	2:58:48 PM	H2 valve closed
9/30/2011	2:58:48 PM	BCl3 valve closed
9/30/2011	2:58:48 PM	PH3 valve closed
9/30/2011	2:58:48 PM	SiCl4 pre valve closed
9/30/2011	2:58:48 PM	SiCl4 post valve closed
9/30/2011	2:58:48 PM	Bypass valve closed
9/30/2011	2:58:48 PM	Bubbler valve closed
9/30/2011	2:58:48 PM	Helium valve opened
9/30/2011	2:58:48 PM	Main Vac valve opened
9/30/2011	2:58:48 PM	Helium MFC set to  20.000000
9/30/2011	2:58:48 PM	H2 MFC set to  0.000000
9/30/2011	2:58:48 PM	BCl3 MFC set to  0.000000
9/30/2011	2:58:48 PM	PHl3 MFC set to  0.000000
9/30/2011	2:58:48 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:58:48 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:58:49 PM	Tube furnace set to 150
9/30/2011	2:59:19 PM	Helium valve closed
9/30/2011	2:59:19 PM	H2 valve closed
9/30/2011	2:59:19 PM	BCl3 valve closed
9/30/2011	2:59:19 PM	PH3 valve closed
9/30/2011	2:59:19 PM	SiCl4 pre valve closed
9/30/2011	2:59:19 PM	SiCl4 post valve closed
9/30/2011	2:59:19 PM	Bypass valve closed
9/30/2011	2:59:19 PM	Bubbler valve closed
9/30/2011	2:59:19 PM	Main Vac valve opened
9/30/2011	2:59:19 PM	Helium MFC set to  0.000000
9/30/2011	2:59:19 PM	H2 MFC set to  0.000000
9/30/2011	2:59:19 PM	BCl3 MFC set to  0.000000
9/30/2011	2:59:19 PM	PHl3 MFC set to  0.000000
9/30/2011	2:59:19 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:59:19 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:59:19 PM	Tube furnace set to 150
9/30/2011	2:59:49 PM	H2 valve closed
9/30/2011	2:59:49 PM	BCl3 valve closed
9/30/2011	2:59:49 PM	PH3 valve closed
9/30/2011	2:59:49 PM	SiCl4 pre valve closed
9/30/2011	2:59:49 PM	SiCl4 post valve closed
9/30/2011	2:59:49 PM	Bypass valve closed
9/30/2011	2:59:49 PM	Bubbler valve closed
9/30/2011	2:59:49 PM	Helium valve opened
9/30/2011	2:59:49 PM	Main Vac valve opened
9/30/2011	2:59:49 PM	Helium MFC set to  20.000000
9/30/2011	2:59:49 PM	H2 MFC set to  0.000000
9/30/2011	2:59:49 PM	BCl3 MFC set to  0.000000
9/30/2011	2:59:49 PM	PHl3 MFC set to  0.000000
9/30/2011	2:59:49 PM	SiCl4 MFC set to  0.000000
9/30/2011	2:59:49 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	2:59:49 PM	Tube furnace set to 150
9/30/2011	3:00:19 PM	Helium valve closed
9/30/2011	3:00:19 PM	H2 valve closed
9/30/2011	3:00:19 PM	BCl3 valve closed
9/30/2011	3:00:19 PM	PH3 valve closed
9/30/2011	3:00:19 PM	SiCl4 pre valve closed
9/30/2011	3:00:19 PM	SiCl4 post valve closed
9/30/2011	3:00:19 PM	Bypass valve closed
9/30/2011	3:00:19 PM	Bubbler valve closed
9/30/2011	3:00:19 PM	Main Vac valve opened
9/30/2011	3:00:19 PM	Helium MFC set to  0.000000
9/30/2011	3:00:19 PM	H2 MFC set to  0.000000
9/30/2011	3:00:19 PM	BCl3 MFC set to  0.000000
9/30/2011	3:00:19 PM	PHl3 MFC set to  0.000000
9/30/2011	3:00:19 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:00:19 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:00:19 PM	Tube furnace set to 150
9/30/2011	3:00:49 PM	H2 valve closed
9/30/2011	3:00:49 PM	BCl3 valve closed
9/30/2011	3:00:49 PM	PH3 valve closed
9/30/2011	3:00:49 PM	SiCl4 pre valve closed
9/30/2011	3:00:49 PM	SiCl4 post valve closed
9/30/2011	3:00:49 PM	Bypass valve closed
9/30/2011	3:00:49 PM	Bubbler valve closed
9/30/2011	3:00:49 PM	Helium valve opened
9/30/2011	3:00:49 PM	Main Vac valve opened
9/30/2011	3:00:49 PM	Helium MFC set to  20.000000
9/30/2011	3:00:49 PM	H2 MFC set to  0.000000
9/30/2011	3:00:49 PM	BCl3 MFC set to  0.000000
9/30/2011	3:00:49 PM	PHl3 MFC set to  0.000000
9/30/2011	3:00:49 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:00:49 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:00:49 PM	Tube furnace set to 150
9/30/2011	3:01:19 PM	Helium valve closed
9/30/2011	3:01:19 PM	H2 valve closed
9/30/2011	3:01:19 PM	BCl3 valve closed
9/30/2011	3:01:19 PM	PH3 valve closed
9/30/2011	3:01:19 PM	SiCl4 pre valve closed
9/30/2011	3:01:19 PM	SiCl4 post valve closed
9/30/2011	3:01:19 PM	Bypass valve closed
9/30/2011	3:01:19 PM	Bubbler valve closed
9/30/2011	3:01:19 PM	Main Vac valve opened
9/30/2011	3:01:19 PM	Helium MFC set to  0.000000
9/30/2011	3:01:19 PM	H2 MFC set to  0.000000
9/30/2011	3:01:19 PM	BCl3 MFC set to  0.000000
9/30/2011	3:01:19 PM	PHl3 MFC set to  0.000000
9/30/2011	3:01:19 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:01:19 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:01:20 PM	Tube furnace set to 150
9/30/2011	3:01:50 PM	H2 valve closed
9/30/2011	3:01:50 PM	BCl3 valve closed
9/30/2011	3:01:50 PM	PH3 valve closed
9/30/2011	3:01:50 PM	SiCl4 pre valve closed
9/30/2011	3:01:50 PM	SiCl4 post valve closed
9/30/2011	3:01:50 PM	Bypass valve closed
9/30/2011	3:01:50 PM	Bubbler valve closed
9/30/2011	3:01:50 PM	Helium valve opened
9/30/2011	3:01:50 PM	Main Vac valve opened
9/30/2011	3:01:50 PM	Helium MFC set to  20.000000
9/30/2011	3:01:50 PM	H2 MFC set to  0.000000
9/30/2011	3:01:50 PM	BCl3 MFC set to  0.000000
9/30/2011	3:01:50 PM	PHl3 MFC set to  0.000000
9/30/2011	3:01:50 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:01:50 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:01:50 PM	Tube furnace set to 150
9/30/2011	3:02:20 PM	Helium valve closed
9/30/2011	3:02:20 PM	H2 valve closed
9/30/2011	3:02:20 PM	BCl3 valve closed
9/30/2011	3:02:20 PM	PH3 valve closed
9/30/2011	3:02:20 PM	SiCl4 pre valve closed
9/30/2011	3:02:20 PM	SiCl4 post valve closed
9/30/2011	3:02:20 PM	Bypass valve closed
9/30/2011	3:02:20 PM	Bubbler valve closed
9/30/2011	3:02:20 PM	Main Vac valve opened
9/30/2011	3:02:20 PM	Helium MFC set to  0.000000
9/30/2011	3:02:20 PM	H2 MFC set to  0.000000
9/30/2011	3:02:20 PM	BCl3 MFC set to  0.000000
9/30/2011	3:02:20 PM	PHl3 MFC set to  0.000000
9/30/2011	3:02:20 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:02:20 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:02:20 PM	Tube furnace set to 150
9/30/2011	3:02:50 PM	H2 valve closed
9/30/2011	3:02:50 PM	BCl3 valve closed
9/30/2011	3:02:50 PM	PH3 valve closed
9/30/2011	3:02:50 PM	SiCl4 pre valve closed
9/30/2011	3:02:50 PM	SiCl4 post valve closed
9/30/2011	3:02:50 PM	Bypass valve closed
9/30/2011	3:02:50 PM	Bubbler valve closed
9/30/2011	3:02:50 PM	Helium valve opened
9/30/2011	3:02:50 PM	Main Vac valve opened
9/30/2011	3:02:50 PM	Helium MFC set to  20.000000
9/30/2011	3:02:50 PM	H2 MFC set to  0.000000
9/30/2011	3:02:50 PM	BCl3 MFC set to  0.000000
9/30/2011	3:02:50 PM	PHl3 MFC set to  0.000000
9/30/2011	3:02:50 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:02:50 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:02:50 PM	Tube furnace set to 150
9/30/2011	3:03:20 PM	Helium valve closed
9/30/2011	3:03:20 PM	H2 valve closed
9/30/2011	3:03:20 PM	BCl3 valve closed
9/30/2011	3:03:20 PM	PH3 valve closed
9/30/2011	3:03:20 PM	SiCl4 pre valve closed
9/30/2011	3:03:20 PM	SiCl4 post valve closed
9/30/2011	3:03:20 PM	Bypass valve closed
9/30/2011	3:03:20 PM	Bubbler valve closed
9/30/2011	3:03:20 PM	Main Vac valve opened
9/30/2011	3:03:20 PM	Helium MFC set to  0.000000
9/30/2011	3:03:20 PM	H2 MFC set to  0.000000
9/30/2011	3:03:20 PM	BCl3 MFC set to  0.000000
9/30/2011	3:03:20 PM	PHl3 MFC set to  0.000000
9/30/2011	3:03:20 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:03:20 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:03:20 PM	Tube furnace set to 150
9/30/2011	3:03:50 PM	H2 valve closed
9/30/2011	3:03:50 PM	BCl3 valve closed
9/30/2011	3:03:50 PM	PH3 valve closed
9/30/2011	3:03:50 PM	SiCl4 pre valve closed
9/30/2011	3:03:50 PM	SiCl4 post valve closed
9/30/2011	3:03:50 PM	Bypass valve closed
9/30/2011	3:03:50 PM	Bubbler valve closed
9/30/2011	3:03:51 PM	Helium valve opened
9/30/2011	3:03:51 PM	Main Vac valve opened
9/30/2011	3:03:51 PM	Helium MFC set to  20.000000
9/30/2011	3:03:51 PM	H2 MFC set to  0.000000
9/30/2011	3:03:51 PM	BCl3 MFC set to  0.000000
9/30/2011	3:03:51 PM	PHl3 MFC set to  0.000000
9/30/2011	3:03:51 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:03:51 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:03:51 PM	Tube furnace set to 150
9/30/2011	3:04:21 PM	Helium valve closed
9/30/2011	3:04:21 PM	H2 valve closed
9/30/2011	3:04:21 PM	BCl3 valve closed
9/30/2011	3:04:21 PM	PH3 valve closed
9/30/2011	3:04:21 PM	SiCl4 pre valve closed
9/30/2011	3:04:21 PM	SiCl4 post valve closed
9/30/2011	3:04:21 PM	Bypass valve closed
9/30/2011	3:04:21 PM	Bubbler valve closed
9/30/2011	3:04:21 PM	Main Vac valve opened
9/30/2011	3:04:21 PM	Helium MFC set to  0.000000
9/30/2011	3:04:21 PM	H2 MFC set to  0.000000
9/30/2011	3:04:21 PM	BCl3 MFC set to  0.000000
9/30/2011	3:04:21 PM	PHl3 MFC set to  0.000000
9/30/2011	3:04:21 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:04:21 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:04:21 PM	Tube furnace set to 150
9/30/2011	3:04:51 PM	H2 valve closed
9/30/2011	3:04:51 PM	BCl3 valve closed
9/30/2011	3:04:51 PM	PH3 valve closed
9/30/2011	3:04:51 PM	SiCl4 pre valve closed
9/30/2011	3:04:51 PM	SiCl4 post valve closed
9/30/2011	3:04:51 PM	Bypass valve closed
9/30/2011	3:04:51 PM	Bubbler valve closed
9/30/2011	3:04:51 PM	Helium valve opened
9/30/2011	3:04:51 PM	Main Vac valve opened
9/30/2011	3:04:51 PM	Helium MFC set to  20.000000
9/30/2011	3:04:51 PM	H2 MFC set to  0.000000
9/30/2011	3:04:51 PM	BCl3 MFC set to  0.000000
9/30/2011	3:04:51 PM	PHl3 MFC set to  0.000000
9/30/2011	3:04:51 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:04:51 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:04:51 PM	Tube furnace set to 150
9/30/2011	3:05:21 PM	Helium valve closed
9/30/2011	3:05:21 PM	H2 valve closed
9/30/2011	3:05:21 PM	BCl3 valve closed
9/30/2011	3:05:21 PM	PH3 valve closed
9/30/2011	3:05:21 PM	SiCl4 pre valve closed
9/30/2011	3:05:21 PM	SiCl4 post valve closed
9/30/2011	3:05:21 PM	Bypass valve closed
9/30/2011	3:05:21 PM	Bubbler valve closed
9/30/2011	3:05:21 PM	Main Vac valve opened
9/30/2011	3:05:21 PM	Helium MFC set to  0.000000
9/30/2011	3:05:21 PM	H2 MFC set to  0.000000
9/30/2011	3:05:21 PM	BCl3 MFC set to  0.000000
9/30/2011	3:05:21 PM	PHl3 MFC set to  0.000000
9/30/2011	3:05:21 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:05:21 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:05:21 PM	Tube furnace set to 150
9/30/2011	3:05:51 PM	H2 valve closed
9/30/2011	3:05:51 PM	BCl3 valve closed
9/30/2011	3:05:51 PM	PH3 valve closed
9/30/2011	3:05:51 PM	SiCl4 pre valve closed
9/30/2011	3:05:51 PM	SiCl4 post valve closed
9/30/2011	3:05:51 PM	Bypass valve closed
9/30/2011	3:05:51 PM	Bubbler valve closed
9/30/2011	3:05:51 PM	Helium valve opened
9/30/2011	3:05:51 PM	Main Vac valve opened
9/30/2011	3:05:51 PM	Helium MFC set to  20.000000
9/30/2011	3:05:51 PM	H2 MFC set to  0.000000
9/30/2011	3:05:51 PM	BCl3 MFC set to  0.000000
9/30/2011	3:05:51 PM	PHl3 MFC set to  0.000000
9/30/2011	3:05:51 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:05:51 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:05:51 PM	Tube furnace set to 150
9/30/2011	3:06:22 PM	Helium valve closed
9/30/2011	3:06:22 PM	H2 valve closed
9/30/2011	3:06:22 PM	BCl3 valve closed
9/30/2011	3:06:22 PM	PH3 valve closed
9/30/2011	3:06:22 PM	SiCl4 pre valve closed
9/30/2011	3:06:22 PM	SiCl4 post valve closed
9/30/2011	3:06:22 PM	Bypass valve closed
9/30/2011	3:06:22 PM	Bubbler valve closed
9/30/2011	3:06:22 PM	Main Vac valve opened
9/30/2011	3:06:22 PM	Helium MFC set to  0.000000
9/30/2011	3:06:22 PM	H2 MFC set to  0.000000
9/30/2011	3:06:22 PM	BCl3 MFC set to  0.000000
9/30/2011	3:06:22 PM	PHl3 MFC set to  0.000000
9/30/2011	3:06:22 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:06:22 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:06:22 PM	Tube furnace set to 150
9/30/2011	3:06:52 PM	H2 valve closed
9/30/2011	3:06:52 PM	BCl3 valve closed
9/30/2011	3:06:52 PM	PH3 valve closed
9/30/2011	3:06:52 PM	SiCl4 pre valve closed
9/30/2011	3:06:52 PM	SiCl4 post valve closed
9/30/2011	3:06:52 PM	Bypass valve closed
9/30/2011	3:06:52 PM	Bubbler valve closed
9/30/2011	3:06:52 PM	Helium valve opened
9/30/2011	3:06:52 PM	Main Vac valve opened
9/30/2011	3:06:52 PM	Helium MFC set to  20.000000
9/30/2011	3:06:52 PM	H2 MFC set to  0.000000
9/30/2011	3:06:52 PM	BCl3 MFC set to  0.000000
9/30/2011	3:06:52 PM	PHl3 MFC set to  0.000000
9/30/2011	3:06:52 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:06:52 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:06:52 PM	Tube furnace set to 150
9/30/2011	3:07:22 PM	Helium valve closed
9/30/2011	3:07:22 PM	H2 valve closed
9/30/2011	3:07:22 PM	BCl3 valve closed
9/30/2011	3:07:22 PM	PH3 valve closed
9/30/2011	3:07:22 PM	SiCl4 pre valve closed
9/30/2011	3:07:22 PM	SiCl4 post valve closed
9/30/2011	3:07:22 PM	Bypass valve closed
9/30/2011	3:07:22 PM	Bubbler valve closed
9/30/2011	3:07:22 PM	Main Vac valve opened
9/30/2011	3:07:22 PM	Helium MFC set to  0.000000
9/30/2011	3:07:22 PM	H2 MFC set to  0.000000
9/30/2011	3:07:22 PM	BCl3 MFC set to  0.000000
9/30/2011	3:07:22 PM	PHl3 MFC set to  0.000000
9/30/2011	3:07:22 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:07:22 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:07:22 PM	Tube furnace set to 150
9/30/2011	3:07:52 PM	H2 valve closed
9/30/2011	3:07:52 PM	BCl3 valve closed
9/30/2011	3:07:52 PM	PH3 valve closed
9/30/2011	3:07:52 PM	SiCl4 pre valve closed
9/30/2011	3:07:52 PM	SiCl4 post valve closed
9/30/2011	3:07:52 PM	Bypass valve closed
9/30/2011	3:07:52 PM	Bubbler valve closed
9/30/2011	3:07:52 PM	Helium valve opened
9/30/2011	3:07:52 PM	Main Vac valve opened
9/30/2011	3:07:52 PM	Helium MFC set to  20.000000
9/30/2011	3:07:52 PM	H2 MFC set to  0.000000
9/30/2011	3:07:52 PM	BCl3 MFC set to  0.000000
9/30/2011	3:07:52 PM	PHl3 MFC set to  0.000000
9/30/2011	3:07:52 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:07:52 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:07:52 PM	Tube furnace set to 150
9/30/2011	3:08:22 PM	Helium valve closed
9/30/2011	3:08:22 PM	H2 valve closed
9/30/2011	3:08:22 PM	BCl3 valve closed
9/30/2011	3:08:22 PM	PH3 valve closed
9/30/2011	3:08:22 PM	SiCl4 pre valve closed
9/30/2011	3:08:22 PM	SiCl4 post valve closed
9/30/2011	3:08:22 PM	Bypass valve closed
9/30/2011	3:08:22 PM	Bubbler valve closed
9/30/2011	3:08:22 PM	Main Vac valve opened
9/30/2011	3:08:22 PM	Helium MFC set to  0.000000
9/30/2011	3:08:22 PM	H2 MFC set to  0.000000
9/30/2011	3:08:22 PM	BCl3 MFC set to  0.000000
9/30/2011	3:08:22 PM	PHl3 MFC set to  0.000000
9/30/2011	3:08:22 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:08:22 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:08:23 PM	Tube furnace set to 150
9/30/2011	3:08:53 PM	H2 valve closed
9/30/2011	3:08:53 PM	BCl3 valve closed
9/30/2011	3:08:53 PM	PH3 valve closed
9/30/2011	3:08:53 PM	SiCl4 pre valve closed
9/30/2011	3:08:53 PM	SiCl4 post valve closed
9/30/2011	3:08:53 PM	Bypass valve closed
9/30/2011	3:08:53 PM	Bubbler valve closed
9/30/2011	3:08:53 PM	Helium valve opened
9/30/2011	3:08:53 PM	Main Vac valve opened
9/30/2011	3:08:53 PM	Helium MFC set to  20.000000
9/30/2011	3:08:53 PM	H2 MFC set to  0.000000
9/30/2011	3:08:53 PM	BCl3 MFC set to  0.000000
9/30/2011	3:08:53 PM	PHl3 MFC set to  0.000000
9/30/2011	3:08:53 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:08:53 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:08:53 PM	Tube furnace set to 150
9/30/2011	3:09:23 PM	Helium valve closed
9/30/2011	3:09:23 PM	H2 valve closed
9/30/2011	3:09:23 PM	BCl3 valve closed
9/30/2011	3:09:23 PM	PH3 valve closed
9/30/2011	3:09:23 PM	SiCl4 pre valve closed
9/30/2011	3:09:23 PM	SiCl4 post valve closed
9/30/2011	3:09:23 PM	Bypass valve closed
9/30/2011	3:09:23 PM	Bubbler valve closed
9/30/2011	3:09:23 PM	Main Vac valve opened
9/30/2011	3:09:23 PM	Helium MFC set to  0.000000
9/30/2011	3:09:23 PM	H2 MFC set to  0.000000
9/30/2011	3:09:23 PM	BCl3 MFC set to  0.000000
9/30/2011	3:09:23 PM	PHl3 MFC set to  0.000000
9/30/2011	3:09:23 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:09:23 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:09:23 PM	Tube furnace set to 150
9/30/2011	3:09:28 PM	Run finished at 3:09 PM
9/30/2011	3:13:00 PM	Main Vac valve closed
9/30/2011	3:13:07 PM	Main Vac valve opened
9/30/2011	3:17:33 PM	Recipe started at 3:17 PM
9/30/2011	3:17:33 PM	Helium valve closed
9/30/2011	3:17:33 PM	H2 valve closed
9/30/2011	3:17:33 PM	BCl3 valve closed
9/30/2011	3:17:33 PM	PH3 valve closed
9/30/2011	3:17:33 PM	SiCl4 pre valve closed
9/30/2011	3:17:33 PM	SiCl4 post valve closed
9/30/2011	3:17:33 PM	Main Vac valve closed
9/30/2011	3:17:33 PM	Bypass valve closed
9/30/2011	3:17:33 PM	Bubbler valve closed
9/30/2011	3:17:33 PM	Helium MFC set to  0.000000
9/30/2011	3:17:33 PM	H2 MFC set to  0.000000
9/30/2011	3:17:33 PM	BCl3 MFC set to  0.000000
9/30/2011	3:17:33 PM	PHl3 MFC set to  0.000000
9/30/2011	3:17:33 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:17:33 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:17:33 PM	Tube furnace set to 0
9/30/2011	3:17:36 PM	Helium valve closed
9/30/2011	3:17:36 PM	BCl3 valve closed
9/30/2011	3:17:36 PM	PH3 valve closed
9/30/2011	3:17:36 PM	SiCl4 pre valve closed
9/30/2011	3:17:36 PM	SiCl4 post valve closed
9/30/2011	3:17:36 PM	Main Vac valve closed
9/30/2011	3:17:36 PM	Bypass valve closed
9/30/2011	3:17:36 PM	Bubbler valve closed
9/30/2011	3:17:36 PM	H2 valve opened
9/30/2011	3:17:36 PM	Helium MFC set to  0.000000
9/30/2011	3:17:36 PM	H2 MFC set to  500.000000
9/30/2011	3:17:36 PM	BCl3 MFC set to  0.000000
9/30/2011	3:17:36 PM	PHl3 MFC set to  0.000000
9/30/2011	3:17:36 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:17:36 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:17:36 PM	Tube furnace set to 0
9/30/2011	3:18:41 PM	Helium valve closed
9/30/2011	3:18:41 PM	BCl3 valve closed
9/30/2011	3:18:41 PM	PH3 valve closed
9/30/2011	3:18:41 PM	SiCl4 pre valve closed
9/30/2011	3:18:41 PM	SiCl4 post valve closed
9/30/2011	3:18:41 PM	Main Vac valve closed
9/30/2011	3:18:41 PM	Bypass valve closed
9/30/2011	3:18:41 PM	H2 valve opened
9/30/2011	3:18:41 PM	Bubbler valve opened
9/30/2011	3:18:41 PM	Helium MFC set to  0.000000
9/30/2011	3:18:41 PM	H2 MFC set to  500.000000
9/30/2011	3:18:41 PM	BCl3 MFC set to  0.000000
9/30/2011	3:18:41 PM	PHl3 MFC set to  0.000000
9/30/2011	3:18:41 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:18:41 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:18:41 PM	Tube furnace set to 0
9/30/2011	3:18:42 PM	Helium valve closed
9/30/2011	3:18:42 PM	BCl3 valve closed
9/30/2011	3:18:42 PM	PH3 valve closed
9/30/2011	3:18:42 PM	SiCl4 pre valve closed
9/30/2011	3:18:42 PM	SiCl4 post valve closed
9/30/2011	3:18:42 PM	Main Vac valve closed
9/30/2011	3:18:42 PM	Bypass valve closed
9/30/2011	3:18:42 PM	H2 valve opened
9/30/2011	3:18:42 PM	Bubbler valve opened
9/30/2011	3:18:42 PM	Helium MFC set to  0.000000
9/30/2011	3:18:42 PM	H2 MFC set to  500.000000
9/30/2011	3:18:42 PM	BCl3 MFC set to  0.000000
9/30/2011	3:18:42 PM	PHl3 MFC set to  0.000000
9/30/2011	3:18:42 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:18:42 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:18:42 PM	Tube furnace set to 1000
9/30/2011	3:38:42 PM	Helium valve closed
9/30/2011	3:38:42 PM	BCl3 valve closed
9/30/2011	3:38:42 PM	Main Vac valve closed
9/30/2011	3:38:42 PM	Bypass valve closed
9/30/2011	3:38:42 PM	H2 valve opened
9/30/2011	3:38:42 PM	PH3 valve opened
9/30/2011	3:38:42 PM	SiCl4 pre valve opened
9/30/2011	3:38:42 PM	SiCl4 post valve opened
9/30/2011	3:38:42 PM	Bubbler valve opened
9/30/2011	3:38:42 PM	Helium MFC set to  0.000000
9/30/2011	3:38:42 PM	H2 MFC set to  500.000000
9/30/2011	3:38:42 PM	BCl3 MFC set to  0.000000
9/30/2011	3:38:42 PM	PHl3 MFC set to  1.000000
9/30/2011	3:38:42 PM	SiCl4 MFC set to  50.000000
9/30/2011	3:38:42 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:38:42 PM	Tube furnace set to 1000
9/30/2011	3:42:42 PM	Helium valve closed
9/30/2011	3:42:42 PM	BCl3 valve closed
9/30/2011	3:42:42 PM	PH3 valve closed
9/30/2011	3:42:42 PM	SiCl4 pre valve closed
9/30/2011	3:42:42 PM	SiCl4 post valve closed
9/30/2011	3:42:42 PM	Main Vac valve closed
9/30/2011	3:42:42 PM	Bypass valve closed
9/30/2011	3:42:42 PM	H2 valve opened
9/30/2011	3:42:42 PM	Bubbler valve opened
9/30/2011	3:42:42 PM	Helium MFC set to  0.000000
9/30/2011	3:42:42 PM	H2 MFC set to  500.000000
9/30/2011	3:42:42 PM	BCl3 MFC set to  0.000000
9/30/2011	3:42:42 PM	PHl3 MFC set to  0.000000
9/30/2011	3:42:42 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:42:42 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:42:42 PM	Tube furnace set to 750
9/30/2011	3:47:42 PM	H2 valve closed
9/30/2011	3:47:42 PM	BCl3 valve closed
9/30/2011	3:47:42 PM	PH3 valve closed
9/30/2011	3:47:42 PM	SiCl4 pre valve closed
9/30/2011	3:47:42 PM	SiCl4 post valve closed
9/30/2011	3:47:42 PM	Main Vac valve closed
9/30/2011	3:47:42 PM	Bypass valve closed
9/30/2011	3:47:42 PM	Helium valve opened
9/30/2011	3:47:42 PM	Bubbler valve opened
9/30/2011	3:47:42 PM	Helium MFC set to  500.000000
9/30/2011	3:47:42 PM	H2 MFC set to  0.000000
9/30/2011	3:47:42 PM	BCl3 MFC set to  0.000000
9/30/2011	3:47:42 PM	PHl3 MFC set to  0.000000
9/30/2011	3:47:42 PM	SiCl4 MFC set to  0.000000
9/30/2011	3:47:42 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	3:47:43 PM	Tube furnace set to 0
9/30/2011	4:07:43 PM	Helium valve closed
9/30/2011	4:07:43 PM	H2 valve closed
9/30/2011	4:07:43 PM	BCl3 valve closed
9/30/2011	4:07:43 PM	PH3 valve closed
9/30/2011	4:07:43 PM	SiCl4 pre valve closed
9/30/2011	4:07:43 PM	SiCl4 post valve closed
9/30/2011	4:07:43 PM	Main Vac valve closed
9/30/2011	4:07:43 PM	Bypass valve closed
9/30/2011	4:07:43 PM	Bubbler valve closed
9/30/2011	4:07:43 PM	Helium MFC set to  0.000000
9/30/2011	4:07:43 PM	H2 MFC set to  0.000000
9/30/2011	4:07:43 PM	BCl3 MFC set to  0.000000
9/30/2011	4:07:43 PM	PHl3 MFC set to  0.000000
9/30/2011	4:07:43 PM	SiCl4 MFC set to  0.000000
9/30/2011	4:07:43 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	4:07:43 PM	Tube furnace set to 0
9/30/2011	4:07:44 PM	Run finished at 4:07 PM
9/30/2011	5:40:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	5:40:06 PM	Recipe started at 5:40 PM
9/30/2011	5:40:06 PM	Helium valve closed
9/30/2011	5:40:06 PM	H2 valve closed
9/30/2011	5:40:06 PM	BCl3 valve closed
9/30/2011	5:40:06 PM	PH3 valve closed
9/30/2011	5:40:06 PM	SiCl4 pre valve closed
9/30/2011	5:40:06 PM	SiCl4 post valve closed
9/30/2011	5:40:06 PM	Main Vac valve closed
9/30/2011	5:40:06 PM	Bypass valve closed
9/30/2011	5:40:06 PM	Bubbler valve closed
9/30/2011	5:40:07 PM	Helium MFC set to  0.000000
9/30/2011	5:40:07 PM	H2 MFC set to  0.000000
9/30/2011	5:40:07 PM	BCl3 MFC set to  0.000000
9/30/2011	5:40:07 PM	PHl3 MFC set to  0.000000
9/30/2011	5:40:07 PM	SiCl4 MFC set to  0.000000
9/30/2011	5:40:07 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	5:40:07 PM	Tube furnace set to 0
9/30/2011	5:40:10 PM	H2 valve closed
9/30/2011	5:40:10 PM	BCl3 valve closed
9/30/2011	5:40:10 PM	PH3 valve closed
9/30/2011	5:40:10 PM	SiCl4 pre valve closed
9/30/2011	5:40:10 PM	SiCl4 post valve closed
9/30/2011	5:40:10 PM	Main Vac valve closed
9/30/2011	5:40:10 PM	Bypass valve closed
9/30/2011	5:40:10 PM	Bubbler valve closed
9/30/2011	5:40:10 PM	Helium valve opened
9/30/2011	5:40:10 PM	Helium MFC set to  500.000000
9/30/2011	5:40:10 PM	H2 MFC set to  0.000000
9/30/2011	5:40:10 PM	BCl3 MFC set to  0.000000
9/30/2011	5:40:10 PM	PHl3 MFC set to  0.000000
9/30/2011	5:40:10 PM	SiCl4 MFC set to  0.000000
9/30/2011	5:40:10 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	5:40:10 PM	Tube furnace set to 0
9/30/2011	5:40:14 PM	Helium valve closed
9/30/2011	5:40:14 PM	H2 valve closed
9/30/2011	5:40:14 PM	BCl3 valve closed
9/30/2011	5:40:14 PM	PH3 valve closed
9/30/2011	5:40:14 PM	SiCl4 pre valve closed
9/30/2011	5:40:14 PM	SiCl4 post valve closed
9/30/2011	5:40:14 PM	Main Vac valve closed
9/30/2011	5:40:14 PM	Bypass valve closed
9/30/2011	5:40:14 PM	Bubbler valve closed
9/30/2011	5:40:14 PM	Helium MFC set to  0.000000
9/30/2011	5:40:14 PM	H2 MFC set to  0.000000
9/30/2011	5:40:14 PM	BCl3 MFC set to  0.000000
9/30/2011	5:40:14 PM	PHl3 MFC set to  0.000000
9/30/2011	5:40:14 PM	SiCl4 MFC set to  0.000000
9/30/2011	5:40:14 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	5:40:14 PM	Tube furnace set to 0
9/30/2011	5:40:15 PM	Run finished at 5:40 PM
9/30/2011	5:40:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/30/2011	5:45:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/30/2011	5:45:10 PM	Recipe started at 5:45 PM
9/30/2011	5:45:10 PM	Helium valve closed
9/30/2011	5:45:10 PM	H2 valve closed
9/30/2011	5:45:10 PM	BCl3 valve closed
9/30/2011	5:45:10 PM	PH3 valve closed
9/30/2011	5:45:10 PM	SiCl4 pre valve closed
9/30/2011	5:45:10 PM	SiCl4 post valve closed
9/30/2011	5:45:10 PM	Main Vac valve closed
9/30/2011	5:45:10 PM	Bubbler valve closed
9/30/2011	5:45:10 PM	Bypass valve opened
9/30/2011	5:45:10 PM	Helium MFC set to  0.000000
9/30/2011	5:45:10 PM	H2 MFC set to  0.000000
9/30/2011	5:45:10 PM	BCl3 MFC set to  0.000000
9/30/2011	5:45:10 PM	PHl3 MFC set to  0.000000
9/30/2011	5:45:10 PM	SiCl4 MFC set to  0.000000
9/30/2011	5:45:10 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	5:45:10 PM	Tube furnace set to 0
9/30/2011	5:46:18 PM	Helium valve closed
9/30/2011	5:46:18 PM	H2 valve closed
9/30/2011	5:46:18 PM	BCl3 valve closed
9/30/2011	5:46:18 PM	PH3 valve closed
9/30/2011	5:46:18 PM	SiCl4 pre valve closed
9/30/2011	5:46:18 PM	SiCl4 post valve closed
9/30/2011	5:46:18 PM	Main Vac valve closed
9/30/2011	5:46:18 PM	Bubbler valve closed
9/30/2011	5:46:18 PM	Bypass valve opened
9/30/2011	5:46:18 PM	Helium MFC set to  0.000000
9/30/2011	5:46:18 PM	H2 MFC set to  0.000000
9/30/2011	5:46:18 PM	BCl3 MFC set to  0.000000
9/30/2011	5:46:18 PM	PHl3 MFC set to  0.000000
9/30/2011	5:46:18 PM	SiCl4 MFC set to  0.000000
9/30/2011	5:46:18 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	5:46:19 PM	Tube furnace set to 0
9/30/2011	5:47:19 PM	Helium valve closed
9/30/2011	5:47:19 PM	H2 valve closed
9/30/2011	5:47:19 PM	BCl3 valve closed
9/30/2011	5:47:19 PM	PH3 valve closed
9/30/2011	5:47:19 PM	SiCl4 pre valve closed
9/30/2011	5:47:19 PM	SiCl4 post valve closed
9/30/2011	5:47:19 PM	Bypass valve closed
9/30/2011	5:47:19 PM	Bubbler valve closed
9/30/2011	5:47:19 PM	Main Vac valve opened
9/30/2011	5:47:19 PM	Helium MFC set to  0.000000
9/30/2011	5:47:19 PM	H2 MFC set to  0.000000
9/30/2011	5:47:19 PM	BCl3 MFC set to  0.000000
9/30/2011	5:47:19 PM	PHl3 MFC set to  0.000000
9/30/2011	5:47:19 PM	SiCl4 MFC set to  0.000000
9/30/2011	5:47:19 PM	Bypass solenoid MFC set to  0.000000
9/30/2011	5:47:19 PM	Tube furnace set to 0
9/30/2011	5:47:20 PM	Run finished at 5:47 PM
9/30/2011	5:47:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
